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for cleaning surfaces while plating with ions of materials introduced into the discharge

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  • CPC
  • H01J37/36
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/36for cleaning surfaces while plating with ions of materials introduced into the discharge
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    System and methods using an inline surface engineering source
    • Patent number 11,862,433
    • Issue date Jan 2, 2024
    • Varlan Semiconductor Equipment Associates, Inc.
    • Christopher Hatem
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Bonding method for cleaning non-bonding surface of substrate
    • Patent number 11,626,302
    • Issue date Apr 11, 2023
    • Tokyo Electron Limited
    • Yuji Mimura
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Bonding system with cleaning apparatus for cleaning non-bonding sur...
    • Patent number 11,424,142
    • Issue date Aug 23, 2022
    • Tokyo Electron Limited
    • Yuji Mimura
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Methods and devices for examining an electrically charged specimen...
    • Patent number 11,170,970
    • Issue date Nov 9, 2021
    • Carl Zeiss SMT GmbH
    • Michael Budach
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Process for coating a conductive component and conductive component...
    • Patent number 11,072,850
    • Issue date Jul 27, 2021
    • UNIVERSIDADE FEDERAL DE SANTA CATARINA
    • Cristiano Binder
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    System and methods using an inline surface engineering source
    • Patent number 11,069,511
    • Issue date Jul 20, 2021
    • Varian Semiconductor Equipment Associates, Inc.
    • Christopher Hatem
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Differentially pumped reactive gas injector
    • Patent number 10,580,628
    • Issue date Mar 3, 2020
    • Lam Research Corporation
    • Ivan L. Berry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    RF clean system for electrostatic elements
    • Patent number 10,410,844
    • Issue date Sep 10, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Kevin Anglin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion beam materials processing system with grid short clearing syste...
    • Patent number 10,014,164
    • Issue date Jul 3, 2018
    • Veeco Instruments Inc.
    • Boris Druz
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Differentially pumped reactive gas injector
    • Patent number 9,837,254
    • Issue date Dec 5, 2017
    • Lam Research Corporation
    • Ivan L. Berry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Arc source macroparticle filter
    • Patent number 5,433,836
    • Issue date Jul 18, 1995
    • Commonwealth Scientific and Industrial Research Organization
    • Philip J. Martin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Hollow cathode discharge source of metal vapor
    • Patent number 4,407,712
    • Issue date Oct 4, 1983
    • The United States of America as represented by the Secretary of the Army
    • William F. Henshaw
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gasless ion plating
    • Patent number 4,039,416
    • Issue date Aug 2, 1977
    • Gerald W. White
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    High vacuum ion plating device
    • Patent number 3,974,059
    • Issue date Aug 10, 1976
    • Yoichi Murayama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3750623
    • Patent number 3,750,623
    • Issue date Aug 7, 1973
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3723276
    • Patent number 3,723,276
    • Issue date Mar 27, 1973
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3676320
    • Patent number 3,676,320
    • Issue date Jul 11, 1972
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3640811
    • Patent number 3,640,811
    • Issue date Feb 8, 1972
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3639151
    • Patent number 3,639,151
    • Issue date Feb 1, 1972
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3528387
    • Patent number 3,528,387
    • Issue date Sep 15, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3514392
    • Patent number 3,514,392
    • Issue date May 26, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3514388
    • Patent number 3,514,388
    • Issue date May 26, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3428546
    • Patent number 3,428,546
    • Issue date Feb 18, 1969
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3404084
    • Patent number 3,404,084
    • Issue date Oct 1, 1968
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3400066
    • Patent number 3,400,066
    • Issue date Sep 3, 1968
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3351543
    • Patent number 3,351,543
    • Issue date Nov 7, 1967
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3329601
    • Patent number 3,329,601
    • Issue date Jul 4, 1967
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3325393
    • Patent number 3,325,393
    • Issue date Jun 13, 1967
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3192892
    • Patent number 3,192,892
    • Issue date Jul 6, 1965
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3021271
    • Patent number 3,021,271
    • Issue date Feb 13, 1962
    • C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents