3403024

Information

• Patent Grant
• 3403024

• References
• Source

• Patent Number

  3,403,024

• Date Filed

  Not available

• Date Issued

  Tuesday, September 24, 1968
  57 years ago

• CPC

  • G03F7/2022 - Multi-step exposure
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S430/152 - Making camera copy

• US Classifications

  • 430 - Radiation imagery chemistry: process, composition, or product thereof