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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/2022Multi-step exposure

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 12,321,100
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contaminated interface mitigation in a semiconductor device
- Patent number 12,324,301
- Issue date Jun 3, 2025
- Imec VZW
- Tung Huei Ke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-dimensional (2D) patterns using multiple exposures of one-dimen...
- Patent number 12,306,540
- Issue date May 20, 2025
- Google LLC
- Lu Tian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography
- Patent number 12,298,667
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Meng-Che Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fabrication of large area 3D photonic crys...
- Patent number 12,287,571
- Issue date Apr 29, 2025
- Steven R.J. Brueck
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Bubble defect reduction
- Patent number 12,248,252
- Issue date Mar 11, 2025
- Lam Research Corporation
- Akhil N. Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and apparatus for ma...
- Patent number 12,235,589
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shinn-Sheng Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metal plate for producing vapor deposition masks, production method...
- Patent number 12,227,823
- Issue date Feb 18, 2025
- Dai Nippon Printing Co., Ltd.
- Hiroki Oka
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Photomask, display device, and manufacturing method thereof
- Patent number 12,170,295
- Issue date Dec 17, 2024
- Samsung Display Co., Ltd.
- Dong Hee Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal plate for manufacturing deposition mask and manufacturing met...
- Patent number 12,117,727
- Issue date Oct 15, 2024
- Dai Nippon Printing Co., Ltd.
- Hiroki Oka
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Patterning method and overlay measurement method
- Patent number 12,106,962
- Issue date Oct 1, 2024
- United Microelectronics Corp.
- Yi Jing Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for identifying a relief precursor for producing a relief st...
- Patent number 12,076,974
- Issue date Sep 3, 2024
- Flint Group Germany GmbH
- Markus Muehlfeit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist structure, patterned deposition layer, semiconductor ch...
- Patent number 12,040,188
- Issue date Jul 16, 2024
- Tencent Technology (Shenzhen) Company Limited
- Wenlong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterning interconnects and other structures by photo-sensitizing...
- Patent number 12,033,890
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Jen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cutting conductive patterns
- Patent number 12,013,643
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Hsiung Hsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate measuring device and a method of using the same
- Patent number 12,007,691
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Min-Cheng Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microfluidic device and method for manufacturing the same, and meth...
- Patent number 11,992,836
- Issue date May 28, 2024
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Tuo Sun
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet (EUV) photomask and method of manufacturing sem...
- Patent number 11,927,879
- Issue date Mar 12, 2024
- Samsung Electronics Co., Ltd.
- Moosong Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask, display device, and manufacturing method thereof
- Patent number 11,923,383
- Issue date Mar 5, 2024
- Samsung Display Co., Ltd.
- Dong Hee Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 11,921,430
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,899,362
- Issue date Feb 13, 2024
- Canon Kabushiki Kaisha
- Yosuke Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography
- Patent number 11,892,774
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Meng-Che Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photodynamic compositions, methods of making, and uses thereof
- Patent number 11,884,784
- Issue date Jan 30, 2024
- North Carolina State University
- Reza Arman Ghiladi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Film structure for electric field guided photoresist patterning pro...
- Patent number 11,880,137
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nitride-based semiconductor devices with recesses for dicing and me...
- Patent number 11,854,887
- Issue date Dec 26, 2023
- INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.
- Weixing Du
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and template manufacturing method
- Patent number 11,809,082
- Issue date Nov 7, 2023
- Kioxia Corporation
- Mitsuru Kondo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a patterned structure and device thereof
- Patent number 11,803,125
- Issue date Oct 31, 2023
- Singapore University of Technology and Design
- You Sin Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Di-amine compound, and heat-resistant resin and resin composition u...
- Patent number 11,802,181
- Issue date Oct 31, 2023
- Toray Industries, Inc.
- Yuki Masuda
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Underlayer material for photoresist
- Patent number 11,796,918
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 11,768,443
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ching Lee
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PROCESSING A SUBSTRATE AND METHOD OF FABRICATING BIT LINE...
- Publication number 20250185235
- Publication date Jun 5, 2025
- NANYA TECHNOLOGY CORPORATION
- CHIH-YING TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20250155817
- Publication date May 15, 2025
- SEMES CO., LTD.
- Ki Sang EUM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...
- Publication number 20250149336
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yonghoon MOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...
- Publication number 20250147431
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shinn-Sheng YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION PROCESSING APPARATUS, PATTERN FORMING APPARATUS, INFORM...
- Publication number 20250138427
- Publication date May 1, 2025
- Canon Kabushiki Kaisha
- JUNYA TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING DEVICE
- Publication number 20250130511
- Publication date Apr 24, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Mark Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED FIELD STITCHING WITH CORRECTIVE CHEMISTRY
- Publication number 20250130501
- Publication date Apr 24, 2025
- Geminatio, Inc.
- Brennan Peterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE MASK, SEMICONDUCTOR DEVICE USING THE EXPOSURE MASK, AND ME...
- Publication number 20250085637
- Publication date Mar 13, 2025
- SK HYNIX INC.
- Jong Hoon KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR...
- Publication number 20250069899
- Publication date Feb 27, 2025
- Samsung Electronics Co., Ltd.
- Jakyoung Gu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR MANUFACTURING ELECTRONIC DEVICES
- Publication number 20250044684
- Publication date Feb 6, 2025
- FABRIC8LABS, INC.
- Edward White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PLATE FOR PRODUCING VAPOR DEPOSITION MASKS, PRODUCTION METHOD...
- Publication number 20250043399
- Publication date Feb 6, 2025
- DAI NIPPON PRINTING CO., LTD.
- Hiroki OKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHOGRAPHY SYSTEM AND RELATED METHODS FOR FORMING STRUCTURES OF DI...
- Publication number 20250028251
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Thomas L. LAIDIG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wafer Bow Mitigation
- Publication number 20250021006
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Andrew Whittaker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD
- Publication number 20250021027
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Keisaku KAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A RELIEF PRECURSOR WITH VEGETABLE OILS AS PLASTICIZERS SUITABLE FOR...
- Publication number 20250004368
- Publication date Jan 2, 2025
- XSYS Germany GmbH
- Patrick-Kurt Dannecker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES
- Publication number 20240402607
- Publication date Dec 5, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Thomas Klein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IDENTIFYING A RELIEF PRECURSOR FOR PRODUCING A RELIEF ST...
- Publication number 20240391231
- Publication date Nov 28, 2024
- Flint Group Germany GmbH
- Markus MUEHLFEIT
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES
- Publication number 20240377744
- Publication date Nov 14, 2024
- Geminatio, Inc.
- Brennan Peterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-LAYER HIGH-ASPECT RATIO X-RAY GRATING AND METHOD OF MANUFACTURE
- Publication number 20240353353
- Publication date Oct 24, 2024
- Karim S. KARIM
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
PATTERNING INTERCONNECTS AND OTHER STRUCTURES BY PHOTO-SENSITIZING...
- Publication number 20240332068
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Jen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Redistribution Lines and The Method Forming the Same Through Stitching
- Publication number 20240310733
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Yun Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20240313066
- Publication date Sep 19, 2024
- Samsung Electronics Co., Ltd.
- Soo Kyung KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY METHOD BASED ON BILAYER PHOTORESIST
- Publication number 20240295817
- Publication date Sep 5, 2024
- SHANGHAI MICROSTART PHOTOELECTRIC TECHNOLOGY CO., LTD.
- Yijiao GAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
- Publication number 20240248412
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...
- Publication number 20240241446
- Publication date Jul 18, 2024
- Intel Corporation
- Marvin Paik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY CORRECTION FOR ADVANCED INTEGRATED-CIRCUIT DEVICES
- Publication number 20240219825
- Publication date Jul 4, 2024
- ONTO INNOVATION INC.
- Keith F. Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTO-DEFINABLE HYDROPHOBIC COMPOSITIONS
- Publication number 20240192599
- Publication date Jun 13, 2024
- Hewlett-Packard Development Company, L.P.
- Bo Song
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMEN...
- Publication number 20240192606
- Publication date Jun 13, 2024
- Google LLC
- Lu Tian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOF
- Publication number 20240170504
- Publication date May 23, 2024
- SAMSUNG DISPLAY CO., LTD.
- Dong Hee SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY
- Publication number 20240126174
- Publication date Apr 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Meng-Che Tu
- H01 - BASIC ELECTRIC ELEMENTS

Multi-step exposure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor lithography system and/or method

Contaminated interface mitigation in a semiconductor device

Two-dimensional (2D) patterns using multiple exposures of one-dimen...

Lithography

Method and apparatus for fabrication of large area 3D photonic crys...

Bubble defect reduction

Method of manufacturing a semiconductor device and apparatus for ma...

Metal plate for producing vapor deposition masks, production method...

Photomask, display device, and manufacturing method thereof

Metal plate for manufacturing deposition mask and manufacturing met...

Patterning method and overlay measurement method

Method for identifying a relief precursor for producing a relief st...

Photoresist structure, patterned deposition layer, semiconductor ch...

Patterning interconnects and other structures by photo-sensitizing...

Method of cutting conductive patterns

Substrate measuring device and a method of using the same

Microfluidic device and method for manufacturing the same, and meth...

Extreme ultraviolet (EUV) photomask and method of manufacturing sem...

Photomask, display device, and manufacturing method thereof

Semiconductor lithography system and/or method

Imprint apparatus, imprint method, and article manufacturing method

Lithography

Photodynamic compositions, methods of making, and uses thereof

Film structure for electric field guided photoresist patterning pro...

Nitride-based semiconductor devices with recesses for dicing and me...

Pattern forming method and template manufacturing method

Method of forming a patterned structure and device thereof

Di-amine compound, and heat-resistant resin and resin composition u...

Underlayer material for photoresist

Method for manufacturing semiconductor structure

Patents Applicationslast 30 patents

METHOD OF PROCESSING A SUBSTRATE AND METHOD OF FABRICATING BIT LINE...

SUBSTRATE TREATING APPARATUS

PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...

INFORMATION PROCESSING APPARATUS, PATTERN FORMING APPARATUS, INFORM...

COATING AND DEVELOPING DEVICE

ENHANCED FIELD STITCHING WITH CORRECTIVE CHEMISTRY

EXPOSURE MASK, SEMICONDUCTOR DEVICE USING THE EXPOSURE MASK, AND ME...

SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR...

SYSTEMS AND METHODS FOR MANUFACTURING ELECTRONIC DEVICES

METAL PLATE FOR PRODUCING VAPOR DEPOSITION MASKS, PRODUCTION METHOD...

LITHOGRAPHY SYSTEM AND RELATED METHODS FOR FORMING STRUCTURES OF DI...

Wafer Bow Mitigation

EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD

A RELIEF PRECURSOR WITH VEGETABLE OILS AS PLASTICIZERS SUITABLE FOR...

UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES

METHOD FOR IDENTIFYING A RELIEF PRECURSOR FOR PRODUCING A RELIEF ST...

LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES

MULTI-LAYER HIGH-ASPECT RATIO X-RAY GRATING AND METHOD OF MANUFACTURE

PATTERNING INTERCONNECTS AND OTHER STRUCTURES BY PHOTO-SENSITIZING...

Redistribution Lines and The Method Forming the Same Through Stitching

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

PHOTOLITHOGRAPHY METHOD BASED ON BILAYER PHOTORESIST

SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...

OVERLAY CORRECTION FOR ADVANCED INTEGRATED-CIRCUIT DEVICES

PHOTO-DEFINABLE HYDROPHOBIC COMPOSITIONS

TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMEN...

PHOTOMASK, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOF

LITHOGRAPHY