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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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Patents Grantslast 30 patents

Information Patent Grant
Photomask, display device, and manufacturing method thereof
- Patent number 12,170,295
- Issue date Dec 17, 2024
- Samsung Display Co., Ltd.
- Dong Hee Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal plate for manufacturing deposition mask and manufacturing met...
- Patent number 12,117,727
- Issue date Oct 15, 2024
- Dai Nippon Printing Co., Ltd.
- Hiroki Oka
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Patterning method and overlay measurement method
- Patent number 12,106,962
- Issue date Oct 1, 2024
- United Microelectronics Corp.
- Yi Jing Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for identifying a relief precursor for producing a relief st...
- Patent number 12,076,974
- Issue date Sep 3, 2024
- Flint Group Germany GmbH
- Markus Muehlfeit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist structure, patterned deposition layer, semiconductor ch...
- Patent number 12,040,188
- Issue date Jul 16, 2024
- Tencent Technology (Shenzhen) Company Limited
- Wenlong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterning interconnects and other structures by photo-sensitizing...
- Patent number 12,033,890
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Jen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cutting conductive patterns
- Patent number 12,013,643
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Hsiung Hsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate measuring device and a method of using the same
- Patent number 12,007,691
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Min-Cheng Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microfluidic device and method for manufacturing the same, and meth...
- Patent number 11,992,836
- Issue date May 28, 2024
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Tuo Sun
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet (EUV) photomask and method of manufacturing sem...
- Patent number 11,927,879
- Issue date Mar 12, 2024
- Samsung Electronics Co., Ltd.
- Moosong Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask, display device, and manufacturing method thereof
- Patent number 11,923,383
- Issue date Mar 5, 2024
- Samsung Display Co., Ltd.
- Dong Hee Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 11,921,430
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,899,362
- Issue date Feb 13, 2024
- Canon Kabushiki Kaisha
- Yosuke Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography
- Patent number 11,892,774
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Meng-Che Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photodynamic compositions, methods of making, and uses thereof
- Patent number 11,884,784
- Issue date Jan 30, 2024
- North Carolina State University
- Reza Arman Ghiladi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Film structure for electric field guided photoresist patterning pro...
- Patent number 11,880,137
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nitride-based semiconductor devices with recesses for dicing and me...
- Patent number 11,854,887
- Issue date Dec 26, 2023
- INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.
- Weixing Du
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and template manufacturing method
- Patent number 11,809,082
- Issue date Nov 7, 2023
- Kioxia Corporation
- Mitsuru Kondo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a patterned structure and device thereof
- Patent number 11,803,125
- Issue date Oct 31, 2023
- Singapore University of Technology and Design
- You Sin Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Di-amine compound, and heat-resistant resin and resin composition u...
- Patent number 11,802,181
- Issue date Oct 31, 2023
- Toray Industries, Inc.
- Yuki Masuda
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Underlayer material for photoresist
- Patent number 11,796,918
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 11,768,443
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ching Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus of patterning a semiconductor device
- Patent number 11,762,296
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren Zi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metal plate for producing vapor deposition masks, inspection method...
- Patent number 11,733,607
- Issue date Aug 22, 2023
- Dai Nippon Printing Co., Ltd.
- Chikao Ikenaga
- C21 - METALLURGY OF IRON
Information Patent Grant
Method of manufacturing a semiconductor device and apparatus for ma...
- Patent number 11,709,435
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shinn-Sheng Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Secondary imaging optical lithography method and apparatus
- Patent number 11,693,320
- Issue date Jul 4, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning interconnects and other structures by photo-sensitizing...
- Patent number 11,676,855
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Jen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maskless lithography method to fabricate topographic substrate
- Patent number 11,669,012
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Yongan Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film structure for electric field guided photoresist patterning pro...
- Patent number 11,650,506
- Issue date May 16, 2023
- Applied Materials Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithography method
- Patent number 11,644,745
- Issue date May 9, 2023
- Samsung Electronics Co., Ltd.
- Yongwook Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES
- Publication number 20240402607
- Publication date Dec 5, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Thomas Klein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IDENTIFYING A RELIEF PRECURSOR FOR PRODUCING A RELIEF ST...
- Publication number 20240391231
- Publication date Nov 28, 2024
- Flint Group Germany GmbH
- Markus MUEHLFEIT
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES
- Publication number 20240377744
- Publication date Nov 14, 2024
- Geminatio, Inc.
- Brennan Peterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-LAYER HIGH-ASPECT RATIO X-RAY GRATING AND METHOD OF MANUFACTURE
- Publication number 20240353353
- Publication date Oct 24, 2024
- Karim S. KARIM
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
PATTERNING INTERCONNECTS AND OTHER STRUCTURES BY PHOTO-SENSITIZING...
- Publication number 20240332068
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Jen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Redistribution Lines and The Method Forming the Same Through Stitching
- Publication number 20240310733
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Yun Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20240313066
- Publication date Sep 19, 2024
- Samsung Electronics Co., Ltd.
- Soo Kyung KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY METHOD BASED ON BILAYER PHOTORESIST
- Publication number 20240295817
- Publication date Sep 5, 2024
- SHANGHAI MICROSTART PHOTOELECTRIC TECHNOLOGY CO., LTD.
- Yijiao GAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
- Publication number 20240248412
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...
- Publication number 20240241446
- Publication date Jul 18, 2024
- Intel Corporation
- Marvin Paik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY CORRECTION FOR ADVANCED INTEGRATED-CIRCUIT DEVICES
- Publication number 20240219825
- Publication date Jul 4, 2024
- ONTO INNOVATION INC.
- Keith F. Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTO-DEFINABLE HYDROPHOBIC COMPOSITIONS
- Publication number 20240192599
- Publication date Jun 13, 2024
- Hewlett-Packard Development Company, L.P.
- Bo Song
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMEN...
- Publication number 20240192606
- Publication date Jun 13, 2024
- Google LLC
- Lu Tian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOF
- Publication number 20240170504
- Publication date May 23, 2024
- SAMSUNG DISPLAY CO., LTD.
- Dong Hee SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY
- Publication number 20240126174
- Publication date Apr 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Meng-Che Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS AND COMPUTER PROGRAM FOR PROCESSING A SURFACE OF...
- Publication number 20240118632
- Publication date Apr 11, 2024
- Carl Zeiss SMT GMBH
- Stefan Friedrich Rohrlack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BUTTRESSED FIELD TARGET DESIGN FOR OPTICAL AND E-BEAM BASED METROLO...
- Publication number 20240069447
- Publication date Feb 29, 2024
- Intel Corporation
- Deepak SELVANATHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING RESIST PATTERN BY USING EXTREME ULTRAVIOLET LIGH...
- Publication number 20240045336
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Sookyung KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FABRICATING BIT LINE CONTACTS
- Publication number 20240008266
- Publication date Jan 4, 2024
- NANYA TECHNOLOGY CORPORATION
- CHIH-YING TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK FOR STITCHING EXPOSURE
- Publication number 20230367201
- Publication date Nov 16, 2023
- Korea Advanced Institute of Science and Technology
- Jungchul SONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM TO DETERMINE AN EXPOSURE TIME AND/OR INTENSITY TO...
- Publication number 20230367222
- Publication date Nov 16, 2023
- XSYS PREPRESS N.V.
- Pieter LENSSENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...
- Publication number 20230333486
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shinn-Sheng YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD, MANUFACTURING METHOD OF CIRCUIT BOARD, AND...
- Publication number 20230305403
- Publication date Sep 28, 2023
- FUJIFILM CORPORATION
- Akio KATAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Interconnects and Other Structures by Photo-Sensitizing...
- Publication number 20230268224
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Jen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230213854
- Publication date Jul 6, 2023
- Canon Kabushiki Kaisha
- Yosuke MURAKAMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONDUCTIVE POLYMER COMPOSITION, COATED PRODUCT, AND PATTERNING PROCESS
- Publication number 20230168584
- Publication date Jun 1, 2023
- Shin-Etsu Chemical Co., Ltd.
- Takayuki NAGASAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UV Treatment of EUV Resists
- Publication number 20230152705
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Steven Grzeskowiak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEGATIVE TONE PHOTORESIST FOR EUV LITHOGRAPHY
- Publication number 20230142787
- Publication date May 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Po YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TRANSFER FILM AND METHOD FOR PRODUCING LAMINATE
- Publication number 20230104836
- Publication date Apr 6, 2023
- FUJIFILM CORPORATION
- Kunihiko KODAMA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR INSPECTING PHOTOSENSITIVE COMPOSITION AND METHOD FOR PRO...
- Publication number 20230108447
- Publication date Apr 6, 2023
- FUJIFILM CORPORATION
- Naoya IGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Multi-step exposure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Photomask, display device, and manufacturing method thereof

Metal plate for manufacturing deposition mask and manufacturing met...

Patterning method and overlay measurement method

Method for identifying a relief precursor for producing a relief st...

Photoresist structure, patterned deposition layer, semiconductor ch...

Patterning interconnects and other structures by photo-sensitizing...

Method of cutting conductive patterns

Substrate measuring device and a method of using the same

Microfluidic device and method for manufacturing the same, and meth...

Extreme ultraviolet (EUV) photomask and method of manufacturing sem...

Photomask, display device, and manufacturing method thereof

Semiconductor lithography system and/or method

Imprint apparatus, imprint method, and article manufacturing method

Lithography

Photodynamic compositions, methods of making, and uses thereof

Film structure for electric field guided photoresist patterning pro...

Nitride-based semiconductor devices with recesses for dicing and me...

Pattern forming method and template manufacturing method

Method of forming a patterned structure and device thereof

Di-amine compound, and heat-resistant resin and resin composition u...

Underlayer material for photoresist

Method for manufacturing semiconductor structure

Method and apparatus of patterning a semiconductor device

Metal plate for producing vapor deposition masks, inspection method...

Method of manufacturing a semiconductor device and apparatus for ma...

Secondary imaging optical lithography method and apparatus

Patterning interconnects and other structures by photo-sensitizing...

Maskless lithography method to fabricate topographic substrate

Film structure for electric field guided photoresist patterning pro...

Photolithography method

Patents Applicationslast 30 patents

UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES

METHOD FOR IDENTIFYING A RELIEF PRECURSOR FOR PRODUCING A RELIEF ST...

LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES

MULTI-LAYER HIGH-ASPECT RATIO X-RAY GRATING AND METHOD OF MANUFACTURE

PATTERNING INTERCONNECTS AND OTHER STRUCTURES BY PHOTO-SENSITIZING...

Redistribution Lines and The Method Forming the Same Through Stitching

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

PHOTOLITHOGRAPHY METHOD BASED ON BILAYER PHOTORESIST

SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...

OVERLAY CORRECTION FOR ADVANCED INTEGRATED-CIRCUIT DEVICES

PHOTO-DEFINABLE HYDROPHOBIC COMPOSITIONS

TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMEN...

PHOTOMASK, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOF

LITHOGRAPHY

METHOD, APPARATUS AND COMPUTER PROGRAM FOR PROCESSING A SURFACE OF...

BUTTRESSED FIELD TARGET DESIGN FOR OPTICAL AND E-BEAM BASED METROLO...

METHOD FOR FORMING RESIST PATTERN BY USING EXTREME ULTRAVIOLET LIGH...

METHOD OF FABRICATING BIT LINE CONTACTS

MASK FOR STITCHING EXPOSURE

METHOD AND SYSTEM TO DETERMINE AN EXPOSURE TIME AND/OR INTENSITY TO...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...

PATTERN FORMING METHOD, MANUFACTURING METHOD OF CIRCUIT BOARD, AND...

Patterning Interconnects and Other Structures by Photo-Sensitizing...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

CONDUCTIVE POLYMER COMPOSITION, COATED PRODUCT, AND PATTERNING PROCESS

UV Treatment of EUV Resists

NEGATIVE TONE PHOTORESIST FOR EUV LITHOGRAPHY

TRANSFER FILM AND METHOD FOR PRODUCING LAMINATE

METHOD FOR INSPECTING PHOTOSENSITIVE COMPOSITION AND METHOD FOR PRO...