3459668

Information

• Patent Grant
• 3459668

• References
• Source

• Patent Number

  3,459,668

• Date Filed

  Not available

• Date Issued

  Tuesday, August 5, 1969
  55 years ago

• CPC

  • H01L21/223 - using diffusion into or out of a solid from or into a gaseous phase
  • C30B29/06 - Silicon
  • C30B31/08 - the diffusion material being a compound of the elements to be diffused
  • C30B31/165 - Diffusion sources
  • Y10S252/951 - for vapor transport

• US Classifications

  • 252 - Compositions
  • 257 - Active solid-state devices