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3480535
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Information
Patent Grant
3480535
References
Source
Patent Number
3,480,535
Date Filed
Not available
Date Issued
Tuesday, November 25, 1969
55 years ago
CPC
C23C14/35 - by application of a magnetic field
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S117/912 - Replenishing liquid precursor, other than a moving zone
Y10S148/049 - Equivalence and options
Y10S148/107 - Melt
Y10S148/152 - Single crystal on amorphous substrate
Y10S148/158 - Sputtering
Y10S148/166 - Traveling solvent method
Y10S148/169 - Vacuum deposition
Y10S148/17 - Vapor-liquid-solid
US Classifications
204 - Chemistry: electrical and wave energy
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
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