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3492215
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Information
Patent Grant
3492215
References
Source
Patent Number
3,492,215
Date Filed
Not available
Date Issued
Tuesday, January 27, 1970
55 years ago
CPC
C23C14/22 - characterised by the process of coating
C23C14/3478 - using electrons
H01J37/34 - operating with cathodic sputtering
H05H1/00 - Generating plasma Handling plasma
Y10S148/065 - Gp III-V generic compounds-processing
Y10S148/169 - Vacuum deposition
US Classifications
204 - Chemistry: electrical and wave energy
148 - Metal treatment
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