3494852

Information

• Patent Grant
• 3494852

• References
• Source

• Patent Number

  3,494,852

• Date Filed

  Not available

• Date Issued

  Tuesday, February 10, 1970
  54 years ago

• CPC

  • H01L21/67011 - Apparatus for manufacture or treatment
  • C23C14/325 - Electric arc evaporation
  • H01J27/10 - Duoplasmatrons
  • H01J37/3178 - for applying thin layers on objects
  • Y10S422/906 - Plasma or ion generation means

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 219 - Electric heating
  • 313 - Electric lamp and discharge devices
  • 422 - Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
  • 427 - Coating processes