3528387

Information

• Patent Grant
• 3528387

• References
• Source

• Patent Number

  3,528,387

• Date Filed

  Not available

• Date Issued

  Tuesday, September 15, 1970
  54 years ago

• CPC

  • C23C14/5833 - Ion beam bombardment
  • C23C14/022 - by means of bombardment with energetic particles or radiation
  • C23C14/22 - characterised by the process of coating
  • C23C14/24 - Vacuum evaporation
  • C23C14/3478 - using electrons
  • C23C14/58 - After-treatment
  • C23C14/5893 - Mixing of deposited material
  • C23G5/00 - Cleaning or de-greasing metallic material by other methods Apparatus for cleaning or de-greasing metallic material with organic solvents
  • H01J37/3053 - for evaporating or etching
  • H01J37/36 - for cleaning surfaces while plating with ions of materials introduced into the discharge

• US Classifications

  • 118 - Coating apparatus
  • 204 - Chemistry: electrical and wave energy