3532565

Information

• Patent Grant
• 3532565

• References
• Source

• Patent Number

  3,532,565

• Date Filed

  Not available

• Date Issued

  Tuesday, October 6, 1970
  54 years ago

• CPC

  • C30B31/165 - Diffusion sources
  • C30B29/06 - Silicon
  • C30B31/08 - the diffusion material being a compound of the elements to be diffused
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S252/951 - for vapor transport

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 252 - Compositions