3573190

Information

• Patent Grant
• 3573190

• References
• Source

• Patent Number

  3,573,190

• Date Filed

  Not available

• Date Issued

  Tuesday, March 30, 1971
  53 years ago

• CPC

  • C23C14/35 - by application of a magnetic field
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S117/912 - Replenishing liquid precursor, other than a moving zone
  • Y10S148/049 - Equivalence and options
  • Y10S148/107 - Melt
  • Y10S148/152 - Single crystal on amorphous substrate
  • Y10S148/158 - Sputtering
  • Y10S148/166 - Traveling solvent method
  • Y10S148/169 - Vacuum deposition
  • Y10S148/17 - Vapor-liquid-solid

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 148 - Metal treatment