3634161

Information

• Patent Grant
• 3634161

• References
• Source

• Patent Number

  3,634,161

• Date Filed

  Not available

• Date Issued

  Tuesday, January 11, 1972
  53 years ago

• CPC

  • H01L21/78 - with subsequent division of the substrate into plural individual devices
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/308 - using masks
  • Y10S148/054 - Flat sheets-substrates
  • Y10S438/945 - Special

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices