3644700

Information

• Patent Grant
• 3644700

• References
• Source

• Patent Number

  3,644,700

• Date Filed

  Not available

• Date Issued

  Tuesday, February 22, 1972
  52 years ago

• CPC

  • H01J37/3045 - Object or beam position registration
  • G05B19/39 - using a combination of the means covered by at least two of the preceding sub-groups G05B19/21, G05B19/27, and G05B19/33
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • G05B2219/42251 - Control position of beam in coordination with xy slide

• US Classifications

  • 219 - Electric heating
  • 250 - Radiant energy
  • 315 - Electric lamp and discharge devices: systems