3661436

Information

• Patent Grant
• 3661436

• References
• Source

• Patent Number

  3,661,436

• Date Filed

  Not available

• Date Issued

  Tuesday, May 9, 1972
  52 years ago

• CPC

  • G03F1/54 - Absorbers
  • Y10S438/943 - Movable
  • Y10S438/945 - Special

• US Classifications

  • 430 - Radiation imagery chemistry: process, composition, or product thereof
  • 359 - Optical: systems and elements
  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process