3671309

Information

• Patent Grant
• 3671309

• References
• Source

• Patent Number

  3,671,309

• Date Filed

  Not available

• Date Issued

  Tuesday, June 20, 1972
  53 years ago

• CPC

  • H01L21/31654 - of semiconductor materials
  • C01G17/02 - Germanium dioxide
  • C23C8/10 - Oxidising
  • Y10S148/017 - Clean surfaces
  • Y10S148/118 - Oxide films
  • Y10S438/903 - Catalyst aided deposition

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices
  • 428 - Stock material or miscellaneous articles