3683195

Information

• Patent Grant
• 3683195

• References
• Source

• Patent Number

  3,683,195

• Date Filed

  Not available

• Date Issued

  Tuesday, August 8, 1972
  52 years ago

• CPC

  • G03F9/70 - for microlithography
  • G05D3/183 - using stepping motor
  • G06T1/0014 - Image feed-back for automatic industrial control

• US Classifications

  • 250 - Radiant energy