3697338

Information

• Patent Grant
• 3697338

• References
• Source

• Patent Number

  3,697,338

• Date Filed

  Not available

• Date Issued

  Tuesday, October 10, 1972
  52 years ago

• CPC

  • H01L21/2258 - Diffusion into or out of AIIIBV compounds
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S148/022 - Controlled atmosphere
  • Y10S148/043 - Dual dielectric
  • Y10S148/118 - Oxide films
  • Y10S252/951 - for vapor transport

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 252 - Compositions
  • 257 - Active solid-state devices