3735484

Information

• Patent Grant
• 3735484

• References
• Source

• Patent Number

  3,735,484

• Date Filed

  Not available

• Date Issued

  Tuesday, May 29, 1973
  52 years ago

• CPC

  • C23G1/22 - Light metals
  • C23C22/08 - Orthophosphates
  • C23C22/38 - containing also phosphates
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S438/906 - Cleaning of wafer as interim step

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices