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3745073
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Information
Patent Grant
3745073
References
Source
Patent Number
3,745,073
Date Filed
Not available
Date Issued
Tuesday, July 10, 1973
51 years ago
CPC
H01L21/383 - using diffusion into or out of a solid from or into a gaseous phase
H01L21/388 - using diffusion into or out of a solid from or into a liquid phase
Y10S148/151 - Simultaneous diffusion
Y10S252/951 - for vapor transport
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
252 - Compositions
257 - Active solid-state devices
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