3750620

Information

• Patent Grant
• 3750620

• References
• Source

• Patent Number

  3,750,620

• Date Filed

  Not available

• Date Issued

  Tuesday, August 7, 1973
  51 years ago

• CPC

  • C23C16/45585 - Compression of gas before it reaches the substrate
  • C30B25/14 - Feed and outlet means for the gases Modifying the flow of the reactive gases

• US Classifications

  • 118 - Coating apparatus