Compression of gas before it reaches the substrate

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CPC
C23C16/45585

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45585Compression of gas before it reaches the substrate

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Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus
- Patent number 10,745,824
- Issue date Aug 18, 2020
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film encapsulation processing system and process kit
- Patent number 10,655,222
- Issue date May 19, 2020
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,584,416
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High productivity deposition reactor comprising a gas flow chamber...
- Patent number 9,870,937
- Issue date Jan 16, 2018
- OB Realty, LLC.
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to apply material to a surface
- Patent number 9,527,107
- Issue date Dec 27, 2016
- International Business Machines Corporation
- Theodore G. van Kessel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead-cooler system of a semiconductor-processing chamber for...
- Patent number 9,484,190
- Issue date Nov 1, 2016
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution plate for chemical vapor deposition systems and me...
- Patent number 9,328,420
- Issue date May 3, 2016
- Sunedison Semiconductor Limited (UEN201334164H)
- John Allen Pitney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metalorganic chemical vapor deposition reactor
- Patent number 8,920,565
- Issue date Dec 30, 2014
- Sumitomo Electric Industries, Ltd.
- Masaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal organic chemical vapor deposition equipment
- Patent number 8,906,162
- Issue date Dec 9, 2014
- Sumitomo Electric Industries, Ltd.
- Masaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 8,277,561
- Issue date Oct 2, 2012
- Samsung Electronics Co., Ltd.
- Changsung Sean Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous feed coater
- Patent number 6,869,484
- Issue date Mar 22, 2005
- Shipley Company, L.L.C.
- Andrew T. Hunt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical oven with a boat for the uniform treatment of wafers
- Patent number 6,240,875
- Issue date Jun 5, 2001
- ASM International N.V
- Margreet Obertine Anne-Marie Van Wijck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for producing thin films of mixed metal oxides from organic...
- Patent number 5,350,453
- Issue date Sep 27, 1994
- Hoechst Aktiengesellschaft
- Ernst-Gunther Schlosser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal organic chemical vapor deposition (MOCVD) reactor with recirc...
- Patent number 5,173,336
- Issue date Dec 22, 1992
- Santa Barbara Research Center
- Adam M. Kennedy
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and process for producing a stable beam of fine particles
- Patent number 4,911,805
- Issue date Mar 27, 1990
- Canon Kabushiki Kaisha
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction apparatus which introduces one reacting substance within a...
- Patent number 4,909,914
- Issue date Mar 20, 1990
- Canon Kabushiki Kaisha
- Yuji Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing material on a substrate
- Patent number 4,761,269
- Issue date Aug 2, 1988
- Crystal Specialties, Inc.
- Darrell R. Conger
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process and apparatus for forming thin films
- Patent number 4,689,247
- Issue date Aug 25, 1987
- Ametek, Inc.
- Mitchell E. Doty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for producing a laminar flow of constant veloc...
- Patent number 4,504,526
- Issue date Mar 12, 1985
- Libbey-Owens-Ford Company
- Peter H. Hofer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3816166
- Patent number 3,816,166
- Issue date Jun 11, 1974
- C30 - CRYSTAL GROWTH
Information Patent Grant
3750620
- Patent number 3,750,620
- Issue date Aug 7, 1973
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
GAS DISTRIBUTION PLATE FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND ME...
- Publication number 20140273409
- Publication date Sep 18, 2014
- MEMC Electronic Materials, Inc.
- John Allen Pitney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS TO APPLY MATERIAL TO A SURFACE
- Publication number 20140199500
- Publication date Jul 17, 2014
- International Business Machines Corporation
- Theodore G. van Kessel
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR APPLYING MATERIAL TO A SURFACE
- Publication number 20140199499
- Publication date Jul 17, 2014
- International Business Machines Corporation
- Theodore G. van Kessel
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM AND METHODS USING CAPACITIVELY COUP...
- Publication number 20130153148
- Publication date Jun 20, 2013
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM AND METHODS USING CAPACITIVELY COUP...
- Publication number 20120180954
- Publication date Jul 19, 2012
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ORGANIC CHEMICAL VAPOR DEPOSITION EQUIPMENT
- Publication number 20120118234
- Publication date May 17, 2012
- Sumitomo Electric Industries, Ltd.
- Masaki Ueno
- C30 - CRYSTAL GROWTH
Information Patent Application
HIGH PRODUCTIVITY THIN FILM DEPOSITION METHOD AND SYSTEM
- Publication number 20120085278
- Publication date Apr 12, 2012
- SOLEXEL INC.
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High accuracy vapor generation and delivery for thin film deposition
- Publication number 20100203244
- Publication date Aug 12, 2010
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING GROUP III-V COMPOUND SEMICONDUCTOR
- Publication number 20090320746
- Publication date Dec 31, 2009
- Sumitomo Chemical Company, Limited
- Yoshihiko Tsuchida
- C30 - CRYSTAL GROWTH
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20090260569
- Publication date Oct 22, 2009
- Samsung Electro-Mechanics CO., LTD.
- Changsung Sean KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas distribution plate with annular plenum having a sloped ceiling...
- Publication number 20090159002
- Publication date Jun 25, 2009
- Kallol Bera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metalorganic Chemical Vapor Deposition Reactor
- Publication number 20090126635
- Publication date May 21, 2009
- Sumitomo Electric Industries, Ltd.
- Masaki Ueno
- C30 - CRYSTAL GROWTH
Information Patent Application
Metal organic chemical vapor deposition equipment
- Publication number 20080006208
- Publication date Jan 10, 2008
- SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Masaki Ueno
- C30 - CRYSTAL GROWTH
Information Patent Application
High accuracy vapor generation and delivery for thin film deposition
- Publication number 20060144338
- Publication date Jul 6, 2006
- MSP Corporaton
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Continuous feed coater
- Publication number 20020069826
- Publication date Jun 13, 2002
- Shipley Company, L.L.C.
- Andrew T. Hunt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical oven with a boat for the uniform treatment of wafers
- Publication number 20010047761
- Publication date Dec 6, 2001
- Margreet Obertine Anne-Marie Van Wijck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Compression of gas before it reaches the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film forming apparatus

Thin film encapsulation processing system and process kit

Substrate processing apparatus

High productivity deposition reactor comprising a gas flow chamber...

Method and apparatus to apply material to a surface

Showerhead-cooler system of a semiconductor-processing chamber for...

Gas distribution plate for chemical vapor deposition systems and me...

Metalorganic chemical vapor deposition reactor

Metal organic chemical vapor deposition equipment

Chemical vapor deposition apparatus

Continuous feed coater

Vertical oven with a boat for the uniform treatment of wafers

Device for producing thin films of mixed metal oxides from organic...

Metal organic chemical vapor deposition (MOCVD) reactor with recirc...

Apparatus and process for producing a stable beam of fine particles

Reaction apparatus which introduces one reacting substance within a...

Apparatus for depositing material on a substrate

Process and apparatus for forming thin films

Apparatus and method for producing a laminar flow of constant veloc...

3816166

3750620

Patents Applicationslast 30 patents

GAS DISTRIBUTION PLATE FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND ME...

METHOD AND APPARATUS TO APPLY MATERIAL TO A SURFACE

METHOD FOR APPLYING MATERIAL TO A SURFACE

SEMICONDUCTOR PROCESSING SYSTEM AND METHODS USING CAPACITIVELY COUP...

SEMICONDUCTOR PROCESSING SYSTEM AND METHODS USING CAPACITIVELY COUP...

METAL ORGANIC CHEMICAL VAPOR DEPOSITION EQUIPMENT

HIGH PRODUCTIVITY THIN FILM DEPOSITION METHOD AND SYSTEM

High accuracy vapor generation and delivery for thin film deposition

METHOD FOR PRODUCING GROUP III-V COMPOUND SEMICONDUCTOR

CHEMICAL VAPOR DEPOSITION APPARATUS

Gas distribution plate with annular plenum having a sloped ceiling...

Metalorganic Chemical Vapor Deposition Reactor

Metal organic chemical vapor deposition equipment

High accuracy vapor generation and delivery for thin film deposition

Continuous feed coater

Vertical oven with a boat for the uniform treatment of wafers