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3786359
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Information
Patent Grant
3786359
References
Source
Patent Number
3,786,359
Date Filed
Not available
Date Issued
Tuesday, January 15, 1974
52 years ago
CPC
H01J37/3171 - for ion implantation
G21K1/14 - using charge exchange devices
H01J49/284 - using electrostatic and magnetic sectors with simple focusing
US Classifications
315 - Electric lamp and discharge devices: systems
250 - Radiant energy
438 - Semiconductor device manufacturing: process
976 - Nuclear technology
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