3790404

Information

• Patent Grant
• 3790404

• References
• Source

• Patent Number

  3,790,404

• Date Filed

  Not available

• Date Issued

  Tuesday, February 5, 1974
  51 years ago

• CPC

  • C30B31/106 - Continuous processes
  • C23C16/54 - Apparatus specially adapted for continuous coating
  • C30B31/16 - Feed and outlet means for the gases Modifying the flow of the gases
  • Y10S438/935 - Gas flow control

• US Classifications

  • 427 - Coating processes
  • 118 - Coating apparatus
  • 438 - Semiconductor device manufacturing: process