3816166

Information

• Patent Grant
• 3816166

• References
• Source

• Patent Number

  3,816,166

• Date Filed

  Not available

• Date Issued

  Tuesday, June 11, 1974
  50 years ago

• CPC

  • C23C16/45585 - Compression of gas before it reaches the substrate
  • C30B25/14 - Feed and outlet means for the gases Modifying the flow of the reactive gases
  • Y10S148/006 - Apparatus
  • Y10S148/049 - Equivalence and options

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment