Membership
Tour
Register
Log in
3818982
Follow
Information
Patent Grant
3818982
References
Source
Patent Number
3,818,982
Date Filed
Not available
Date Issued
Tuesday, June 25, 1974
50 years ago
CPC
C23C14/541 - Heating or cooling of the substrates
H01J37/34 - operating with cathodic sputtering
Y10S165/156 - Hollow cylindrical member
US Classifications
165 - Heat exchange
118 - Coating apparatus
204 - Chemistry: electrical and wave energy
Information
Content
Industries
Organizations
People
Transactions
Events
Impact
Timeline
Text data is not available. Click on
here
to see the original data.