3865633

Information

• Patent Grant
• 3865633

• References
• Source

• Patent Number

  3,865,633

• Date Filed

  Not available

• Date Issued

  Tuesday, February 11, 1975
  49 years ago

• CPC

  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/263 - with high-energy radiation
  • Y10S438/912 - Displacing pn junction
  • Y10S438/916 - Autodoping control or utilization

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 257 - Active solid-state devices