with high-energy radiation

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H01L21/263

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/263with high-energy radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Dynamic laser-assisted etching
- Patent number 12,243,745
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Yu Tang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of forming a semiconductor device
- Patent number 12,237,214
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Nien Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 12,230,501
- Issue date Feb 18, 2025
- Fuji Electric Co., Ltd.
- Naoko Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing electronic device
- Patent number 12,142,522
- Issue date Nov 12, 2024
- Mitsui Chemicals Tohcello, Inc.
- Toru Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective carbon deposition on top and bottom surfaces of semicondu...
- Patent number 12,125,699
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Abhijeet S. Bagal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,094,687
- Issue date Sep 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Masayuki Shiina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching apparatus and method
- Patent number 12,087,558
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jung-Hao Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal line structure and method
- Patent number 12,051,646
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiang-Lun Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and ion beam irradiati...
- Patent number 12,040,155
- Issue date Jul 16, 2024
- Kioxia Corporation
- Junichi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method for semiconductor surface defects and preparation...
- Patent number 12,033,857
- Issue date Jul 9, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xianghong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
- Patent number 11,996,267
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Ruben Cornelis Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching platinum-containing thin film using protective cap layer
- Patent number 11,929,423
- Issue date Mar 12, 2024
- Texas Instruments Incorporated
- Sebastian Meier
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for extreme ultraviolet lithography mask treatment
- Patent number 11,906,897
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Cheng Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,901,419
- Issue date Feb 13, 2024
- Fuji Electric Co., Ltd.
- Yasunori Agata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a semiconductor device
- Patent number 11,888,024
- Issue date Jan 30, 2024
- Infineon Technologies AG
- Reinhard Ploss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 11,876,006
- Issue date Jan 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF substrate structure and method of production
- Patent number 11,848,191
- Issue date Dec 19, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Emmanuel Augendre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
- Patent number 11,848,204
- Issue date Dec 19, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Artificial intelligence-enabled preparation end-pointing
- Patent number 11,847,813
- Issue date Dec 19, 2023
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,823,898
- Issue date Nov 21, 2023
- Fuji Electric Co., Ltd.
- Yuichi Onozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical image capturing system, image capturing device and electron...
- Patent number 11,815,667
- Issue date Nov 14, 2023
- LARGAN PRECISION CO., LTD
- Lin-Yao Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Depositive shielding for fiducial protection from redeposition
- Patent number 11,817,395
- Issue date Nov 14, 2023
- FEI Company
- Sean Morgan-Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device including transistor with doped oxide semicond...
- Patent number 11,810,858
- Issue date Nov 7, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device for heating object material using laser beam and ind...
- Patent number 11,798,824
- Issue date Oct 24, 2023
- RNR LAB INC.
- Jeong Do Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus including laser heating for etching thin layer
- Patent number 11,772,198
- Issue date Oct 3, 2023
- Semes Co., Ltd.
- Won Geun Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process apparatus including a non-contact thermo-sensor
- Patent number 11,764,087
- Issue date Sep 19, 2023
- Samsung Electronics Co., Ltd.
- Chaemook Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF capacitive coupled etch reactor
- Patent number 11,742,187
- Issue date Aug 29, 2023
- EVATEC AG
- Johannes Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a semiconductor device
- Patent number 11,735,469
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Nien Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 11,688,586
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM INSPECTION AND REPAIR WITH INCREASED SECONDARY ELECTRON YIELD
- Publication number 20250069956
- Publication date Feb 27, 2025
- Carl Zeiss SMT GMBH
- Brett Lewis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...
- Publication number 20240420948
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Abhijeet S. Bagal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Etching Apparatus And Method
- Publication number 20240379333
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jung-Hao Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SI...
- Publication number 20240290842
- Publication date Aug 29, 2024
- Fuji Electric Co., Ltd.
- Naoyuki OHSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240234085
- Publication date Jul 11, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PLATINUM-CONTAINING THIN FILM USING PROTECTIVE CAP LAYER
- Publication number 20240222470
- Publication date Jul 4, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Sebastian Meier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240186383
- Publication date Jun 6, 2024
- Fuji Electric Co., Ltd.
- Yasunori AGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR WAFER
- Publication number 20240162041
- Publication date May 16, 2024
- Shin-Etsu Handotai Co., Ltd.
- Kazunori HAGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR
- Publication number 20240153765
- Publication date May 9, 2024
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240136150
- Publication date Apr 25, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carbon Assisted Semiconductor Dicing And Method
- Publication number 20240120284
- Publication date Apr 11, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
- Publication number 20240071754
- Publication date Feb 29, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
- Publication number 20240071040
- Publication date Feb 29, 2024
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240047200
- Publication date Feb 8, 2024
- Fuji Electric Co., Ltd.
- Yuichi Onozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
- Publication number 20240027738
- Publication date Jan 25, 2024
- LARGAN PRECISION CO., LTD.
- Lin-Yao Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20230411184
- Publication date Dec 21, 2023
- SEMES CO., LTD.
- Kwang Ryul KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...
- Publication number 20230354478
- Publication date Nov 2, 2023
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming a Semiconductor Device
- Publication number 20230343636
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Nien Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON...
- Publication number 20230299173
- Publication date Sep 21, 2023
- STMicroelectronics S.r.l.
- Simone RASCUNA'
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Laser-Assisted Etching
- Publication number 20230253207
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Yu Tang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMBINING FOCUSED ION BEAM MILLING AND SCANNING ELECTRON MICROSCOPE...
- Publication number 20230245933
- Publication date Aug 3, 2023
- KLA Corporation
- Youfei JIANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and Apparatus for Plasma Processing
- Publication number 20230230814
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE MODULE
- Publication number 20230154719
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Laura DINU-GURTLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
- Publication number 20230131233
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Nathan Lavdovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
- Publication number 20230112466
- Publication date Apr 13, 2023
- LARGAN PRECISION CO., LTD.
- Lin-Yao Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD FOR SEMICONDUCTOR SURFACE DEFECTS AND PREPARATION...
- Publication number 20230054142
- Publication date Feb 23, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xianghong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING APPARATUS AND METHOD
- Publication number 20230050650
- Publication date Feb 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jung-Hao CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...
- Publication number 20220415648
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Abhijeet S. Bagal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
- Publication number 20220416114
- Publication date Dec 29, 2022
- ENKRIS SEMICONDUCTOR, INC.
- Kai Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...
- Publication number 20220392788
- Publication date Dec 8, 2022
- RNR LAB INC.
- Jeong Do RYU
- H01 - BASIC ELECTRIC ELEMENTS

with high-energy radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Dynamic laser-assisted etching

Method of forming a semiconductor device

Semiconductor device and method of manufacturing semiconductor device

Substrate processing system and substrate processing method

Method for manufacturing electronic device

Selective carbon deposition on top and bottom surfaces of semicondu...

Plasma processing apparatus and plasma processing method

Ion beam etching apparatus and method

Metal line structure and method

Method of manufacturing semiconductor device and ion beam irradiati...

Processing method for semiconductor surface defects and preparation...

Particle beam apparatus, defect repair method, lithographic exposur...

Etching platinum-containing thin film using protective cap layer

Method for extreme ultraviolet lithography mask treatment

Semiconductor device and manufacturing method of semiconductor device

Method of forming a semiconductor device

Heat treatment method and heat treatment apparatus of light irradia...

RF substrate structure and method of production

Enhanced ignition in inductively coupled plasmas for workpiece proc...

Artificial intelligence-enabled preparation end-pointing

Semiconductor device and method for manufacturing the same

Optical image capturing system, image capturing device and electron...

Depositive shielding for fiducial protection from redeposition

Semiconductor device including transistor with doped oxide semicond...

Heating device for heating object material using laser beam and ind...

Apparatus including laser heating for etching thin layer

Process apparatus including a non-contact thermo-sensor

RF capacitive coupled etch reactor

Method of forming a semiconductor device

Method and apparatus for plasma processing

Patents Applicationslast 30 patents

ION BEAM INSPECTION AND REPAIR WITH INCREASED SECONDARY ELECTRON YIELD

SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...

Ion Beam Etching Apparatus And Method

SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SI...

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

ETCHING PLATINUM-CONTAINING THIN FILM USING PROTECTIVE CAP LAYER

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR WAFER

METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

Carbon Assisted Semiconductor Dicing And Method

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...

ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...

Method of Forming a Semiconductor Device

FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON...

Dynamic Laser-Assisted Etching

COMBINING FOCUSED ION BEAM MILLING AND SCANNING ELECTRON MICROSCOPE...

Method and Apparatus for Plasma Processing

CHARGED PARTICLE SOURCE MODULE

RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING

OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...

PROCESSING METHOD FOR SEMICONDUCTOR SURFACE DEFECTS AND PREPARATION...

ION BEAM ETCHING APPARATUS AND METHOD

SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...

METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE

HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...