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3865655
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Patent Grant
3865655
References
Source
Patent Number
3,865,655
Date Filed
Not available
Date Issued
Tuesday, February 11, 1975
50 years ago
CPC
H01L21/2233 - Diffusion into or out of AIIIBV compounds
C30B29/40 - AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
C30B31/06 - by contacting with diffusion material in the gaseous state
C30B31/185 - Pattern diffusion
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S148/113 - Nitrides of boron or aluminum or gallium
Y10S438/909 - Controlled atmosphere
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
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