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3884698
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Information
Patent Grant
3884698
References
Source
Patent Number
3,884,698
Date Filed
Not available
Date Issued
Tuesday, May 20, 1975
49 years ago
CPC
G03F7/091 - characterised by antireflection means or light filtering or absorbing means
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S430/135 - Cine film
US Classifications
430 - Radiation imagery chemistry: process, composition, or product thereof
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