3899557

Information

• Patent Grant
• 3899557

• References
• Source

• Patent Number

  3,899,557

• Date Filed

  Not available

• Date Issued

  Tuesday, August 12, 1975
  49 years ago

• CPC

  • C23C16/01 - on temporary substrates
  • C23C16/22 - characterised by the deposition of inorganic material, other than metallic material
  • C30B31/10 - Reaction chambers Selection of material therefor
  • Y10S148/007 - Autodoping
  • Y10S148/025 - Deposition multi-step
  • Y10S148/073 - Hollow body
  • Y10S264/57 - Processes of forming layered products

• US Classifications

  • 264 - Plastic and nonmetallic article shaping or treating: processes
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 438 - Semiconductor device manufacturing: process