Claims
- 1. A method for forming a patterned article, comprising the steps of:
- (i) image-wise exposing to a member selected from the group consisting of electron beams and X-rays, a coating on a substrate, said coating consisting essentially of a halogen-containing polyacrylate having the formula: ##STR8## wherein A is a structural unit derived from a copolymerizable monomer having a double bond; R is ##STR9## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m is from 0 to 2, to obtain an image-wise exposed article; and
- (ii) developing said image-wise exposed article to obtain said patterned article.
- 2. The method according to claim 1, wherein the halogen-containing polyacrylate derivative wherein X is a chlorine atom, is used.
- 3. The method according to claim 1, wherein the halogen-containing polyacrylate derivative wherein X is a methyl group, is used.
- 4. The method of claim 1, wherein n/m is from 0 to 1.
- 5. The method of claim 1, wherein said exposing step utilizes an electron beam.
- 6. The method of claim 1, wherein said exposing step utilizes X-rays.
- 7. The method of claim 1, wherein A is ##STR10##
- 8. The method of claim 7, wherein R.sub.1 and R.sub.2 are each a fluorinated methyl group.
- 9. The method of claim 7, wherein one of R.sub.1 and R.sub.2 is a hydrogen atom.
- 10. The method of claim 1, wherein A is ##STR11##
- 11. The method of claim 1, wherein said developing step comprises dipping in a developer.
- 12. The method of claim 1, further comprising the step of:
- (iii) dry etching said patterned article to obtain a dry etched article.
Priority Claims (6)
Number |
Date |
Country |
Kind |
60-290823 |
Dec 1985 |
JPX |
|
61-84172 |
Apr 1986 |
JPX |
|
61-109621 |
May 1986 |
JPX |
|
61-211488 |
Sep 1986 |
JPX |
|
61-21401 |
Sep 1986 |
JPX |
|
61-270891 |
Nov 1986 |
JPX |
|
Parent Case Info
This is a division of application Ser. No. 06/946,055, filed Dec. 24, 1986 now U.S. Pat. No. 4,752,635.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
3544535 |
Gilbert et al. |
Dec 1970 |
|
Foreign Referenced Citations (3)
Number |
Date |
Country |
61-7311 |
Jan 1986 |
JPX |
61-65237 |
Apr 1986 |
JPX |
170636 |
Aug 1986 |
JPX |
Non-Patent Literature Citations (2)
Entry |
Patent Abstracts of Japan, vol. 7, No. 160 (P-210)[1305], Jul. 14, 1983. |
Derwents' English Abstracts of References AL, AM and An. |
Divisions (1)
|
Number |
Date |
Country |
Parent |
946055 |
Dec 1986 |
|