Claims
- 1. A method of making an abrasive article for wafer planarization, the method comprising:(a) providing an abrasive coating composition; (b) bringing a backing into contact with the abrasive coating composition, so that the abrasive coating composition contacts a first portion of the backing, leaving a second portion of the backing free of abrasive coating composition to form a window; and (c) at least partially curing the abrasive coating composition; wherein said window is at least partially transparent to visible light after curing.
- 2. The method according to claim 1, wherein the step of bringing a backing into contact with the abrasive coating composition, so that the abrasive coating composition contacts a first portion of the backing, leaving a second portion of the backing free of abrasive coating composition comprises:(a) bringing a backing into contact with the abrasive coating composition, so that the abrasive coating composition contacts a first portion of the backing, leaving a second portion of the backing free of abrasive coating composition, wherein the second portion of the backing free of abrasive coating composition extends a length of the backing.
- 3. The method according to claim 1, wherein:(a) the step of providing an abrasive coating composition comprises: (i) applying the abrasive coating composition into a plurality of cavities in a production tool; and wherein the method further comprises: (b) removing the abrasive coating composition from the plurality of cavities.
- 4. The method according to claim 3, wherein the step of applying the abrasive coating composition into a plurality of cavities in a production tool comprises:(a) applying the abrasive coating composition into a plurality of cavities in a production tool, the production tool further comprising an area devoid of cavities.
- 5. The method according to claim 4, wherein the step of applying the abrasive coating composition into a plurality of cavities in a production tool, the production tool further comprising an area devoid of cavities comprises:(a) applying the abrasive coating composition into a plurality of cavities in a production tool, the production tool further comprising a length of the production tool devoid of cavities.
- 6. The method according to claim 4, wherein the step of applying an abrasive composition in a production tool, the production tool further comprising an area devoid of cavities comprises:(a) applying an abrasive coating composition into a plurality of cavities in a production tool, the production tool further comprising discrete areas of the production tool devoid of cavities.
- 7. The method according to claim 1, wherein the step of bringing a backing into contact with the abrasive coating composition comprises:(a) bringing an extended length of backing into contact with the abrasive coating composition.
- 8. The method according to claim 1, wherein the step of bringing a backing into contact with the abrasive coating composition comprises:(a) providing a backing comprising a primer in the first portion of the backing and no primer in the second portion of the backing.
- 9. The method according to claim 1, wherein the step of bringing a backing into contact with the abrasive coating composition comprises:(a) providing a backing comprising a release element in the second portion of the backing.
- 10. The method according to claim 9, wherein the step of providing a backing comprising a release element in the second portion of the backing comprises:(a) providing a backing comprising a removable strip in the second portion of the backing.
- 11. The method according to claim 1, wherein the step of providing an abrasive coating composition comprises:(a) providing an abrasive coating composition via a gravure roll.
CROSS REFERENCE TO RELATED APPLICATIONS
This is a divisional of U.S. application Ser. No. 09/726,064, filed Nov. 29, 2000, now abandoned.
US Referenced Citations (15)
Foreign Referenced Citations (1)
Number |
Date |
Country |
WO 9839142 |
Sep 1998 |
WO |