Claims
- 1. A composition of matter comprising particles of liquid etchant in an inert, gaseous carrier, said particles having a diameter in the range of 0.001 to 0.2 microns and said particles being suspended in said inert, gaseous carrier.
- 2. The composition of matter of claim 1 wherein said liquid etchant is an azeotrope.
- 3. The composition of matter of claim 1 wherein the concentration of said particles in said inert gaseous medium is typically in the range of 0.1 to 1 weight percent.
- 4. A composition of matter comprising particles of liquid etchant suspended in an inert, gaseous medium, said particles having a diameter typically in the range of 0.05 to 0.2 microns.
- 5. The composition of matter of claim 4 wherein said particles consist of an azeotrope of liquid etchant.
- 6. The composition of matter of claim 4 wherein the concentration of said particles in said inert gaseous medium is typically in the range of 0.1 to 1 weight percent.
- 7. The composition of matter of claim 1 wherein the liquid etchant is hydrofluoric acid bromine-methanol or hydrochloric acid.
- 8. The composition of matter of claim 1 wherein the inert, gaseous carrier is one or more of nitrogen, helium and argon.
- 9. The composition of matter of claim 1 wherein the liquid etchant comprises hydrofluoric acid.
- 10. The composition of matter of claim 1 wherein the liquid etchant comprises bromine-methanol.
- 11. The composition of matter of claim 1 wherein the liquid etchant comprises hydrochloric acid.
Parent Case Info
This is a division of copending application Ser. No. 289,642, filed Dec. 21, 1988, now U.S. Pat. No. 4,973,379, issued Nov. 27, 1990.
US Referenced Citations (4)
Foreign Referenced Citations (2)
Number |
Date |
Country |
0725590 |
Jan 1966 |
CAX |
3331816 |
Mar 1985 |
DEX |
Non-Patent Literature Citations (2)
Entry |
IBM Technical Disclosure Bulletin: "Circuit Etching Process", by Butora et al., .COPYRGT.2/1970, vol. 12, No. 9. |
Appl. Phys. Lett.: "Aerosol Jet Etching of Fine Patterns", by Cher et al., .COPYRGT.12-28-87, 51(26). |
Divisions (1)
|
Number |
Date |
Country |
Parent |
289642 |
Dec 1988 |
|