Number | Name | Date | Kind |
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4507845 | McIver et al. | Apr 1985 | |
4893163 | Rudeck | Jan 1990 | |
4992394 | Kostelak et al. | Feb 1991 | |
5001076 | Mikkelson | Mar 1991 | |
5243207 | Plumton et al. | Sep 1993 |
Entry |
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Yamamoto et al., “Novel Alignment Method for Planarized Substrates in Electron Beam Lithography”, Japanese Journal of Applied Physics, vol. 58 pp. 7040-7045, Dec. 1999. |