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4558660 | Nishizawa et al. | Dec 1985 | |
4581578 | Honma et al. | Apr 1986 | |
4599558 | Castellano, Jr. et al. | Jul 1986 | |
4871417 | Nishizawa et al. | Oct 1989 | |
5306671 | Ogawa et al. | Apr 1994 | |
5453702 | Goldfarb | Sep 1995 | |
5470799 | Itoh et al. | Nov 1995 | |
5471293 | Lowell et al. | Nov 1995 | |
5661408 | Kamieniecki et al. | Aug 1997 | |
5663657 | Lagowski et al. | Sep 1997 | |
5716495 | Butterbaugh et al. | Feb 1998 |
Number | Date | Country |
---|---|---|
41 22 587 | Jan 1992 | DE |
WO 9423854 | Oct 1994 | WO |
Entry |
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Akazawa et al., Photostimulated Evaporation of SIO2 and SI3N4 Films by Synchrotron Radiation and its Application for Low-Temperature Cleaning of SI Surfaces, Journal of Vacuum Science and Technology. vol. 9, No. 5, Sep. 1, 1991, pp. 2653-2661. |