Claims
- 1. A non-confocal scanning beam optical imaging system for macroscopic specimens comprising:
- means for supporting a specimen to be observed and measured;
- an illumination source producing a light beam directed along an optical path toward said specimen;
- a scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, there being no image plane between said scan lens and said specimen plane;
- means for scanning the light beam to move the diffraction-limited spot in a predetermined scan patern on said specimen plane;
- a first detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising:
- a first detector;
- and means for producing a signal from said first detector.
- 2. An imaging system as claimed in claim 1 wherein said scan lens is a telecentric scan lens.
- 3. An imaging system as claimed in claim 2 wherein the detector is a spectrally-resolved detector.
- 4. An imaging system as claimed in claim 3 wherein said scan lens is a laser scan lens.
- 5. An imaging system as claimed in claim 2 further including:
- a second detection arm and a second beamsplitter directing light returning from said specimen into said second detection arm;
- said second beamsplitter being located between a first beamsplitter and said specimen;
- said second detection arm comprising a condenser lens for collecting the light returning from said specimen and a second detector placed behind said condenser lens
- whereby a non-confocal image of the specimen is obtained.
- 6. An imaging system as claimed in claim 2 further including a condenser lens and transmission detector placed on the opposite side of said specimen, said condenser lens and said transmission detector being coaxial with said scan lens, whereby light transmitted through said specimen is detected.
- 7. An imaging system as claimed in claim 1 wherein there is a first beam splitter directing light returning from said specimen into said first detection arm.
- 8. An imaging system as claimed in any one of claims 1, 2 or 7 wherein said illumination source is a laser.
- 9. An imaging system as claimed in claim 1 wherein said scan lens is a telecentric scan lens.
- 10. An imaging system as claimed in claim 9 wherein the detector is a spectrally-resolved dectector.
- 11. A non-confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens comprising
- means for supporting a specimen to be observed and measured,
- an illumination source producing a light beam directed along an optical path toward said specimen,
- an optical subassembly comprising
- a first telecentric scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane,
- a second telecentric scan lens placed on the opposite side of said specimen, and coaxial with said first telecentric scan lens, at such a distance that the focal planes of the two telecentric scan lenses coincide,
- a beamsplitter to direct portions of said light beam toward each of the two telecentric scan lenses,
- a plurality of reflecting means and lenses, arranged such that the two telecentric scan lenses always focus their respective portions of the incoming light beam to the same spot on said prescribed specimen plane as the scan proceeds,
- means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane,
- a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a detector,
- a second beamsplitter directing light returning from said specimen into said detection arm,
- whereby the specimen is illuminated from both sides, and the detector receives both reflected and transmitted light resulting from each direction of illumination of said specimen.
- 12. The non-confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens of claim 1 wherein said optical subassembly further includes a half-wave plate and a polarizer, and said detection arm further includes an analyzer in front of said focusing lens whereby the different imaging modes of the system can detect separately: reflection from one side of the sample, reflection from the other side, transmission from one side, and transmission from the other side.
- 13. The non-confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens of claim 12 wherein
- said beamsplitter in said optical subassembly is a polarizing beamsplitter,
- said optical subassembly further includes a first quarter-wave plate placed between said polarizing beamsplitter and said first telecentric laser scan lens, and a second quarter-wave plate placed between said polarizing beamsplitter and said second telecentric laser scan lens,
- a half-wave plate is placed between said polarizing beamsplitter and said means for scanning the light beam,
- whereby a transmission image illuminated from one side of said specimen is detected if said half-wave plate is removed, a transmission image illuminated from the other side of the specimen is detected if said half-wave plate is replaced, a reflection image from one side of the specimen is detected if both quarter-wave plates are removed, and a reflection image of the other side of the specimen is detected if said half-wave plate is also removed.
- 14. An imaging system as claimed in any one of claims 11, 12 or 13 wherein said illumination source is a laser.
- 15. A method of constructing a non-confocal scanning beam optical imaging system for macroscopic specimens, said system having means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for scanning the light beam, a detection arm receiving light reflected, scattered or emitted from said specimen, said detection arm comprising a detector, a beamsplitter directing light returning from said specimen into said detection arm with means for producing a signal from said detector, said method comprising the steps of inserting a scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane without forming an image plane between said scan lens and said specimen plane; and scanning the light beam using the means for scanning to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane.
- 16. A method as claimed in claim 15 including the steps of scanning said specimen over a scan angle of +/-8.5 degrees.
- 17. A method of constructing a non-confocal scanning beam optical imaging system for macroscopic specimens, said system having means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for scanning the light beam, a detection arm receiving light reflected, scattered or emitted from said specimen, said detection arm comprising a detector, a beamsplitter directing light returning from said specimen into said detection arm with means for producing a signal from said detector, said method comprising the steps of inserting a telecentric scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane without forming an image plane between said telecentric scan lens and said specimen plane; and scanning the light beam using the means for scanning to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane, said beam having a center axis that is perpendicular to said specimen plane.
- 18. A method as claimed in claim 17 including the step of scanning said specimen with said beam over a distance of up to approximately 7.5 cm.
- 19. A method of construction a non-confocal scaning beam optical imaging system for macroscopic specimens, said system having means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for scanning the light beam, a detection arm receving light reflected, scattered or emitted from said specimen, said detection arm comprising a detector, said method comprising the steps of inserting a scan leans for focusing the light beam to a diffraction-limited spot in prescribed specimen plane without forming an image plane between said scan lens and said specimen plane; and scanning the light beam using the means for scanning to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane.
Priority Claims (1)
Number |
Date |
Country |
Kind |
9218482 |
Jan 1992 |
GBX |
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Parent Case Info
This application is a Continuation of application, Ser. No. 08/113,191, filed Aug. 30, 1993, now U.S. Pat. No. 5,760,951.
US Referenced Citations (4)
Continuations (1)
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Number |
Date |
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Parent |
113191 |
Aug 1993 |
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