| Number | Date | Country | Kind |
|---|---|---|---|
| 9820137 | Sep 1998 | GB |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4507346 | Maurer et al. | Mar 1985 | A |
| 4544181 | Maurer et al. | Oct 1985 | A |
| 4579754 | Maurer et al. | Apr 1986 | A |
| 4597592 | Maurer et al. | Jul 1986 | A |
| 4714656 | Bradshaw et al. | Dec 1987 | A |
| 4740269 | Berger et al. | Apr 1988 | A |
| 4766026 | Lass et al. | Aug 1988 | A |
| 4992347 | Hawkins et al. | Feb 1991 | A |
| 5380695 | Chiang et al. | Jan 1995 | A |
| 6001893 | Vaidya et al. | Dec 1999 | A |
| Number | Date | Country |
|---|---|---|
| 1245448 | Nov 1988 | CA |
| 1963478 | Jan 1998 | DE |
| 19630478 | Jan 1998 | DE |
| 19732306 | Jan 1999 | DE |
| 0364731 | Apr 1990 | EP |
| 0710570 | May 1996 | EP |
| WO9526274 | Oct 1995 | WO |
| WO9534623 | Dec 1995 | WO |
| Entry |
|---|
| H. Esrom, et al., “Modification of surfaces with new excimer Uvsources,” Thin Solid Films 218 (1992) 231-246. |