Number | Name | Date | Kind |
---|---|---|---|
3727620 | Orr | Apr 1973 | |
3770598 | Creutz et al. | Nov 1973 | |
4027686 | Shortes et al. | Jun 1977 | |
4092176 | Kozai et al. | May 1978 | |
4110176 | Creutz et al. | Aug 1978 | |
4113492 | Sato et al. | Sep 1978 | |
4315059 | Riastrick et al. | Feb 1982 | |
4336114 | Mayer et al. | Jun 1982 | |
4376685 | Watson | Mar 1983 | |
4405416 | Raistrick et al. | Sep 1983 | |
4428815 | Powell et al. | Jan 1984 | |
4435266 | Johnston | Mar 1984 | |
4489740 | Rattan et al. | Dec 1984 | |
4510176 | Cuthbert et al. | Apr 1985 | |
4518678 | Allen | May 1985 | |
4519846 | Aigo | May 1985 | |
4693805 | Quazi | Sep 1987 | |
4732785 | Brewer | Mar 1998 | |
5039381 | Mullarkey | Aug 1991 | |
5055425 | Leibovitz et al. | Oct 1991 | |
5069760 | Tsukamoto et al. | Dec 1991 | |
5092975 | Yamamura et al. | Mar 1992 | |
5100516 | Nishimura et al. | Mar 1992 | |
5155336 | Gronet et al. | Oct 1992 | |
5162260 | Leibovitz et al. | Nov 1992 | |
5222310 | Thompson et al. | Jun 1993 | |
5224504 | Thompson et al. | Jul 1993 | |
5230743 | Thompson et al. | Jul 1993 | |
5252807 | Chizinsky | Oct 1993 | |
5256274 | Poris | Oct 1993 | |
5259407 | Tuchida et al. | Nov 1993 | |
5290361 | Hayashida et al. | Mar 1994 | |
5316974 | Crank | May 1994 | |
5328589 | Martin | Jul 1994 | |
5349978 | Sago et al. | Sep 1994 | |
5368711 | Poris | Nov 1994 | |
5377708 | Bergman et al. | Jan 1995 | |
5415890 | Kloiber et al. | May 1995 | |
5429733 | Ishida | Jul 1995 | |
5449447 | Branders | Sep 1995 | |
5608943 | Konishi et al. | Mar 1997 | |
5625170 | Poris | Apr 1997 | |
5651865 | Sellers | Jul 1997 | |
5705223 | Bunkofske | Jan 1998 | |
5718813 | Drummond et al. | Feb 1998 | |
5723028 | Poris | Mar 1998 |
Number | Date | Country |
---|---|---|
58-182823 | Oct 1983 | JPX |
63-118093 | May 1988 | JPX |
04131395 | May 1992 | JPX |
04280993 | Oct 1992 | JPX |
6017291 | Jan 1994 | JPX |
WO 9712079 | Apr 1997 | WOX |
Entry |
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PCT International Search Report dated Feb. 7, 2000. |
Kenneth E. Pitney, "NEY Contact Manual," Electrical Contacts for Low Energy Uses, 1973 (No Month). |
Lucio Colombo, "Wafer Back Surface Film Removal," Central R&D, SGS-THOMPSON, Microelectronics, Agrate, Italy, 6 pages (No Date). |
Semitool.COPYRGT., Inc., "Metallization & Interconnect," 1998, 4 pages (No Month). |
Verteq Online.COPYRGT., "Products Overview," 1996-1998, 5 pages (No Month). |
Laurell Technologies Corporation, "Two control configurations available-see WS 400 OR WS-4Lite." Oct. 19, 1998, 6 pages. |
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