Bias temperature instability (BTI) is one of the important reliability factors in semiconductor devices, such as memory devices. Uneven electrical stress on circuits of a memory device during low power mode or during high temperature, high voltage testing may cause increased susceptibility of the device to, especially, negative BTI (NBTI). NBTI may lead to degradation of device performance, including increased transistor threshold voltage. For example, switching speed of devices may slow down due to degradation by NBTI. As a threshold voltage becomes higher, switching speed may slow down further. Therefore, there is a demand for a technique to reduce uneven electrical stress and mitigate the device performance degradation caused by BTI, such as NBTI.
Various example embodiments of the disclosure will be described below in detail with reference to the accompanying drawings. The following detailed descriptions refer to the accompanying drawings that show, by way of illustration, specific aspects in which embodiments of the disclosure may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the disclosure. Other embodiments may be utilized, and structure, logical and electrical changes may be made without departing from the scope of the disclosure. The various embodiments disclosed herein are not necessary mutually exclusive, as some disclosed embodiments can be combined with one or more other disclosed embodiments to form new embodiments.
In the descriptions, common or related elements and elements that are substantially the same are denoted with the same signs, and the descriptions thereof may be reduced or omitted. In the drawings, some of the same signs may be omitted for the same or substantially the same elements for ease of illustration. In the drawings, the dimensions and dimensional ratios of each unit do not necessarily match the actual dimensions and dimensional ratios in the embodiments.
The NBTI controller 101 includes an oscillator 102 and a controller 103. The NBTI controller 101 receives a test mode signal (tmNBTI). The tmNBTI signal is set to a high level to enable a test mode during, for example, an idle state of the memory device 104. When the test mode is enabled, NBTI mitigation operations or functions are performed. In one instance, the tmNBTI signal may be provided from outside of the apparatus 100, such as a tester (for example, an automated test equipment ATE) coupled to the apparatus 100. In another instance, the tmNBTI signal may be provided by a test mode generation circuit within the apparatus 100. The test mode signal tmNBTI may include a NBTI mitigation enable signal. In some embodiments, the test mode may include a mode for testing a memory device and/or a mode that is enabled in normal use (or during normal operation) of a memory device product.
Upon receipt of the tmNBTI signal, the NBTI controller 101 starts to output a regularly clocking signal or a regularly toggling clock signal (NBTI_toggle_clk) to a data path (DataP), a clock path (ClkP), a command/address path (CmdP/AddP). On each path, there is an OR instance, such as a logic OR gate. Herein, command and address may be referred to as CMD/ADD. The NBTI_toggle_clk signal has, for example, 0 and 1 (or low and high) pulses regularly toggling with a certain cycle time. A data input (for example, Data_ChA for a channel A as illustrated in the drawing among a plurality of channels A, B, C, and so on of the memory device 104) is coupled to a data latch 105 in the memory device 104. A clock input (Clk_chA for the channel A in the example drawing) and a CMD/ADD input (Cmd_chA/Add_chA for the channel A in the example drawing) is coupled to a CMD/ADD latch 106. The NBTI_toggle_clk signal is provided to DataP, ClkP, and CmdP/AddP through the OR instances and provided to Data_chA, Clk_chA, and Cmd_chA/Add_chA through respective buffers. The data latch 105 and the CMD/ADD latch 106 may be part of control circuits in the memory device 104. The memory device 104 also includes a bank logic 107 and a memory bank 108. The bank logic 107 communicates with the data latch 105 and the CMD/AMD latch 106 with respect to data, operation command, memory address, and such. The memory bank 108 communicates with the bank logic 107 for memory operations, such as data read and data write.
NBTI control operation by the NBTI controller 101 during the test mode when the memory device 104 is in an idle state targets the signal propagating paths and their destination circuits. For example, the signals and circuits which travel and operate with high frequency, such as DATA, CLK, and CMD/ADD, are susceptible to NBTI degradation (for example, performance drop due to NBTI). This NBTI degradation can be mitigated by the NBTI control. For example, as will be described in more detail below, the NBTI controller 101 provides signals to the memory device 104 to perform NBTI mitigation operations during a NBTI mitigation mode. In a case where a conventional controller injects, on the respective paths, the signals with regular-clocking/toggling pulses that are not composed of or regulated with command and address protocols whose transition timings are aligned with the clock signal, the data latch and the CMD/ADD latch, which are configured to output in a memory device merely receive such signals on their gate nodes, junction nodes, and such, and do not respond. For example, the CMD/ADD latch decodes input signals as command and address signals and generate output signals, but if the input signals cannot be decoded as such, there will be no output from the CMD/ADD latch. Since the data latch that operates in response to communication with the CMD/ADD latch does not receive any command signals from the CMD/ADD latch, the data latch also does not output any data signals although it receives them from the data path. The signal propagation thus does not continue to the next stage after the data latch and the CMD/ADD latch within the memory device. Consequently, while the bank logic of the memory device operates with relatively high frequency and is susceptible to uneven electrical stress, such as uneven DC stress, the bank logic as well as the memory banks coupled thereto in the memory channels may not be fully protected from the NBTI degradation, because it is located in the further downstream of the signal propagation and does not receive signal outputs from the data latch and the CMD/ADD latch. In contrast, the NBTI controller 101 provides signals to the memory device 104 to perform NBTI mitigation operations to cause signals to travel and propagate further downstream within the memory device 104 and to effectively reduce the uneven electrical stress, such as the DC stress. As a result, the NBTI degradation and hence the device performance drop can be further effectively prevented or mitigated.
The oscillator 202 receives a test mode signal (tmChDis) and provides a toggling clock signal to the NBTI self-controller 203. The tmChDis signal may be provided, for example, by a tester coupled to the apparatus 200 and/or a test mode generation circuit in the apparatus 200, and then provided to the signal pattern generator 201, for example, via an interposer on a package substrate.
The NBTI self-controller 203 includes, a data buffer 204, a clock (CLK) buffer 205, and a command/address buffer 206, and an algorithmic programmable (ALPG) circuit 207. Herein, command and address may be referred to as CMD/ADD. The data buffer 204 may include one or more data buffer circuits designed and configured to buffer data signals received. The CLK buffer 205 may include one or more clock buffer circuits designed and configured to buffer clock signals received. The CMD/ADD buffer 206 may include one of more buffers designed and configured to buffer CMD/ADD signals received. The ALPG circuit 207 may include one or more ALPG circuits designed and configured to provide signals to cause a memory device 208 to perform NBTI mitigation operations when a toggling clock signal is provided by the oscillator 202. The signals provided by the ALPG circuit 207 and the buffers 204, 205, and 206 may include a data signal StData, a self-controller output clock signal StClk, and self-controller command and address signals StCMD/StAdd.
The apparatus 200 includes a memory device 208 coupled to the signal pattern generator 201 or the NBTI self-controller 203 through interface paths and circuits. The interface paths and circuits includes, in some embodiments of the disclosure, an OR instance, such as a logic OR gate, and a buffer. The memory device 208 includes one or more memory channels (Chs). Each memory channel includes one or more memory banks 212. The memory banks 212 may be arranged in array in memory regions or cell regions on a semiconductor substrate of the memory device 208. Each memory bank 212 may include an array of memory cells. The memory banks 212 may be accessed to read data from and write data to the memory cells. Various circuits and circuit elements (e.g., logic circuits, transistors, capacitors, diodes) that are used for memory operations may be provided in the memory regions and/or periphery regions around the memory regions.
The memory device 208 also includes a bank logic 211 coupled to the memory banks 212. The bank logic 211 may include one or more logic circuits for memory operations.
The memory device 208 further includes a data latch 209 and a CMD/ADD latch 210. In the illustrated example, the data latch 209 is coupled to the data buffer 204 in the signal pattern generator 201 through the interface paths and circuits. The CMD/ADD latch 210 is coupled to the CLK buffer 205 and the CMD/ADD buffer 206 in the signal pattern generator 201 through the interface paths and circuits. The data latch 209 may include a plurality of latch circuits configured for latching data signals received. The CMD/ADD latch 210 may include a plurality of latch circuits configured for latching memory command and address signals received. The data latch 209 and the CMD/ADD latch 210 may be part of control circuits in the memory device 208. The StData, StClk, and StCMD/StADD signals provided by the signal pattern generator 201 are provided to the memory device 208 over the interface paths and circuits as respectively, data input Data_chA, a clock input Clk_chA, and a CMD/ADD input Cmd_chA/Add_chA. The data input Data_chA is provided to the data latch 209, and the clock input Clk_chA and CMD/ADD input Cmd_chA/Add_chA are provided to the CMD/ADD latch 210.
A CMD/ADD signal is provided to the first CMD decoder 301 and the second CMD decoder 302. The first CMD decoder 301 provides a decoded command signal (CmdR) to a D line (or a D input terminal) of the first latch 303. An inverted clock signal (CLKT) generated from an input clock signal (CLK) by a pair of first and second inverters 307 and 308 arranged in series is input to a CK line (or a CK input terminal) of the first latch 303. The first latch 303 provides a Q output to a CK line of the first RS-F/F 305. The CMD/ADD signal is also input to a D line of the first RS-F/F 305. A reset signal (Rst) is supplied to an R line (or an R input terminal) of the first RS-F/F 305. The first RS-F/F 305 outputs an internal address signal (IntAddR) and an internal command signal (IntCmdR). The first latch 303 may include one or more latch circuits, with each latch circuit corresponding to a signal of the decoded command signal CmdR. The first RS-F/F 305 may include one or more flip flop circuits, with each flip flop circuit corresponding to a signal of the CMD/ADD signal and providing a signal for the internal command signal IntCmdR and/or internal address signal IntAddR.
The second CMD decoder 302 provides a decoded command signal (CmdF) to a D line of the second latch 304. An inverted clock signal (CLKF) generated from the input CLK signal by the first inverter 307 is input to a CK line of the second latch 304. The second latch 304 provides a Q output to a CK line of the second RS-F/F 306. The CMD/ADD signal is also input to a D line of the second RS-F/F 306. The Rst signal is also input to an R line of the second RS-F/F 306. The second RS-F/F 306 outputs an internal address signal (IntAddF) and an internal command signal (IntCmdF). The second latch 304 may include one or more latch circuits, with each latch circuit corresponding to a signal of the decoded command signal CmdF. The second RS-F/F 306 may include one or more flip flop circuits, with each flip flop circuit corresponding to a signal of the CMD/ADD signal and providing a signal for the internal command signal IntCmdF and/or internal address signal IntAddF. When activated, the reset signal Rst may be used to reset a state of the Q output of the first and second RS-F/Fs 305 and 306.
In operation, the first latch 303 provides decoded command signal CmdR as its Q output for rising edges of the clock signal CLK, and the second latch 304 provides decoded command signal CmdF as its Q output for falling edges of the clock signal CLK. For the first latch 303, the Q output causes the first RS-F/F 305 to provide the CMD/ADD signal as internal command signal IntCmdR and internal address signal IntAddR associated with a rising edge of the clock signal CLK. For the second latch 304, the Q output causes the second RS-F/F 306 to provide the CMD/ADD signal as internal command signal IntCmdF and internal address signal IntAddF associated with a falling edge of the clock signal CLK.
The signal pattern generator 400 may be included in the NBTI controller 101 of apparatus 100 and/or signal pattern generator 201 of apparatus 200 in some embodiments of the disclosure. The signal pattern generator 400 includes an oscillator 401 and algorithmic programmable (ALPG) circuit 402. The oscillator 401 and the ALPG circuit 402 may be the oscillator 202 and the ALPG circuit 207 of the NBTI self-controller 203 of the signal pattern generator 201 of the apparatus 200, respectively. The signal pattern generator 400 also includes a CLK buffer 403, a CMD/ADD buffer 404, and a data buffer 405, which may be the CLK buffer 205, the CMD/ADD buffer 206, and the data buffer 204, respectively, of the signal pattern generator 201 of apparatus 200. The ALPG circuit 402 includes a sequencer 406, a counter 407, a formatter 408, and a data topology controller 409. The ALPG circuit 402 may be included in the ALPG circuit 207 of the signal pattern generator 201 of the apparatus 200.
When the memory device 208 in an idle state enters a NBTI mitigation mode (601 in
Upon receipt of the active tmChDis signal, the oscillator 401 is activated, and the clock signal (OscClk) starts toggling. The toggling OscClk is supplied to the ALPG circuit 402 (602 in
The sequencer 406 of the NBTI self-controller 402 manages a sequence of functions to be performed at given or predetermined timings. The counter 407 counts a number of functions, such as memory operations of activation, data read and write, and pre-charging, to determine how many functions are to be repeated. The counter 407 receives a loop signal (Loop) from the sequencer 406 and provides a loop-stop signal (LoopEnd) to the sequencer 421. The counter 407 may be a counter circuit designed and configured for counting from a default count number, such as 0, to a number incremented by one count or one pitch. The counter circuit may be a multiple-bit counter. The sequencer 406 generates a sequence command signal (SeCmd) in response to the received OscClk and outputs SeCmd to the formatter 408. SeCmd identifies which function, Activation (Act), Write (Wrt) or Read (Red), or Pre-charge (Pre), is to be performed at each given timing (
Based on the received OscClk and SeCmd, the formatter 408 generates and outputs self-controller command and address signals (StCMD/StAdd) formatted with predefined formats at predefined timings. For example, StCMD/StAdd converted from SeCmd match with or are in compliance with the predefined formats and timings so as to have the command and address transition timings aligned with the certain pulses of the OscClk signal and hence the StCLK signal. Such predefined formats and timings may include or follow, for example, protocols or standards by the standards organizations, such as the Joint Electron Device Engineering Counsel (JEDEC). For example, as illustrated in
The sequencer 406 also outputs a data flip command signal (DFlip) to the data topology controller 409. The data topology controller 409 manages a signal polarity based on the DFlip signal received from the sequencer 406. The data topology controller 409 outputs and provides the polarity flipped data signal (StData), for example at the same time as ACT command (
In response to the toggling OscClk signal, and based on the SeCmd signal, the ALPG circuit 402 causes a memory device to perform a write sequence of activation (Act), write (Wrt), and pre-charge (Pre) (603 in
The signal pattern generator 400/201 generates the command and address signals formatted in accordance with the predefined protocols that have the command and address transition timings aligned with the clock signal. The information that specify memory command kinds and the information that specify memory addresses are contained in the formatted command and address signals. The command and address signals, and hence the command and address information, are formatted with the defined manners and output at the defined timings in accordance with, for example, the industry protocols or standards, such as those defined by JEDEC. The formatted command and address signals may be hence referred to as the command and address protocols.
The CMD/ADD latch 210 of the respective channels of the memory device 208 can then respond to the received signals, decode or translate the command (such as Act, Wrt, Red, and Pre) and address (such as a memory bank/cell address), and send out the command signals and the address signals to the bank logic 211 and the data latch 209. Upon receipt of the signals from the CMD/ADD latch 210, the data latch 209 starts to communicate with the bank logic 211 and send out the data signal for testing through a data bus (DataBus). At the same time, the CMD/ADD latch 210 also provides internal command and address signals to the bank logic 211. By these functions, internal paths and circuits of the memory device 208, which are located in the next stage or the further downstream of the signal propagation after the CMD/ADD latch 210 and the DATA latch 209 can operate based on the formatted command and address signals or the command and address protocols. As a result, uneven DC stress may be reduced, and hence the NBTI degradation of such paths and circuits may be mitigated during the idle state of the memory device 208.
In some embodiments, the formatter 408 (
The NBTI self-controller 703 includes a data buffer 704, a clock buffer 705, and a command and address buffer 706, and an algorithmic programmable (ALPG) circuit 707. The memory device 708 includes a plurality of memory channels ChA-ChL as well as a bank logic circuit, a data latch circuit, and a command and address latch circuit.
The circuits, paths, buffers, and such illustrated in
In some cases, on a target memory device, all memory banks in all channels may need to be protected from NBTI degradation at the same time during the device idle state. For such cases, the memory device 708 enters a parallel function mode upon receipt of a test mode signal (tmCompress) specific to the parallel-function-mode. The tmCompress may be supplied from a tester coupled to the apparatus 700 and/or from a test mode generator circuit in the apparatus 700. In this mode, command decoder circuits of CMD/ADD latch circuits (such as the CMD decoders 301 and 302 of the CMD/ADD latch circuit 300 in
In the present embodiments and the examples, the NBTI controller 101, 203, 402 or 703 may not be limited to NBTI degradation control. It may be applicable to positive BTI (PBTI) degradation control as appropriate.
The semiconductor memory device 801 may include a plurality of dies (or chips) 802 including at least one interface (IF) die (or chip) 803 and a plurality of memory core dies (or chips) 806 stacked with each other. A number of the memory core dies 806 may not be limited to four as in the illustrated example, and may be more or fewer as appropriate. Each of the memory core dies 806 may include a plurality of memory cells and circuitries accessing the memory cells. For example, the memory cells may be DRAM cells. The memory cells may be arranged in array. The semiconductor memory device 801 may include conductive vias 807 which couple the IF die 803 and the memory core dies 806 by penetrating the IF die 803 and the memory core dies 806. The IF die 803 may be coupled to the interposer 805 via interconnects 809. For example, the interconnects 809 may be microbumps having bump pitches of less than about or less than one hundred micrometers and exposed on an outside of the IF die 803. A portion of each of the interconnects 809 may be coupled to the one or more power lines 810. Another portion of each of the interconnects 809 may be coupled to one or more of the channels 811.
DRAM is merely one example, and the embodiments and the descriptions herein are not intended to be limited to DRAM. Memory devices other than DRAM, such as a static random-access memory (SRAM), a flash memory, an erasable programmable read-only memory (EPROM), a magnetoresistive random-access memory (MRAM), and a phase-change memory, can also be applied as the memory device 801. Furthermore, devices other than memory, including logic ICs, such as a microprocessor and an application-specific integrated circuit (ASIC), are also applicable as the semiconductor device according to the present embodiments.
The semiconductor device 900 includes a memory array 918 on each of the core dice 140. The memory array 918 is shown as including a plurality of memory banks. In the embodiment of
The semiconductor device 900 may employ a plurality of external terminals located on the interface die 930 that include command and address (C/A) terminals coupled to a command and address bus to receive commands and addresses, and a CS signal, clock terminals to receive clocks CK and/CK, data terminals DQ to provide data, and power supply terminals to receive power supply potentials VDD, VSS, VDDQ, and VSSQ.
The clock terminals on the interface die 930 are supplied with external clocks CK and /CK that are provided to an input circuit 912. The external clocks may be complementary. The input circuit 912 generates an internal clock ICLK based on the CK and/CK clocks. The ICLK clock is provided to the command decoder 906 and to an internal clock generator 914. The internal clock generator 914 provides various internal clocks LCLK based on the ICLK clock. The LCLK clocks may be used for timing operation of various internal circuits. The internal data clocks LCLK are provided to an input/output (I/O) circuit 922 to time operation of circuits included in the I/O circuit 922, for example, to data receivers to time the receipt of write data.
The internal clocks LCLK may include a read clock (RCLK) which is used to control the timing of read operations, and write clock (WCLK) which is used to control the timing of write operations. The internal clocks may be passed both to the I/O circuits 922 and also to internal components of the core dice 940 such as RWAMP 920.
The C/A terminals may be supplied with memory addresses. The memory addresses supplied to the C/A terminals are transferred, via a command/address input circuit 902, to an address decoder 104. The address decoder 104 receives the address and supplies a decoded row address XADD to the row decoder 908 and supplies a decoded column address YADD to the column decoder 910. The address decoder 104 may also supply a decoded bank address BADD, which may indicate the bank of the memory array 918 containing the decoded row address XADD and column address YADD. The C/A terminals may be supplied with commands. Examples of commands include timing commands for controlling the timing of various operations, access commands for accessing the memory, such as read commands for performing read operations and write commands for performing write operations, as well as other commands and operations. The access commands may be associated with one or more row address XADD, column address YADD, and bank address BADD to indicate the memory cell(s) to be accessed.
The commands may be provided as internal command signals to the command decoder 906 via the command/address input circuit 902. The command decoder 906 includes circuits to decode the internal command signals to generate various internal signals and commands for performing operations. For example, the command decoder 906 may provide a row command signal to select a word line and a column command signal to select a bit line.
The semiconductor device 900 may receive an access command which is a read command. When a read command is received, and a bank address, a row address and a column address are timely supplied with the read command, read data is read from memory cells in the memory array 918 corresponding to the row address and column address. The read command is received by the command decoder 906, which provides internal commands so that read data from the memory array 918 is provided to RWAMP 920. The read data is output to outside the semiconductor device 900 from the data terminals DQ via the I/O circuit 922.
The semiconductor device 900 may receive an access command which is a write command. When the write command is received, and a bank address, a row address and a column address are timely supplied with the write command, and write data is supplied through the DQ terminals to RWAMP 920. The write data supplied to the data terminals DQ is written to a memory cells in the memory array 918 corresponding to the row address and column address. The write command is received by the command decoder 906, which provides internal commands so that the write data is received by data receivers in the I/O circuit 922. Write clocks may also be provided to the external clock terminals for timing the receipt of the write data by the data receivers of the I/O circuit 922. The write data is supplied via the I/O circuit 922 to RWAMP 920.
The semiconductor device 900 may also receive commands causing it to carry out one or more refresh operations as part of a self-refresh mode. In some embodiments, the self-refresh mode command may be externally issued to the semiconductor device 900. In some embodiments, the self-refresh mode command may be periodically generated by a component of the device. In some embodiments, when an external signal indicates a self-refresh entry command, the refresh signal AREF may also be activated.
The power supply terminals are supplied with power supply potentials VDD and VSS. The power supply potentials VDD and VSS are supplied to an internal voltage generator circuit 924. The internal voltage generator circuit 924 generates various internal potentials such as VPP, VOD, VARY, VPERI, and the like based on the power supply potentials VDD and VSS supplied to the power supply terminals.
The power supply terminals are also supplied with power supply potentials VDDQ and VSSQ. The power supply potentials VDDQ and VSSQ are supplied to the I/O circuit 922. The power supply potentials VDDQ and VSSQ supplied to the power supply terminals may be the same potentials as the power supply potentials VDD and VSS supplied to the power supply terminals in an embodiment of the disclosure. The power supply potentials VDDQ and VSSQ supplied to the power supply terminals may be different potentials from the power supply potentials VDD and VSS supplied to the power supply terminals in another embodiment of the disclosure. The power supply potentials VDDQ and VSSQ supplied to the power supply terminals are used for the I/O circuit 922 so that power supply noise generated by the I/O circuit 922 does not propagate to the other circuit blocks.
Although various embodiments of the disclosure have been described in detail, it will be understood by those skilled in the art that embodiments of the disclosure may extend beyond the specifically described embodiments to other alternative embodiments and/or uses and modifications and equivalents thereof. In addition, other modifications which are within the scope of the disclosure will be readily apparent to those of skill in the art based on the described embodiments. It is also contemplated that various combination or sub-combination of the specific features and aspects of the embodiments may be made and still fall within the scope of the disclosure. It should be understood that various features and aspects of the embodiments can be combined with or substituted for one another in order to form varying mode of the embodiments. Thus, it is intended that the scope of the disclosure should not be limited by the particular embodiments described above.
This application claims priority to U.S. Provisional Application No. 63/584,575, filed Sep. 22, 2023. The aforementioned application is incorporated herein by reference, in its entirety, for any purpose.
Number | Date | Country | |
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63584575 | Sep 2023 | US |