Number | Date | Country | Kind |
---|---|---|---|
2841124 | Sep 1978 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3742229 | Smith et al. | Jun 1973 | |
3743842 | Smith et al. | Jul 1973 | |
3984680 | Smith | Oct 1976 | |
4169230 | Bohlen et al. | Sep 1979 |
Number | Date | Country |
---|---|---|
2333902 | Feb 1976 | DEX |
Entry |
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Baskish, R., "Progress in X-ray Lithography," Electron and Ion Beam Science and Technology, Electrochem. Soc., Princeton, 1974, pp. 3-22. |