The present invention starts out from a device and a method for manufacturing the device in which at least one housing and one bottom connected to the housing are designed in such a way that the housing has a housing wall and the housing bottom has at least one base.
The edge of the base is designed in such away that it has at least two regions, a first region being situated closer to the housing wall and the second region being further removed from the housing wall. A device in which a pressure sensor having a base is situated in a pressure sensor housing is already known from the patent document German Published Patent Application No. 199 19 112.
The present invention starts out from a micromechanical device having at least one housing and one floor connected to the housing. In this instance, the housing has a housing wall and the bottom at least one base. Further it is provided for the base to have a specifiably designed edge. The essence of the present invention now lies in the fact that the edge of the base has at least two regions, a first region of the edge being situated closer to the housing wall and a second region of the edge being further removed from the housing wall.
It is especially advantageous if the edge of the base alternately is made up of the first and the second region. In this instance it is provided in particular for the base to have in each instance eight first and second regions. A further refinement of the present invention provides for the regions to be arranged for example symmetrically distributed over the edge with respect to the center of the base.
According to the present invention, a first region is made up of a ridge, an angle, a corner or a point on the edge of the base. By contrast, the second region represents a flat surface or a rounded surface with respect to the housing wall on the edge of the base.
A preferred refinement of the present invention provides for the contact between the housing wall and the base to occur only in one region. This may be achieved, for example, in that only the first region has a contact. Furthermore it is possible that not every first region on the base has a contact to the housing wall. Moreover, it may be provided for the base to be designed as a centering base, which can allow for a centering of the housing on the housing bottom. Apart from an electrical contact between the housing wall and the base, a thermal contact may also be considered.
The development of the base on the housing bottom advantageously provides for a gap between the base and the housing wall at least in the second region. In a special refinement of the present invention, a filling material is provided in this gap, which completely fills the gap. In addition there is a provision for the gap between the edge of the base and the housing wall to be filled at least partially with the filling material. Furthermore it is provided for a passivating substance to be used as filling material.
It is particularly advantageous if the first and the second region of the edge of the base are designed in such a way that a filling of the gap designed as a filling region between the edge of the base and the housing wall is achieved with a minimum of inclusions of air and/or hollow spaces in the filling material. For this purpose, the design of the first and second region of the edge of the base may be varied beyond the dimensions of the two regions. Another possibility for minimizing the inclusions is to coordinate the succession of the first and the second region appropriately.
The present invention provides for the filling material between the edge of the base and the housing wall to be entered at least up to the height of the base. Moreover there may be a provision for parts of the upper side of the base to be covered by the filling material as well. This may be advantageous for example for fixing the contacts of a sensor element.
In a further development of the present invention, the bottom has at least one sensor element, which detects an operating variable representing at least one operating parameter of a medium adjoining the sensor element and/or a state parameter of the sensor element. For this purpose, it is particularly provided for the sensor element to be located in the region of the base. If operating parameters of a medium are detected, then there is a provision for the sensor element to be exposed to the medium. Thus a pressure and/or a pressure difference and/or a temperature and/or a density and/or a flow velocity of the medium may be detected. If a state variable of the sensor element is to be detected, then a direct contact with a medium surrounding the sensor element is not necessary. State variables such as, for example, a velocity and/or an acceleration and/or a rotation can thus be detected directly by the sensor element.
With reference to the drawings, an exemplary embodiment will be described in the following in which the advantages of the design of the base of a housing form according to the present invention are shown. Typically such housing forms are used as housings for sensors.
A cross section 9 through housing cover 1, housing bottom 2 and base 4 is shown in
In a special specific embodiment of the present invention according to
As cross section 9 in
Suitable sensor types, in which the design of the base (4) according to the present invention may be applied, are pressure sensors, thermal sensors, mass flow sensors, but also acceleration sensors, yaw rate sensors or rotational speed sensors. Since depending on the sensor type there must be a direct contact between the sensor element (3) and the medium surrounding the sensor, a corresponding opening may be provided in housing cover 1.
Number | Date | Country | Kind |
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103 24 220 | May 2003 | DE | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/DE2004/000822 | 4/20/2004 | WO | 00 | 9/6/2006 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2004/109237 | 12/16/2004 | WO | A |
Number | Name | Date | Kind |
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1228357 | Domoto | May 1917 | A |
3327892 | Lloyd et al. | Jun 1967 | A |
4131088 | Reddy | Dec 1978 | A |
4285003 | Gaicki | Aug 1981 | A |
4796365 | Hudson | Jan 1989 | A |
5029120 | Brodeur et al. | Jul 1991 | A |
5427268 | Downing et al. | Jun 1995 | A |
5948992 | Yamamoto | Sep 1999 | A |
6255942 | Knudsen | Jul 2001 | B1 |
6971849 | Saito et al. | Dec 2005 | B2 |
Number | Date | Country |
---|---|---|
199 19 112 | Nov 2000 | DE |
Number | Date | Country | |
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20070056397 A1 | Mar 2007 | US |