This invention relates to a semiconductor memory cell, array, architecture and device, and techniques for controlling and/or operating such cell and device; and more particularly, in one aspect, to a semiconductor dynamic random access memory (“DRAM”) cell, array, architecture and/or device wherein the memory cell includes an electrically floating body in which an electrical charge is stored.
There is a continuing trend to employ and/or fabricate advanced integrated circuits using techniques, materials and devices that improve performance, reduce leakage current and enhance overall scaling. Silicon-on-Insulator (SOI) is a material in which such devices may be fabricated on or in (hereinafter collectively “on”). Such devices are known as SOI devices and include, for example, partially depleted (PD), fully depleted (FD) devices, multiple gate devices (for example, double or triple gate), and Fin-FET. SOI devices have demonstrated improved performance (for example, speed), reduced leakage current characteristics and considerable enhancement in scaling.
One type of dynamic random access memory cell is based on, among other things, a floating body effect of SOI transistors. (See, for example, U.S. patent application Ser. No. 10/450,238, Fazan et al., filed Jun. 10, 2003 and entitled “Semiconductor Device”, hereinafter “Semiconductor Memory Device Patent Application”). In this regard, the memory cell may consist of a PD or a FD SOI transistor (or transistor formed in bulk material/substrate) on having a channel, which is disposed adjacent to the body and separated therefrom by a gate dielectric. The body region of the transistor is electrically floating in view of the insulation or non-conductive region (for example, in bulk-type material/substrate) disposed beneath the body region. The state of memory cell is determined by the concentration of charge within the body region of the SOI transistor.
With reference to
Data is written into or read from a selected memory cell by applying suitable control signals to a selected word line(s) 28, a selected source line(s) 30 and/or a selected bit line(s) 32. In response, charge carriers are accumulated in or emitted and/or ejected from electrically floating body region 18 wherein the data states are defined by the amount of carriers within electrically floating body region 18. Notably, the entire contents of the Semiconductor Memory Device Patent Application, including, for example, the features, attributes, architectures, configurations, materials, techniques and advantages described and illustrated therein, are incorporated by reference herein.
As mentioned above, memory cell 12 of DRAM array 10 operates by accumulating in or emitting/ejecting majority carriers (electrons or holes) 34 from body region 18 of, for example, N-channel transistors. (See,
Notably, for at least the purposes of this discussion, a logic high or State “1” corresponds to an increased concentration of majority carries in the body region relative to an unprogrammed device and/or a device that is programmed with a logic low or State “0”. In contrast, a logic low or State “0” corresponds to a reduced concentration of majority carries in the body region relative to an unprogrammed device and/or a device that is programmed with a logic high or State “1”.
Conventional reading is performed by applying a small drain bias and a gate bias above the transistor threshold voltage. The sensed drain current is determined by the charge stored in the floating body giving a possibility to distinguish between the states “1” and “0”. Permanent scaling down of device size leads to increase of variations of the device characteristics. It is widely recognized that these variations (mismatch) is key to precision IC design. Due to mismatch, designers are forced to include substantial design margin or risk yield loss, both of which cost money and time.
A floating body memory device has two different current states corresponding to two different logical states: “1” and “0”. Reading is performed by comparison of a cell current with the current from a reference cell that is usually placed between the state “1” and state “0”. Large enough statistical variations in the device currents may cause an erroneous reading as it is shown in
Small programming window reduces the speed or access time of the memory device, memory array, and/or memory cells. As such, there is a need for high performance reading techniques for floating body memory cells, devices and arrays providing better reading speed and robustness to technology fluctuations.
There are many inventions described and illustrated herein. The present inventions are neither limited to any single aspect nor embodiment thereof, nor to any combinations and/or permutations of such aspects and/or embodiments. Moreover, each of the aspects of the present inventions, and/or embodiments thereof, may be employed alone or in combination with one or more of the other aspects of the present inventions and/or embodiments thereof. For the sake of brevity, many of those permutations and combinations will not be discussed separately herein.
In one aspect, the present inventions are directed to an integrated circuit device comprising a memory cell including an electrically floating body transistor, wherein the electrically floating body transistor includes a source region, a drain region, an electrically floating body region disposed between the source region and the drain region, and a gate disposed over the body region. Each memory cell includes at least (i) a first data state which is representative of a first charge in the body region of the transistor, and (ii) a second data state which is representative of a second charge in the body region of the transistor. The integrated circuit device further comprises data sensing circuitry, coupled to the memory cell, to sense the data state of the memory cell, wherein, in response to read control signals applied to the electrically floating body transistor, the electrically floating body transistor generates a bipolar transistor current which is representative of the data state of the memory cell and wherein the data sensing circuitry determines the data state of the memory cell substantially based on the bipolar transistor current.
The electrically floating body transistor may be an N-channel type transistor or a P-channel type transistor.
The read control signals may include a signal applied to the gate, source region, and drain region to cause, force and/or induce the bipolar transistor current which is representative of the data state of the memory cell. In one embodiment, the read control signals include a positive voltage pulse which is applied to the drain region of the electrically floating body transistor. In another embodiment, the read control signals include a negative voltage pulse which is applied to the drain region of the electrically floating body transistor.
In another principal, an integrated circuit device comprising a memory cell including an electrically floating body transistor which consists essentially of a source region and drain, each having impurities to provide a first conductivity type, a body region disposed between the source region and the drain region wherein the body region is electrically floating and includes impurities to provide a second conductivity type wherein the second conductivity type is different from the first conductivity type, and a gate disposed over the body region. Each memory cell includes at least (i) a first data state which is representative of a first charge in the body region of the transistor, and (ii) a second data state which is representative of a second charge in the body region of the transistor.
The integrated circuit device further comprises (i) data sensing circuitry, coupled to the memory cell, to sense the data state of the memory cell, and (ii) control circuitry, coupled to the memory cell, to generate and apply read control signals to the electrically floating body transistor. In response to read control signals applied to the electrically floating body transistor, the electrically floating body transistor generates a bipolar transistor current which is representative of the data state of the memory cell and wherein the data sensing circuitry determines the data state of the memory cell substantially based on the bipolar transistor current.
The electrically floating body transistor of this aspect of the invention may be an N-channel type transistor or a P-channel type transistor.
The read control signals may include a signal applied to the gate, source region, and drain region to cause, force and/or induce the bipolar transistor current which is representative of the data state of the memory cell. In one embodiment, the read control signals include a positive voltage pulse which is applied to the drain region of the electrically floating body transistor. In another embodiment, the read control signals include a negative voltage pulse which is applied to the drain region of the electrically floating body transistor.
In another principal, an integrated circuit device comprising a memory cell including an electrically floating body transistor, wherein the electrically floating body transistor disposed in or on a semiconductor region or layer which resides on or above an insulating region or layer of a substrate. The electrically floating body transistor includes a source region and drain, each having impurities to provide a first conductivity type, a body region disposed between the source region and the drain region wherein the body region is electrically floating and includes impurities to provide a second conductivity type wherein the second conductivity type is different from the first conductivity type, and a gate disposed over the body region. Each memory cell includes at least (i) a first data state which is representative of a first charge in the body region of the transistor, and (ii) a second data state which is representative of a second charge in the body region of the transistor.
The integrated circuit device further comprises (i) data sensing circuitry, coupled to the memory cell, to sense the data state of the memory cell, and (ii) control circuitry, coupled to the memory cell, to generate and apply read control signals to the electrically floating body transistor. In response to read control signals applied to the electrically floating body transistor, the electrically floating body transistor generates a bipolar transistor current which is representative of the data state of the memory cell and wherein the data sensing circuitry determines the data state of the memory cell substantially based on the bipolar transistor current.
The electrically floating body transistor of this aspect of the invention may be an N-channel type transistor or a P-channel type transistor.
The read control signals may include a signal applied to the gate, source region, and drain region to cause, force and/or induce the bipolar transistor current which is representative of the data state of the memory cell. In one embodiment, the read control signals include a positive voltage pulse which is applied to the drain region of the electrically floating body transistor. In another embodiment, the read control signals include a negative voltage pulse which is applied to the drain region of the electrically floating body transistor.
Again, there are many inventions, and aspects of the inventions, described and illustrated herein. This Summary of the Inventions is not exhaustive of the scope of the present inventions. Moreover, this Summary of the Inventions is not intended to be limiting of the inventions and should not be interpreted in that manner. While certain embodiments have been described and/or outlined in this Summary of the Inventions, it should be understood that the present inventions are not limited to such embodiments, description and/or outline, nor are the claims limited in such a manner. Indeed, many others embodiments, which may be different from and/or similar to, the embodiments presented in this Summary, will be apparent from the description, illustrations and claims, which follow. In addition, although various features, attributes and advantages have been described in this Summary of the Inventions and/or are apparent in light thereof, it should be understood that such features, attributes and advantages are not required whether in one, some or all of the embodiments of the present inventions and, indeed, need not be present in any of the embodiments of the present inventions.
In the course of the detailed description to follow, reference will be made to the attached drawings. These drawings show different aspects of the present inventions and, where appropriate, reference numerals illustrating like structures, components, materials and/or elements in different figures are labeled similarly. It is understood that various combinations of the structures, components, materials and/or elements, other than those specifically shown, are contemplated and are within the scope of the present inventions.
At the outset, it should be noted that there are many inventions described herein as well as many aspects and embodiments of those inventions.
In a first aspect, the present inventions are directed to a memory cell, having an electrically floating body transistor, and/or a technique of reading the data state in such a memory cell. In this regard, the present inventions employ the intrinsic bipolar transistor current to read and/or determine the data state of the electrically floating body memory cell (for example, whether the electrically floating body memory cell is programmed in a State “0” and State “1”). Here, during the read operation, the data state is determined primarily by, sensed substantially using and/or based substantially on the bipolar transistor current that is responsive to the read control signals and significantly less by the interface channel current component, which is negligible relatively to the bipolar component.
Notably, the bipolar transistor current may be very sensitive to the floating body potential due to the high gain of the intrinsic bipolar transistor. As such, the programming window obtainable with the bipolar reading technique may be considerably higher (for example, up two orders of magnitude higher) than the programming window employing a conventional reading technique (which is based primarily on the interface channel current component. The large programming window provides other opportunities/advantages, for example, simulations demonstrate that the bipolar reading may be accomplished significantly faster than conventional techniques (for example, in less than in 1 ns).
With reference to
Notably, with reference to
In operation, during the read operation, suitable and predetermined control signals may be applied to gate 16, source region 20, and drain region 22 in order to cause, force and/or induce the bipolar transistor current in transistor 14 of memory cell 12. For example, in one embodiment, 0 volts may be applied to source region 20 and gate 16 and a positive voltage (for example, +3.5 volts) may be applied to drain region 22. Such control signals, in combination, induce and/or cause a bipolar transistor current which is considerably larger than any channel current. As such, sensing circuitry (for example, a cross-coupled sense amplifier), which is coupled to transistor 14 (for example, drain region 22) of memory cell 12, senses the data state using primarily and/or based substantially on the bipolar transistor current.
Thus, in response to read control signals, electrically floating body transistor 14 generates a bipolar transistor current which is representative of the data state of memory cell 12. Where the data state is a logic high or State “1”, electrically floating body transistor 14 provides a substantially greater bipolar transistor current than where the data state is a logic low or State “0”. Indeed, electrically floating body transistor 14 may provide little to no bipolar transistor current when the data state is a logic low or State “0”. As discussed in more detail below, data sensing circuitry determines the data state of the memory cell substantially based on the bipolar transistor current.
Where electrically floating body transistor 14 is an P-channel type transistor, in operation, during the read operation, in one embodiment, 0 volts may be applied to source region 20 and gate 16 and a negative voltage (for example, −4 volts) may be applied to drain region 22. Such control signals, in combination, induce and/or cause a bipolar transistor current which is considerably larger than any channel current. Moreover, electrically floating body transistor 14 generates a bipolar transistor current which is representative of the data state of the memory cell. In this embodiment, where the data state is logic high or State “1”, electrically floating body transistor 14 provides a substantially greater bipolar transistor current than where the data state is a logic low or State “0”. Indeed, electrically floating body transistor 14 may provide little to no bipolar transistor current when the data state is a logic low or State “0”. The sensing circuitry (for example, a cross-coupled sense amplifier), which is coupled to transistor 14 (for example, drain region 22) of memory cell 12, senses the data state using primarily and/or based substantially on the bipolar transistor current.
Notably, the exemplary voltage amplitudes to implement the read operation are merely exemplary. The indicated voltage levels may be relative or absolute. Alternatively, the voltages indicated may be relative in that each voltage level, for example, may be increased or decreased by a given voltage amount (for example, each voltage may be increased or decreased by 0.25, 0.5, 1.0 and 2.0 volts) whether one or more of the voltages (for example, the source, drain or gate voltages) become or are positive and negative.
With reference to
In another aspect, the present inventions may be implemented an integrated circuit device (for example, a discrete memory device or a device having embedded memory) having a memory array including a plurality of memory cells each including an electrically floating body transistor. The memory arrays may be comprised of N-channel, P-channel and/or both types of transistors. Indeed, circuitry that is peripheral to the memory array (for example, data sense circuitry (for example, sense amplifiers or comparators), memory cell selection and control circuitry (for example, word line and/or source line drivers), as well as row and column address decoders) may include P-channel and/or N-channel type transistors.
For example, with reference to
The memory array 10 may be implemented using any number of architectures, layouts, and/or configurations employing electrically floating body memory cells 12. In this regard, an electrically floating body transistor, which state is read using the techniques of the present invention, may be implemented in the memory cell, architecture, layout, structure and/or configuration described and illustrated in the following non-provisional and provisional U.S. patent applications:
(1) application Ser. No. 10/450,238, which was filed by Fazan et al. on Jun. 10, 2003 and entitled “Semiconductor Device”;
(2) application Ser. No. 10/487,157, which was filed by Fazan et al. on Feb. 18, 2004 and entitled “Semiconductor Device”;
(3) application Ser. No. 10/829,877, which was filed by Ferrant et al. on Apr. 22, 2004 and entitled “Semiconductor Memory Cell, Array, Architecture and Device, and Method of Operating Same”;
(4) application Ser. No. 10/840,009, which was filed by Ferrant et al. on May 6, 2004 and entitled “Semiconductor Memory Device and Method of Operating Same”
(5) application Ser. No. 10/941,692, which was filed by Fazan et al. on Sep. 15, 2004 and entitled “Low Power Programming Technique for a One Transistor SOI Memory Device & Asymmetrical Electrically Floating Body Memory Device, and Method of Manufacturing Same”; and
(6) application Ser. No. 60/662,923, which was filed by Carman on Mar. 17, 2005 and entitled “Memory Device/Array Having Electrically Floating Body Memory Cells, and Method of Operating Same”.
The entire contents of these six (6) U.S. patent applications, including, for example, the inventions, features, attributes, architectures, configurations, materials, techniques and advantages described and illustrated therein, are hereby incorporated by reference herein. For the sake of brevity, those discussions will not be repeated; rather those discussions (text and illustrations), including the discussions relating to the memory cell, architecture, layout, structure, are incorporated by reference herein in its entirety.
Notably, the memory cells may be controlled (for example, programmed or read) using any of the control circuitry described and illustrated in the above-referenced six (6) U.S. patent applications. For the sake of brevity, those discussions will not be repeated; such control circuitry is incorporated herein by reference. Indeed, all memory cell selection and control circuitry for programming, reading, controlling and/or operating memory cells including electrically floating body transistors, whether now known or later developed, are intended to fall within the scope of the present invention.
For example, the present invention may also employ the read circuitry and techniques described and illustrated in U.S. patent application Ser. No. 10/840,902, which was filed by Portmann et al. on May 7, 2004, and entitled “Reference Current Generator, and Method of Programming, Adjusting and/or Operating Same”.
Moreover, the data write and sense circuitry 34 may include a sense amplifier (see,
In addition, the present invention may employ the reference generation techniques (used in conjunction with the data sense circuitry for the read operation) described and illustrated in U.S. Provisional Patent Application Ser. No. 60/718,417, which was filed by Bauser on Sep. 19, 2005, and entitled “Method and Circuitry to Generate a Reference Current for Reading a Memory Cell Having an Electrically Floating Body Transistor, and Device Implementing Same”. The entire contents of the U.S. Provisional Patent Application Ser. No. 60/718,417 are incorporated herein by reference.
It should be further noted that while each memory cell 12 in the exemplary embodiments (described above) includes one transistor 14, memory cell 12 may include two transistors, as described and illustrated in application Ser. No. 10/829,877, which was filed by Ferrant et al. on Apr. 22, 2004 and entitled “Semiconductor Memory Cell, Array, Architecture and Device, and Method of Operating Same”.
The electrically floating memory cells, transistors and/or memory array(s) may be fabricated using well known techniques and/or materials. Indeed, any fabrication technique and/or material, whether now known or later developed, may be employed to fabricate the electrically floating memory cells, transistors and/or memory array(s). For example, the present invention may employ silicon (whether bulk-type or SOI), germanium, silicon/germanium, gallium arsenide or any other semiconductor material in which transistors may be formed. Indeed, the electrically floating transistors, memory cells, and/or memory array(s) may employ the techniques described and illustrated in non-provisional patent application entitled “Integrated Circuit Device, and Method of Fabricating Same”, which was filed on Jul. 2, 2004, by Fazan, Ser. No. 10/884,481, provisional patent application entitled “One Transistor Memory Cell having Mechanically Strained Electrically Floating Body Region, and Method of Operating Same”, which was filed on Oct. 19, 2005, Ser. No. 60/728,060, by Bassin, and/or provisional patent application entitled “Memory Cell, Array and Device, and Method of Operating Same”, which was filed on Oct. 19, 2005, Ser. No. 60/728,061, by Okhonin et al. (hereinafter collectively “Integrated Circuit Device Patent Applications”). The entire contents of the Integrated Circuit Device Patent Applications, including, for example, the inventions, features, attributes, architectures, configurations, materials, techniques and advantages described and illustrated therein, are hereby incorporated by reference herein.
Indeed, memory array 10 (including SOI memory transistors) may be integrated with SOI logic transistors, as described and illustrated in the Integrated Circuit Device Patent Applications. For example, in one embodiment, an integrated circuit device includes memory section (having, for example, PD or FD SOI memory transistors 14) and logic section (having, for example, high performance transistors, such as FinFET, multiple gate transistors, and/or non-high performance transistors (for example, single gate transistors that do not possess the performance characteristics of high performance transistors—not illustrated)). Again, the entire contents of the Integrated Circuit Device Patent Applications, including, for example, the inventions, features, attributes, architectures, configurations, materials, techniques and advantages described and illustrated therein, are hereby incorporated by reference.
Further, the memory arrays may be comprised of N-channel, P-channel and/or both types of transistors, as well as partially depleted and/or fully depleted type transistors. For example, circuitry that is peripheral to the memory array (for example, sense amplifiers or comparators, row and column address decoders, as well as line drivers (not illustrated herein)) may include fully depleted type transistors (whether P-channel and/or N-channel type). Alternatively, such circuitry may include partially depleted type transistors (whether P-channel and/or N-channel type). There are many techniques to integrate both partially depleted and/or fully depleted type transistors on the same substrate (see, for example, application Ser. No. 10/487,157, which was filed by Fazan et al. on Feb. 18, 2004 and entitled “Semiconductor Device”). All such techniques, whether now known or later developed, are intended to fall within the scope of the present inventions.
Notably, electrically floating body transistor 14 may be a symmetrical or non-symmetrical device. Where transistor 14 is symmetrical, the source and drain regions are essentially interchangeable. However, where transistor 14 is a non-symmetrical device, the source or drain regions of transistor 14 have different electrical, physical, doping concentration and/or doping profile characteristics. As such, the source or drain regions of a non-symmetrical device are typically not interchangeable. This notwithstanding, the drain region of the electrically floating N-channel transistor of the memory cell (whether the source and drain regions are interchangeable or not) is that region of the transistor that is connected to the bit line/sense amplifier.
As mentioned above, the memory arrays may be comprised of N-channel, P-channel and/or both types of transistors. Indeed, circuitry that is peripheral to the memory array (for example, sense amplifiers or comparators, row and column address decoders, as well as line drivers (not illustrated herein)) may include P-channel and/or N-channel type transistors. Where P-channel type transistors are employed as memory cells 12 in the memory array(s), suitable write and read voltages (for example, negative voltages) are well known to those skilled in the art in light of this disclosure. Accordingly, for sake of brevity, these discussions will not be repeated.
There are many inventions described and illustrated herein. While certain embodiments, features, attributes and advantages of the inventions have been described and illustrated, it should be understood that many others, as well as different and/or similar embodiments, features, attributes and advantages of the present inventions, are apparent from the description and illustrations. As such, the embodiments, features, attributes and advantages of the inventions described and illustrated herein are not exhaustive and it should be understood that such other, similar, as well as different, embodiments, features, attributes and advantages of the present inventions are within the scope of the present inventions.
For example, as mentioned above, the illustrated/exemplary voltage levels to implement the read and write operations are merely exemplary. The indicated voltage levels may be relative or absolute. Alternatively, the voltages indicated may be relative in that each voltage level, for example, may be increased or decreased by a given voltage amount (for example, each voltage may be increased or decreased by 0.1, 0.15, 0.25, 0.5, 1 volt) whether one or more of the voltages (for example, the source, drain or gate voltages) become or are positive and negative.
Notably, the present inventions may employ the circuitry and techniques for independently controlling certain parameters (for example, temporal or voltage), for a memory operation (for example, restore, write, refresh), to program or write a predetermined data state into a memory cell (for example, programming or writing data state “1” or “0” into a memory cell) as described and illustrated in U.S. Provisional Patent Application Ser. No. 60/731,668, which was filed by Popoff on Oct. 31, 2005, and entitled “Method and Apparatus for Varying the Programming Duration of a Floating Body Transistor, and Memory Cell, Array, and/or Device Implementing Same”. For example, the duration of programming/writing of a given memory state into a memory cell by the data sense amplifier circuitry may be controlled adjusted, determined and/or predetermined according to or based on the given memory operation (for example, restore, write, refresh). Likewise, the voltage conditions applied to the memory cell for programming/writing a given memory state into a memory cell by the data sense amplifier circuitry may be controlled and/or adjusted according to the memory operation (for example, restore, write, refresh). The entire contents of U.S. Provisional Patent Application Ser. No. 60/731,668, including, for example, the inventions, features, attributes, architectures, configurations, materials, techniques and advantages described and illustrated therein, are hereby incorporated by reference herein.
As mentioned above, each of the aspects of the present inventions, and/or embodiments thereof, may be employed alone or in combination with one or more of such aspects and/or embodiments. For the sake of brevity, those permutations and combinations will not be discussed separately herein. As such, the present inventions are neither limited to any single aspect (nor embodiment thereof), nor to any combinations and/or permutations of such aspects and/or embodiments.
Moreover, the above embodiments of the present inventions are merely exemplary embodiments. They are not intended to be exhaustive or to limit the inventions to the precise forms, techniques, materials and/or configurations disclosed. Many modifications and variations are possible in light of the above teaching. It is to be understood that other embodiments may be utilized and operational changes may be made without departing from the scope of the present inventions. As such, the foregoing description of the exemplary embodiments of the inventions has been presented for the purposes of illustration and description. Many modifications and variations are possible in light of the above teaching. It is intended that the scope of the inventions not be limited solely to the description above.
This application claims priority to U.S. Provisional Application Ser. No. 60/638,663, entitled “Bipolar Reading Technique for a Memory Cell Having an Electrically Floating Body Transistor”, filed Dec. 22, 2004. The contents of this provisional application are incorporated by reference herein in their entirety.
Number | Name | Date | Kind |
---|---|---|---|
3439214 | Kabell | Apr 1969 | A |
3997799 | Baker | Dec 1976 | A |
4032947 | Kesel et al. | Jun 1977 | A |
4250569 | Sasaki et al. | Feb 1981 | A |
4262340 | Sasaki et al. | Apr 1981 | A |
4298962 | Hamano et al. | Nov 1981 | A |
4371955 | Sasaki | Feb 1983 | A |
4527181 | Sasaki | Jul 1985 | A |
4630089 | Sasaki et al. | Dec 1986 | A |
4791610 | Takemae | Dec 1988 | A |
4954989 | Auberton-Herve et al. | Sep 1990 | A |
4979014 | Hieda et al. | Dec 1990 | A |
5144390 | Matloubian | Sep 1992 | A |
5164805 | Lee | Nov 1992 | A |
5258635 | Nitayama et al. | Nov 1993 | A |
5388068 | Ghoshal et al. | Feb 1995 | A |
5446299 | Acovic et al. | Aug 1995 | A |
5448513 | Hu et al. | Sep 1995 | A |
5466625 | Hsieh et al. | Nov 1995 | A |
5489792 | Hu et al. | Feb 1996 | A |
5528062 | Hsieh et al. | Jun 1996 | A |
5568356 | Schwartz | Oct 1996 | A |
5593912 | Rajeevakumar | Jan 1997 | A |
5606188 | Bronner et al. | Feb 1997 | A |
5608250 | Kalnitsky | Mar 1997 | A |
5627092 | Alsmeier et al. | May 1997 | A |
5631186 | Park et al. | May 1997 | A |
5696718 | Hartmann | Dec 1997 | A |
5740099 | Tanigawa | Apr 1998 | A |
5778243 | Aipperspach et al. | Jul 1998 | A |
5780906 | Wu et al. | Jul 1998 | A |
5784311 | Assaderaghi et al. | Jul 1998 | A |
5811283 | Sun | Sep 1998 | A |
5877978 | Morishita et al. | Mar 1999 | A |
5886376 | Acovic et al. | Mar 1999 | A |
5886385 | Arisumi et al. | Mar 1999 | A |
5897351 | Forbes | Apr 1999 | A |
5929479 | Oyama | Jul 1999 | A |
5930648 | Yang | Jul 1999 | A |
5936265 | Koga | Aug 1999 | A |
5939745 | Park et al. | Aug 1999 | A |
5943258 | Houston et al. | Aug 1999 | A |
5943581 | Lu et al. | Aug 1999 | A |
5960265 | Acovic et al. | Sep 1999 | A |
5968840 | Park et al. | Oct 1999 | A |
5977578 | Tang | Nov 1999 | A |
5982003 | Hu et al. | Nov 1999 | A |
6018172 | Hidada et al. | Jan 2000 | A |
6081443 | Morishita | Jun 2000 | A |
6096598 | Furukawa et al. | Aug 2000 | A |
6097056 | Hsu et al. | Aug 2000 | A |
6111778 | MacDonald et al. | Aug 2000 | A |
6121077 | Hu et al. | Sep 2000 | A |
6157216 | Lattimore et al. | Dec 2000 | A |
6171923 | Chi et al. | Jan 2001 | B1 |
6177300 | Houston et al. | Jan 2001 | B1 |
6177708 | Kuang et al. | Jan 2001 | B1 |
6213869 | Yu et al. | Apr 2001 | B1 |
6214694 | Leobandung et al. | Apr 2001 | B1 |
6225158 | Furukawa et al. | May 2001 | B1 |
6245613 | Hsu et al. | Jun 2001 | B1 |
6252281 | Yamamoto et al. | Jun 2001 | B1 |
6292424 | Ohsawa | Sep 2001 | B1 |
6297090 | Kim | Oct 2001 | B1 |
6300649 | Hu et al. | Oct 2001 | B1 |
6320227 | Lee et al. | Nov 2001 | B1 |
6333532 | Davari et al. | Dec 2001 | B1 |
6350653 | Adkisson et al. | Feb 2002 | B1 |
6351426 | Ohsawa | Feb 2002 | B1 |
6359802 | Lu et al. | Mar 2002 | B1 |
6384445 | Hidaka et al. | May 2002 | B1 |
6391658 | Gates et al. | May 2002 | B1 |
6403435 | Kang et al. | Jun 2002 | B1 |
6421269 | Somasekhar et al. | Jul 2002 | B1 |
6424011 | Assaderaghi et al. | Jul 2002 | B1 |
6424016 | Houston | Jul 2002 | B1 |
6429477 | Mandelman et al. | Aug 2002 | B1 |
6440872 | Mandelman et al. | Aug 2002 | B1 |
6441435 | Chan | Aug 2002 | B1 |
6441436 | Wu et al. | Aug 2002 | B1 |
6466511 | Fujita et al. | Oct 2002 | B2 |
6479862 | King et al. | Nov 2002 | B1 |
6492211 | Divakaruni et al. | Dec 2002 | B1 |
6518105 | Yang et al. | Feb 2003 | B1 |
6531754 | Nagano et al. | Mar 2003 | B1 |
6538916 | Ohsawa | Mar 2003 | B2 |
6544837 | Divakaruni et al. | Apr 2003 | B1 |
6548848 | Horiguchi et al. | Apr 2003 | B2 |
6549450 | Hsu et al. | Apr 2003 | B1 |
6552398 | Hsu et al. | Apr 2003 | B2 |
6556477 | Hsu et al. | Apr 2003 | B2 |
6566177 | Radens et al. | May 2003 | B1 |
6567330 | Fujita et al. | May 2003 | B2 |
6590258 | Divakauni et al. | Jul 2003 | B2 |
6590259 | Adkisson et al. | Jul 2003 | B2 |
6617651 | Ohsawa | Sep 2003 | B2 |
6621725 | Ohsawa | Sep 2003 | B2 |
6632723 | Watanabe et al. | Oct 2003 | B2 |
6650565 | Ohsawa | Nov 2003 | B1 |
6714436 | Burnett et al. | Mar 2004 | B1 |
6721222 | Somasekhar et al. | Apr 2004 | B2 |
6825524 | Ikehashi et al. | Nov 2004 | B1 |
6861689 | Burnett | Mar 2005 | B2 |
6897098 | Hareland et al. | May 2005 | B2 |
6903984 | Tang et al. | Jun 2005 | B1 |
6912150 | Portman et al. | Jun 2005 | B2 |
6913964 | Hsu | Jul 2005 | B2 |
6980234 | Kitawaki | Dec 2005 | B2 |
6980243 | Miyawaki et al. | Dec 2005 | B2 |
7030436 | Forbes | Apr 2006 | B2 |
7061806 | Tang et al. | Jun 2006 | B2 |
7085156 | Ferrant et al. | Aug 2006 | B2 |
20010055859 | Yamada et al. | Dec 2001 | A1 |
20020030214 | Horiguchi | Mar 2002 | A1 |
20020034855 | Horiguchi et al. | Mar 2002 | A1 |
20020036322 | Divakauni et al. | Mar 2002 | A1 |
20020051378 | Ohsawa | May 2002 | A1 |
20020064913 | Adkisson et al. | May 2002 | A1 |
20020070411 | Vermandel et al. | Jun 2002 | A1 |
20020072155 | Liu et al. | Jun 2002 | A1 |
20020076880 | Yamada et al. | Jun 2002 | A1 |
20020086463 | Houston et al. | Jul 2002 | A1 |
20020089038 | Ning | Jul 2002 | A1 |
20020098643 | Kawanaka et al. | Jul 2002 | A1 |
20020110018 | Ohsawa | Aug 2002 | A1 |
20020114191 | Iwata et al. | Aug 2002 | A1 |
20020130341 | Horiguchi et al. | Sep 2002 | A1 |
20020160581 | Watanabe et al. | Oct 2002 | A1 |
20020180069 | Houston | Dec 2002 | A1 |
20030003608 | Arikado et al. | Jan 2003 | A1 |
20030015757 | Ohsawa | Jan 2003 | A1 |
20030035324 | Fujita et al. | Feb 2003 | A1 |
20030057487 | Yamada et al. | Mar 2003 | A1 |
20030057490 | Nagano et al. | Mar 2003 | A1 |
20030102497 | Fried et al. | Jun 2003 | A1 |
20030112659 | Ohsawa | Jun 2003 | A1 |
20030123279 | Alpperspach et al. | Jul 2003 | A1 |
20030146488 | Nagano et al. | Aug 2003 | A1 |
20030151112 | Yamada et al. | Aug 2003 | A1 |
20040108532 | Forbes | Jun 2004 | A1 |
20050017240 | Fazan | Jan 2005 | A1 |
20050063224 | Fazan et al. | Mar 2005 | A1 |
20050064659 | Willer | Mar 2005 | A1 |
20050105342 | Tang et al. | May 2005 | A1 |
20050111255 | Tang et al. | May 2005 | A1 |
20050135169 | Somasekhar et al. | Jun 2005 | A1 |
20050141262 | Tamada et al. | Jun 2005 | A1 |
20050141290 | Tang et al. | Jun 2005 | A1 |
20050226070 | Ohsawa | Oct 2005 | A1 |
20050232043 | Ohsawa | Oct 2005 | A1 |
20060091462 | Okhonin et al. | May 2006 | A1 |
20060098481 | Okhonin et al. | May 2006 | A1 |
20060126374 | Waller et al. | Jun 2006 | A1 |
Number | Date | Country |
---|---|---|
0 030 856 | Jun 1981 | EP |
0 350 057 | Jan 1990 | EP |
0 354 348 | Feb 1990 | EP |
0 362 961 | Apr 1990 | EP |
0 202 515 | Mar 1991 | EP |
0 207 619 | Aug 1991 | EP |
0 175 378 | Nov 1991 | EP |
0 253 631 | Apr 1992 | EP |
0 513 923 | Nov 1992 | EP |
0 300 157 | May 1993 | EP |
0 564 204 | Oct 1993 | EP |
0 579 566 | Jan 1994 | EP |
0 362 961 | Feb 1994 | EP |
0 599 506 | Jun 1994 | EP |
0 359 551 | Dec 1994 | EP |
0 642 173 | Mar 1995 | EP |
0 366 882 | May 1995 | EP |
0 465 961 | Aug 1995 | EP |
0 694 977 | Jan 1996 | EP |
0 333 426 | Jul 1996 | EP |
0 727 8220 | Aug 1996 | EP |
0 739 097 | Oct 1996 | EP |
0 245 515 | Apr 1997 | EP |
0 788 165 | Aug 1997 | EP |
0 801 427 | Oct 1997 | EP |
0 510 607 | Feb 1998 | EP |
0 537 677 | Aug 1998 | EP |
0 858 109 | Aug 1998 | EP |
0 860 878 | Aug 1998 | EP |
0 869 511 | Oct 1998 | EP |
0 878 804 | Nov 1998 | EP |
0 920 059 | Jun 1999 | EP |
0 924 766 | Jun 1999 | EP |
0 642 173 | Jul 1999 | EP |
0 727 822 | Aug 1999 | EP |
0 933 820 | Aug 1999 | EP |
0 951 072 | Oct 1999 | EP |
0 971 360 | Jan 2000 | EP |
0 980 101 | Feb 2000 | EP |
0 601 590 | Apr 2000 | EP |
0 993 037 | Apr 2000 | EP |
0 836 194 | May 2000 | EP |
0 599 388 | Aug 2000 | EP |
0 689 252 | Aug 2000 | EP |
0 606 758 | Sep 2000 | EP |
0 682 370 | Sep 2000 | EP |
1 073 121 | Jan 2001 | EP |
0 726 601 | Sep 2001 | EP |
0 731 972 | Nov 2001 | EP |
1 162 663 | Dec 2001 | EP |
1 162 744 | Dec 2001 | EP |
1 179 850 | Feb 2002 | EP |
1 180 799 | Feb 2002 | EP |
1 191 596 | Mar 2002 | EP |
1 204 146 | May 2002 | EP |
1 204 147 | May 2002 | EP |
1 209 747 | May 2002 | EP |
0 744 772 | Aug 2002 | EP |
1 233 454 | Aug 2002 | EP |
0 725 402 | Sep 2002 | EP |
1 237 193 | Sep 2002 | EP |
1 241 708 | Sep 2002 | EP |
1 253 634 | Oct 2002 | EP |
0 844 671 | Nov 2002 | EP |
1 280 205 | Jan 2003 | EP |
1 288 955 | Mar 2003 | EP |
2 197 494 | Mar 1974 | FR |
1 414 228 | Nov 1975 | GB |
62-272561 | Nov 1987 | JP |
02-294076 | Feb 1991 | JP |
03171768 | Jul 1991 | JP |
08213624 | Aug 1996 | JP |
8-274277 | Oct 1996 | JP |
09046688 | Feb 1997 | JP |
9-82912 | Mar 1997 | JP |
10242470 | Nov 1998 | JP |
11-87649 | Mar 1999 | JP |
247735 | Aug 2000 | JP |
274221 | Sep 2000 | JP |
389106 | Dec 2000 | JP |
180633 | Jun 2001 | JP |
2002-94027 | Mar 2002 | JP |
2002-176154 | Jun 2002 | JP |
2002-246571 | Aug 2002 | JP |
2002-0981 | Nov 2002 | JP |
2002-329795 | Nov 2002 | JP |
2002-343886 | Nov 2002 | JP |
2002-353080 | Dec 2002 | JP |
2003-31693 | Jan 2003 | JP |
2003-86712 | Mar 2003 | JP |
2003-100641 | Apr 2003 | JP |
2003-100900 | Apr 2003 | JP |
2003-132682 | May 2003 | JP |
2003-203967 | Jul 2003 | JP |
2003-243528 | Aug 2003 | JP |
Number | Date | Country | |
---|---|---|---|
20060131650 A1 | Jun 2006 | US |
Number | Date | Country | |
---|---|---|---|
60638663 | Dec 2004 | US |