Patent Application
20200174333
An Application Data Sheet is filed concurrently with this specification as part of the present application. Each application that the present application claims benefit of or priority to as identified in the concurrently filed Application Data Sheet is incorporated by reference herein in its entirety and for all purposes.
Electrochromism is a phenomenon in which a material exhibits a reversible electrochemically-mediated change in an optical property when placed in a different electronic state, typically by being subjected to a voltage change. The optical property is typically one or more of color, transmittance, absorbance, and reflectance. One well known electrochromic material, for example, is tungsten oxide (W03). Tungsten oxide is a cathodic electrochromic material in which a coloration transition, transparent to blue, occurs by electrochemical reduction.
Electrochromic materials may be incorporated into, for example, windows and mirrors. The color, transmittance, absorbance, and/or reflectance of such windows and mirrors may be changed by inducing a change in the electrochromic material. While electrochromism was discovered in the 1960's, electrochromic devices have not realized their full commercial potential.
Electrochromic windows show promise as a viable “green” technology. As electrochromic glass is deployed in greater amounts, there arises a need to produce products that address the need not only for energy savings, aesthetics and occupant comfort, but also other environmental issues.
Various embodiments herein relate to electrochromic windows that are patterned or otherwise fabricated to be bird friendly. Also disclosed are methods and apparatus for fabricating such windows. The pattern may be formed in a way that renders the window visible to birds but not to humans, thereby reducing bird mortality while ensuring an unobstructed view for human occupants. In certain embodiments, electrochromic windows are augmented to include bird friendly features that do not necessarily include a pattern.
In one embodiment, a window is provided, the window including: (a) one or more transparent substrates, where at least one of the substrates is an electrochromic (EC) lite including an electrochromic device coating; (b) a pattern disposed on at least one of the substrates, the pattern including: (i) a first feature that provides at least about 10% more reflection or scattering of electromagnetic radiation at wavelengths between about 300-400 nm than at wavelengths between about 400-700 nm, and (ii) a second feature that is substantially transparent to electromagnetic radiation at wavelengths between about 300-700 nm, the first and second features being interspersed with one another.
In certain implementations, the substrate on which the pattern is disposed is the EC lite. In other implementations, the substrate on which the pattern is disposed is a non-electrochromic lite. The patterned non-electrochromic lite may be laminated to the electrochromic lite, e.g., in a pre-existing IGU. The patterning may be on the lite itself or an interlayer of the laminate. The interlayer of the laminate may use an adhesive that has UV reflecting and/or scattering particles or other properties. A pattern may be at least partially defined in a patterned layer including at least one of titanium oxide, aluminum oxide, tantalum oxide, tin oxide, silicon oxide, aluminum nitride, and silicon nitride. In a particular embodiment the patterned layer includes titanium dioxide. The first feature may include an area or areas of reduced or enhanced thickness of the titanium dioxide compared to the second features in some cases. In one example, the area or areas having reduced thickness of titanium dioxide have no titanium dioxide. As mentioned, the patterned layer may be disposed on the EC lite.
In some embodiments, the substrate on which the pattern is disposed does not have an electrochromic device coating thereon. In some such implementations, the substrate on which the pattern is disposed may be provided together with the EC lite in an insulated glass unit (IGU). The substrate on which the pattern is disposed may be laminated to the EC lite in some instances; where the EC lite is part of an IGU or not.
A number of different patterns may be used. In some cases, the pattern may be disposed over substantially the entire surface of the substrate on which it is disposed. In order to prevent birds from trying to fly through the window, the pattern may be configured to meet certain dimensions. For example, in some embodiments the first and/or second features have a first dimension that is (i) about 4 inches or less in one direction, and/or (ii) about 2 inches or less in a second direction that is substantially perpendicular to the first dimension. The first direction may be a horizontal direction and the second direction may be a vertical direction. In a number of cases, at least one of the first and second features is at least about ¼ inch in its shortest dimension. In some embodiments, the first feature includes a first material and the second features include a second material that has a different composition than the first material. In a particular example, the first material may be titanium oxide and the second material may be silicon oxide. The first and second materials may have different refractive indices.
The pattern may be formed in a layer including a material, where the first or second features include an area or areas of reduced thickness in the material. In some cases, the area or areas of reduced thickness in the material have no material. In some cases, the first feature exhibits greater reflectance than the second feature at wavelengths between about 300-400 nm, for example at about 370 nm. In these or other cases, the first feature may exhibit greater scattering than the second feature at wavelengths between about 300-400 nm, for example at about 370 nm. The pattern may include intersecting or non-intersecting stripes or bars formed by the first and second features. In some cases, the pattern includes a grid formed by the first and second features. In certain implementations, the pattern includes a plurality of dots, where the dots are provided on a background, and where either (i) the first features form the dots and the second features form the background, or (ii) the first features form the background and the second features form the dots. In a number of cases, the pattern is visible by birds having vision that extends into ultraviolet wavelengths.
The pattern may be provided at a number of different locations. In some embodiments, the pattern is provided in a patterned layer positioned between the substrate and the electrochromic device coating thereon. The electrochromic device coating may include a first conductive layer, an electrochromic layer, a counter electrode layer, and a second conductive layer, where the first conductive layer is positioned closer to the substrate than the second conductive layer, and where the patterned layer is positioned between the substrate and the first conductive layer. In some other embodiments, the electrochromic device coating includes a first conductive layer, an electrochromic layer, a counter electrode layer, and a second conductive layer, where the first conductive layer is positioned closer to the substrate than the second conductive layer, and where the patterned layer is positioned between the first conductive layer and the electrochromic layer.
In some implementations, the window includes two transparent substrates including the EC lite and a non-electrochromic (non-EC) lite, where when the window is installed the EC lite is outboard of the non-EC lite, and where the pattern is provided in a patterned layer. In some such cases, the two transparent substrates may be provided in an insulated glass unit (IGU) having an interior pocket defined, at least partially, between the two transparent substrates, where both the electrochromic device coating and the patterned layer are provided at locations in the interior pocket of the IGU. The patterned layer may be provided on the EC-lite in some cases, e.g., on S1. In these or other cases, the patterned layer may be provided on the non-EC lite. The patterning may also, or in the alternative, be etched glass, fritted glass, sand blasted glass and the like. The patterning may be on thin or thick glass. As mentioned, in certain embodiments, the patterned lite may be an additional lite laminated to the EC lite, e.g., the outboard lite of an EC IGU. The lamination may be performed before or after the IGU is constructed. In a number of embodiments, the window may be configured to achieve two or more optical states: a first optical state that simultaneously (1) appears substantially transparent to humans and (2) appears patterned to UV-sensitive birds, the pattern being formed by the first and second features; and a second optical state that appears tinted to humans and to UV-sensitive birds.
In certain embodiments, the window includes two transparent substrates including the EC lite and a non-electrochromic (non-EC) lite, where when the window is installed, the EC lite is inboard of the non-EC lite, and where the pattern is provided on a patterned layer. In some such embodiments, the two transparent substrates are provided in an insulated glass unit (IGU) having an interior pocket defined, at least partially, between the two transparent substrates. Where both the electrochromic device coating and the patterned layer are provided at locations in the interior pocket of the IGU. In some cases, a low-emissivity coating may be positioned outboard of the electrochromic device coating.
In certain embodiments, the window may further include a third lite positioned inboard of the EC lite and the non-EC lite. In some such cases, the EC lite may be positioned inboard of the non-EC lite. In other cases, the EC lite may be positioned outboard of the non-EC lite. The window may further include a low- emissivity coating positioned outboard of the electrochromic device coating. The third lite may also be outboard of the EC lite, where the EC lite is outboard of the non-EC lite of the IGU. The third lite may be laminated to the EC lite or, provide the third lite of a triple pane IGU, for example.
In other embodiments, a UV light source may be included in a bird friendly electrochromic window. In some embodiments, acoustic bird deterrents may be included in a bird friendly electrochromic window.
In another aspect of the disclosed embodiments, a method of fabricating an electrochromic window is provided, the method including: providing a substrate; forming a patterned layer on the substrate, the patterned layer including: (i) a first feature that provides at least about 10% more reflection or scattering of electromagnetic radiation at wavelengths between about 300-400 nm than at wavelengths between about 400-700 nm, and (ii) a second feature that is substantially transparent to electromagnetic radiation at wavelengths between about 300-700 nm, the first and second features being interspersed with one another; and forming an electrochromic device on the substrate, the electrochromic device including at least one electrochromic layer operable for undergoing an optical transition, the substrate, patterned layer, and electrochromic device together forming the electrochromic window.
In a further aspect of the disclosed embodiments, an integrated deposition system for forming electrochromic windows is provided, the integrated deposition system including: a first deposition station having a first target including a first material for depositing a layer of electrochromic material on a substrate when the substrate is positioned in the first deposition station; a second deposition station having a second target including a second material for depositing a layer of counter electrode material on the substrate when the substrate is positioned in the second deposition station; and a patterning station configured to form a patterned layer on the substrate when the substrate is positioned in the patterning station, the patterned layer including: (i) a first feature that provides at least about 10% more reflection or scattering of electromagnetic radiation at wavelengths between about 300-400 nm than at wavelengths between about 400-700 nm, and (ii) a second feature that is substantially transparent to electromagnetic radiation at wavelengths between about 300-700 nm, the first and second features being interspersed with one another.
In some such embodiments, the patterning station is configured to etch a pre-patterned layer to form a patterned layer. In these or other embodiments, the patterning station may be configured to deposit the patterned layer using one or more masks. In a number of cases, a plurality of patterning stations may be provided, with each station serving a different purpose, e.g., positioning a mask, depositing material, etching material, removing a mask, cleaning/polishing a layer, etc.
These and other features and advantages of the disclosed embodiments will be described in further detail below, with reference to the associated drawings.
The following detailed description can be more fully understood when considered in conjunction with the drawings in which:
A schematic cross-section of an electrochromic device 100 in accordance with some embodiments is shown in
In various embodiments, the ion conductor region 108 may form from a portion of the EC layer 106 and/or from a portion of the CE layer 110. In such embodiments, the stack 120 may be deposited to include cathodically coloring electrochromic material (the EC layer) in direct physical contact with an anodically coloring counter electrode material (the CE layer). The ion conductor region 108 (sometimes referred to as an interfacial region, or as an ion conducting substantially electronically insulating layer or region) may then form where the EC layer 106 and the CE layer 110 meet, for example through heating and/or other processing steps. In some embodiments, the device contains no ion conductor region as deposited.
In various embodiments, one or more of the layers shown in
Further, an electrochromic device may include one or more additional layers not shown in
In normal operation, the electrochromic device reversibly cycles between at least two optical states such as a clear state and a tinted state. In the clear state, a potential is applied to the electrochromic stack 120 such that available ions in the stack that can cause the electrochromic material 106 to be in the tinted state reside primarily in the counter electrode 110. When the potential on the electrochromic stack is reversed, the ions are transported across the ion conducting layer 108 to the electrochromic material 106 and cause the material to enter the tinted state.
It should be understood that the reference to a transition between a clear state and tinted state is non-limiting and suggests only one example, among many, of an electrochromic transition that may be implemented. Unless otherwise specified herein, whenever reference is made to a clear-tinted transition, the corresponding device or process encompasses other optical state transitions such as non-reflective-reflective, transparent-opaque, etc. Further the terms “clear” and “bleached” refer to an optically neutral state, e.g., untinted, transparent or translucent. Still further, unless specified otherwise herein, the “color” or “tint” of an electrochromic transition is not limited to any particular wavelength or range of wavelengths. As understood by those of skill in the art, the choice of appropriate electrochromic and counter electrode materials governs the relevant optical transition.
In certain embodiments, all of the materials making up electrochromic stack 120 are inorganic, solid (i.e., in the solid state), or both inorganic and solid. Because organic materials tend to degrade over time, inorganic materials offer the advantage of a reliable electrochromic stack that can function for extended periods of time. Materials in the solid state also offer the advantage of not having containment and leakage issues, as materials in the liquid state often do. Each of the layers in the electrochromic device is discussed in detail, below. It should be understood that any one or more of the layers in the stack may contain some amount of organic material, but in many implementations one or more of the layers contains little or no organic matter. The same can be said for liquids that may be present in one or more layers in small amounts. It should also be understood that solid state material may be deposited or otherwise formed by processes employing liquid components such as certain processes employing sol-gels or chemical vapor deposition.
While windows (and electrochromic windows in particular) can be used to create an aesthetically pleasing building design, they can also present problems to certain animals. In particular, birds may fail to appreciate the presence of a window and try to fly through it. The reflective or transparent nature of windows makes them difficult to detect by birds. This problem may be particularly bad when the windows are positioned near areas with trees, shrubs, and other plant life to which the bird may be attracted. In some cases a bird may be attracted to an item behind the window, and in other cases a bird may be attracted to an image reflected in the glass. Unfortunately, many birds do not survive a collision with a window, and some of those who survive may be injured by the collision. Given the energy savings potential and occupant comfort aspects of electrochromic windows, it is expected that large numbers of electrochromic windows will be deployed in the coming years; thus, bird friendly options are necessary.
Avian Vision Vs. Human Vision
Various embodiments herein relate to electrochromic or other windows having one or more optical characteristics that dissuade birds from flying into the windows. Such windows may be referred to as bird friendly windows. Certain embodiments may also relate to particular portions (e.g., layers or stacks of layers) of a bird friendly window, as well as methods and apparatus for making such windows. The techniques described herein are also applicable to electrochromic devices incorporated into other (non-window) products as appropriate, and to other optically switchable devices such as liquid crystal devices and electrophoretic devices, which may be incorporated into window products or other products.
In order for a window to be considered bird friendly, it should include one or more features that make the window appear to the bird as if the window cannot be flown through. One technique involves patterning the window so that a bird will see contrasting features and believe it cannot fit through the spaces in the pattern. Unfortunately, conventional patterning can also deleteriously affect the view through the window for human occupants. Because windows are typically used (at least in part) to provide human occupants with a view to the outside, such patterning is undesirable if it can be perceived by human eyes. As such, various techniques described herein may be used to render an electrochromic window pattern visible to birds (such that birds are discouraged from trying to fly through the window) while maintaining an unobstructed view through the window for humans, that is, they are selective so that birds see the visual deterrent while to humans the deterrent is e.g., visually indiscernible or nearly so. In certain embodiments, an electrochromic window may be patterned such that birds can see the pattern and humans cannot. For instance, the pattern may reflect, absorb, or scatter light only in wavelengths that are visible to birds but not humans (e.g., only reflecting in ultraviolet wavelengths, as explained further with regard to
Both human and avian eyes use two types of light receptors: rods and cones. Rods are sensitive to small quantities of light and are better for vision during the night. Cones detect specific wavelengths of light and are better suited for seeing color. Humans are trichromatic and have only three types of cones in their eyes, each having a distinctive response range of wavelengths with a maximum absorbance peak. By contrast, most birds are tetrachromatic, having four different types of cones. Some studies have also suggested that certain birds may be pentachromatic, having five different types of cones.
Color vision in birds can be categorized into two groups: violet sensitive (VS) and ultraviolet sensitive (UVS). Birds having UVS vision have a pigment in their cones that absorbs UV light, thereby allowing these birds to see into the UV spectrum. It is believed that the majority of avian species have UVS vision, including birds that are in the clades of palaeognathae (ratites and tinamous), charadriiformes (shorebirds, gulls, and alcids), trogoniformes (trogons), psittaciformes (parrots), and passeriformes (perching birds). (Ödeen A, Håstad O: The phylogenetic distribution of ultraviolet sensitivity in birds. BMC Evol Biol 2013, 13:36). In nature, birds may take advantage of this UV vision through courtship (e.g., using UV reflective plumage to attract mates), hunting (e.g., tracking UV reflection of rodent waste), and other adaptations. In many embodiments, electrochromic windows are designed to be “bird friendly” to birds that have UVS vision.
In certain embodiments, a window may include a pattern that is visible to birds. The pattern may be positioned in a number of places. In some cases, the pattern is disposed on an electrochromic pane. An electrochromic pane includes a transparent substrate with an electrochromic device coating thereon. Typically, the electrochromic device is provided on one surface of the pane, but in some cases an electrochromic device is provided on both primary surfaces (the interior facing surface and the exterior facing surface) of a particular pane. In some embodiments, the electrochromic pane is provided in an assembly having two or more panes such as an insulated glass unit or a laminate of two or more panes. That is, a non-electrochromic pane may be paired with an electrochromic pane in an IGU in some cases. A non-electrochromic pane may also be laminated to an electrochromic pane in some cases. An IGU may include such laminate(s) or no laminates. A bird-visible pattern may reside on an electrochromic pane, a non-electrochromic pane, or both.
Various embodiments herein relate to techniques where the patterned layer is provided on the interior of an IGU or a laminate (i.e., the patterned layer is positioned at some location between two panes). A patterned layer may also be provided outside of two panes in an IGU in certain embodiments (e.g., on an exterior-facing outer pane (often referred to as surface 1) or on an interior-facing inner pane (often referred to as surface 4), or on an additional layer/substrate that may be attached (e.g., laminated) onto surfaces 1 or 4. In many embodiments, a patterned layer may be provided on the same pane as an electrochromic device. In other words, an electrochromic pane may be patterned to be bird friendly. The patterning may be on the surface with the EC coating or the surface without the EC coating, or both. In these or other embodiments, a patterned layer may be provided on a non-electrochromic pane. The patterned, non- electrochromic pane may be associated with an electrochromic pane in an IGU, or laminated to an electrochromic pane as mentioned above.
In various embodiments, an electrochromic device may be fabricated to include a defect-mitigating-insulating layer (DMIL), also referred to as a buffer layer. The buffer layer may be provided, at least in part, to minimize the risk of fabricating defective devices by preventing a short circuit within the electrochromic device. The buffer layer may be patterned such that birds can recognize the window as something they cannot fly through, while still maintaining a clear view for human occupants. One example buffer layer/DMIL is shown in
In various embodiments, the patterned layer may include a material that has different optical properties at (a) a wavelength (or range of wavelengths) visible by birds, compared to (b) wavelengths visible by humans. For instance, the patterned layer may include a material that has a high reflectance in UV and a low reflectance in the range of wavelengths visible by humans. This material may form one pattern element that contrasts with a second pattern element that may be effectively invisible to both birds and humans, thereby defining a pattern that is perceivable by birds but not humans.
In some embodiments, the patterned layer may include an oxide material (or nitride or carbide material in some embodiments), for example a metal oxide. In some cases, the patterned layer may include a material that exhibits different optical properties (e.g., refractive index/reflectance/transmissivity/scattering/etc.) depending on its thickness. In a particular example, the patterned layer is titanium oxide (TiOx), which has a higher index of refraction at UV wavelengths than at wavelengths visible by humans. Advantageously, the thickness of the TiOx affects how light interacts with the TiOx, and a layer of TiOx can be patterned to different thicknesses to achieve a pattern perceivable by birds but not by humans. In such embodiments, one pattern element may be made of relatively thinner TiOx, and a second pattern element (which contrasts with the first pattern element) may be made of relatively thicker TiOx. Other examples of materials that may behave similarly include, but are not limited to, various oxides, nitrides, and carbides, including but not limited to aluminum oxide, tantalum oxide, tin oxide, silicon oxide, aluminum nitride, and silicon nitride. In some cases a patterned layer will act as a DMIL/buffer layer, or as a portion thereof. In some other cases, a patterned layer may be shaped and/or located at a position that would render it unsuitable as a DMIL (e.g., the layer may include incomplete coverage of TiOx or other DMIL material, or it may be positioned outside the pair of conductive layers, for instance between a glass substrate and a conductive layer). Further, the patterned layer may be made of a material that is not suitable as a DMIL (e.g., the patterned layer may be of the same material as a DMIL, or not, and may or may not be sufficiently insulating to act as a DMIL).
In various implementations, a material used for a patterned layer may have certain properties. For example, the material may be substantially transparent in UV (e.g., between about 300-400 nm, in some cases below about 350 nm). The material may have an index of refraction that is different from that of the substrate. In many cases, the material used for a patterned layer has a difference in n and/or k values between the UV region (e.g., between about 300-400 nm) and the human visible region (e.g., between about 400-700 nm). These n and k values relate to the refractive index of the material.
Techniques for creating a bird-visible pattern are discussed further below. Briefly, the pattern produces contrasts between two or more pattern features, particularly where such contrasts occur at wavelengths in the UV spectrum. The pattern features include at least two components that contrast with one another (selectively to birds). For instance, with respect to a chess board, the pattern features include both the black squares (which may be considered first features) and the white squares (which may be considered second features). With respect to an empty tic-tac-toe board, the pattern features include the black lines (which may be considered first features) and the white spaces (which may be considered second features) between the lines. With respect to a patterned window that includes at least two contrasting properties, the pattern features include both the areas having a first property (e.g., a first refractive index in UV) and the areas having a second property (e.g., a second refractive index in UV).
In a number of cases, the pattern has certain characteristics to discourage birds from trying to fly through the window. For instance, the pattern may have particular dimensions so that a bird will think they cannot fit through spaces in the pattern. It has been observed that small birds will not fly through surfaces that have two inches or less of untreated horizontal space or four inches or less of untreated vertical space. In other words, a bird will not try to fly through a vertically oriented “opening” if the opening appears to be less than about four inches wide, nor will it try to fly through a horizontally oriented “opening” if the opening appears to be less than about two inches tall. The “opening” perceived by the bird is a portion of the glass itself, and is not actually an opening.
Further, in some embodiments, the pattern features may be greater than about 0.25 inches tall and wide to help ensure that the birds can see the pattern. In various embodiments, the smallest dimension of a pattern feature may be at least about 0.25 inches. If the pattern features are smaller than 0.25 inches, the bird may not see the pattern feature until it is too close to the window to avoid collision (if the bird sees the pattern at all). However, certain patterns may have pattern features that fall outside the guidelines presented above. For instance, in some cases the pattern features may be shorter than 2 inches tall, thinner than about 4 inches wide, and/or smaller than about 0.25 inches tall/wide.
The patterns shown in
In certain embodiments, the patterned layer is integrated with a series of layers in a stack that provides areas of constructive and/or destructive interference over the face of the glass, particularly over the UV range. Such interference may define the pattern seen by a bird. Factors that may contribute to formation of such interference include the material(s) used to fabricate the pattern, the refractive index of such materials, as well as the thickness of such materials. The constructive/destructive interference may be strong in the UV spectrum visible by birds and weak in the spectrum visible by humans. In some embodiments, the stack of materials is engineered to produce controlled regions of interference. Material properties relevant to producing this interference include the n vs. λ behavior, and/or the k vs. λ behavior of the material.
In various embodiments, a pattern may be discernable but not particularly noticeable by humans. In other words, humans may be able to see the pattern if they are looking closely and/or carefully, but would not otherwise be likely to notice the pattern.
While non-electrochromic windows can be modified to be bird friendly, electrochromic windows present an opportunity to use electrochromic device components to assist in presenting patterns selectively visible to birds. In particular, because electrochromic windows are fabricated to include a number of different layers (many of which are transparent thin films, and many of which are all solid-state and inorganic), one or more of these layers can be patterned to make the window visible to birds. Some of the layers that can be so patterned are not present in typical non-electrochromic windows.
As noted above, a pattern includes at least two contrasting components selectively visible to birds. Such components may be referred to as features or pattern features. A first component of the pattern may be effectively invisible to both birds and humans, while a second component of the pattern may be visible only to birds and invisible to humans. This results in a pattern that is perceivable by birds but invisible to humans. Put another way, the pattern may be formed to include a first component that (a) contrasts with a second component, such that the pattern formed from the first and second components is perceivable, and (b) exhibits different optical properties at UV vs. human visible wavelengths, such that the pattern formed from the first and second components is perceivable at UV wavelengths visible to birds, but not at wavelengths visible by humans.
In various embodiments, the refractive index may be different between the two contrasting components at a wavelength that is visible by birds but not humans. When used without qualification herein, the refractive index is intended to refer to the complex refractive index. The complex refractive index (n) can be defined in terms of its real part (n), which indicates the phase velocity, and its imaginary part (K), which indicates the extinction coefficient or mass attenuation coefficient. In particular, n=n +iK.
In some embodiments, the contrasting components of the pattern are made of materials that have n values that differ by at least about 0.3 at a UV wavelength visible by birds (but not humans). In these or other embodiments, the contrasting components of the pattern may have K values that differ by at least about 0.01 at a UV wavelength visible by birds (but not humans). In these or other embodiments, the contrasting components of the pattern may have n values that differ by about 0.1 or less at wavelengths in the range between about 400-700 nm, and/or K values that differ by about 0.005 or less at wavelengths in the range between about 400-700 nm. In one example, a pattern is made of a first component and a second component. The first and second components may be stripes and gaps, respectively, as shown in
The reflectance (R) of a material is controlled by the refractive index of the material. Specifically, R=((n−1)/(n+1))2. In some embodiments, the contrasting components of the pattern have reflectances that differ by at least about 5%, in some cases at least about 15% at wavelengths between about 300-400 nm, or between about 350-400 nm, for example at about 370 nm. Such reflectance differences may not be visible by humans, for example where the reflectance differences are below a human perceivable threshold in the range between about 400-700 nm.
In various embodiments, the contrasting components of the pattern may have different reflection properties, scattering properties, absorption properties, transmission properties, etc.
A number of different layers in or on an electrochromic window can be patterned to provide contrasting components that make the window visible to birds. As noted above, a patterned layer may be provided on an electrochromic pane and/or on a non-electrochromic pane. If a patterned layer is provided on a non-electrochromic pane, it may be provided together with an electrochromic pane, for example in an IGU and/or in a laminate structure. Similarly, a patterned electrochromic pane may be provided in an IGU and/or in a laminate structure as desired. The patterned layer may be provided on any surface of an IGU, and in some cases is provided between the panes of the IGU. In one example where the patterned layer is provided on the interior of an IGU, the patterned layer also acts as a defect-mitigating insulating layer, as described above.
In some embodiments, the patterned layer is provided next to a substrate layer. In one example, the pattern is formed directly on the substrate. The patterned layer may be positioned such that it is closer to the outside environment than the substrate, or vice versa. A protective cover may be provided (e.g., laminated or otherwise formed) on the patterned layer to protect it from damage.
The patterned layer should be positioned such that the pattern is perceivable by birds. Placing the pattern closer to the bird and farther away from the interior of the building may help make the pattern more perceivable by the birds.
For reference, in an IGU having two panes, the exterior-facing surface of the exterior pane is typically referred to as S1, the interior-facing surface of the exterior pane is referred to as S2, the exterior-facing surface of the interior pane is referred to as S3, and the interior-facing surface of the interior pane is referred to as S4. In other words, going from the external environment inwards, the surfaces are referred to as S1, S2, S3, and S4, with S4 being the surface that a building occupant can physically touch, and S1 being the surface exposed to the outside environment. Surfaces that are relatively closer to the external environment are referred to as “outboard” surfaces, while surfaces that are relatively closer to the interior of the building are referred to as “inboard” surfaces. For example, S1 is outboard of S2, S3, and S4.
When an IGU is provided with a single electrochromic pane, the electrochromic pane can be the interior pane (having surfaces S3 and S4) or the exterior pane (having surfaces S1 and S2). The electrochromic device can be positioned on any of surfaces S1-S4. One benefit of including an electrochromic device on S1 and/or S2 is that the solar heat gain through the window can be minimized. An electrochromic device can absorb solar energy and become fairly warm. When the electrochromic device is provided on S1 and/or S2, the warm electrochromic device is on the outboard lite, and any argon (or other gas) provided interior of the IGU can act as a thermal barrier to minimize the amount of heat that enters the building as a result of the warm electrochromic device.
In some other embodiments, the electrochromic device may be provided on S3 and/or S4. In these implementations, the solar heat gain through the window may be relatively higher due to the fact that the interior pane of the IGU will become warm, thereby heating the building interior to a greater extent. Without the IGU's internal gas pocket to act as a thermal barrier between the electrochromic device and the interior of the building, the heat gain through the windows may be relatively higher. However, this may be mitigated by using a triple-pane IGU, having surfaces S1-S6 (in this example, S6 is the surface which a building occupant can physically touch), where the EC device is on S3 or S4, and yet, there is still an inert gas barrier between the warm EC device and the interior of the building due to the presence of the third pane with surfaces S5 and S6. Thus one embodiment is a triple pane IGU having one or more bird friendly features on S1 and/or S2, and one or more EC device on S3 and/or S4. Triple pane IGU embodiments are further discussed below in the context of
Another way to combat the heat gain through the window is to use a low-emissivity coating outboard of the electrochromic device. This strategy is particularly effective where the low-emissivity coating reduces the amount of infrared energy that passes through the window onto an EC coating, for example an EC coating on S3 and/or S4 (or otherwise inboard of the low-emissivity coating). The low-emissivity coating may block (e.g., reflect) a relatively higher degree of IR energy and a relatively lower degree of UV energy in some cases, thereby permitting the electrochromic device to be located on S3 or S4, and ensuring that the patterned layer remains visible to the birds outside (regardless of where the patterned layer is located). In various embodiments, a low-emissivity coating may be provided on S1 and/or S2, though such a coating can be provided anywhere on the IGU. The low-emissivity coating may be provided on the same or different surface as the patterned layer. The low-emissivity coating may also be provided on the same or different surface as the electrochromic layer. So long as the low-emissivity coating is outboard of the electrochromic layer, heat gain through the window related to heating of the electrochromic device itself can be minimized. In a particular embodiment, the patterned layer is outboard of a low-emissivity coating, which is outboard of the electrochromic device. Many other configurations are possible.
In certain embodiments, the reduction in heat gain efficiency related to having the electrochromic device on S3 or S4 may be offset by other factors, making placement of the electrochromic device on S3 and/or S4 more attractive. In some embodiments, it is beneficial to have the electrochromic device provided on the interior of the IGU, on S2 and/or S3. This structure ensures that the electrochromic device is protected from the elements. Alternatively or in addition, an electrochromic device may be provided on the outer surfaces of the IGU, e.g., on S1 and/or S4, as desired for a particular application. Where this is the case, a protective layer may be provided over the electrochromic device to protect the electrochromic device from damage. One such protective layer, e.g., if the EC device is on S4, can be an additional inboard lite, either laminated to S4 or provided with an inert gas barrier and spacer between S4 and the additional lite to form a triple pane IGU as described above.
With respect to the relative position of the patterned layer and the electrochromic device, a number of possibilities are available. In some embodiments, the patterned layer is positioned closer to the exterior environment and the electrochromic layer is positioned closer to the building interior (i.e., the patterned layer is outboard of the electrochromic device). This configuration may be beneficial in that the pattern on the patterned layer will be visible to birds regardless of the optical state of the electrochromic device. Because the electrochromic device is not positioned between the bird and the patterned layer in these examples, the electrochromic device can't prevent the bird from seeing the patterned layer. In the examples of
In the example of
In another embodiment, the patterned layer 405 is provided on S1 and/or S2, and the electrochromic stack 420 is provided on S3 and/or S4.
This risk is minimized when the electrochromic device's available optical states render the electrochromic window either (a) sufficiently opaque/tinted (or other optical characteristic) such that the bird can perceive the presence of the window, or (b) transparent in the human-visible spectrum, but patterned in the UV spectrum such that the bird can perceive the presence of the window. In (a), the window may be sufficiently dark that a bird perceives it as a wall or other structure that can't be flown through. In (b), the window may appear clear to humans, but patterned to birds, such that the birds won't try to fly through the window. In a number of embodiments, an electrochromic window is configured to achieve two or more optical states, each of which achieve at least one of (a) or (b). In certain embodiments, an electrochromic window is configured to achieve a three or more optical states, with one (or more) optical state achieving (b) and the remaining optical states achieving (a). In a particular example, an optical device is configured to achieve three optical states including a first state that appears transparent to humans and patterned to birds, a second state that appears moderately tinted to both humans and birds, and a third state that appears highly tinted to both humans and birds. In each of the second and third state, the window is sufficiently dark and perceptible such that birds do not try to fly through the window. The reflectivity, transmissivity, and other optical properties of the window can be tuned to ensure this result, for example by providing one or more anti-reflective coatings on the electrochromic window (e.g., on S1 or another surface). This technique can be applied regardless of the relative positions of the patterned layer and the electrochromic stack, though it may be most beneficial in cases where the electrochromic stack is outboard of the patterned layer.
Returning to the embodiments of
In certain implementations, the patterned layer and/or electrochromic stack may be provided at a different location on a triple paned IGU.
The lamination can be done after an IGU is constructed; e.g., using lites 402b and 402c a double pane IGU is fabricated, then lite 402a is laminated to lite 402b of the IGU. Lamination of a lite to an existing electrochromic IGU is described in U.S. Pat. No. 8,164,818, titled, “Electrochromic Window Fabrication Methods,” which is herein incorporated by reference in its entirety. Advantages to lamination after IGU formation is that choice of lamination partner, e.g., lite 402a, can be made post IGU fabrication. This allows for greater flexibility in process flow, since the IGU fabrication line can undergo few if any changes; lite 402a is applied downstream. In other embodiments, lites 402a and 402b are laminated together and then the resulting laminate used, along with lite 402c, to make IGU 436.
Patterning through Thickness Variations Within a Layer
One method for patterning a layer within an electrochromic device is to use a layer having varying thickness, where the different thicknesses provide a contrast that birds can see, but humans cannot see, at least not easily. Such a method may be used on any layer within an electrochromic device that provides a visual contrast at different layer thicknesses that birds can appreciate. Various embodiments herein are presented in the context of a pattern formed in a buffer layer/DMIL made of titanium oxide, though the techniques herein may also be applied to other layers in the device.
As shown in Table 1, the changes in reflectance in the UV are substantially greater than the changes in photopic reflectance, meaning that a pattern etched into a TiOx layer will be much more noticeable to birds than to humans. As such, birds can perceive the pattern and understand that they can't fly through the window, while at the same time human occupants enjoy a relatively clear (unpatterned) view through the window.
While the results in
The varying thickness of the patterned layer may be achieved in a number of ways. In one embodiment, the layer is deposited at a uniform thickness, and portions of the layer are etched away to form the pattern. In one embodiment, the entire thickness of the patterned layer is etched through, as discussed below in relation to
In order to fabricate the device of
Next, at operation 605, the pre-patterned layer is etched to form the patterned layer 505. The pattern formed may in various embodiments have one or more of the characteristics described above, for example the dimensions listed above and/or the designs shown in
After the etching operation 605, one or more optional cleaning operations (not shown in
Next, the electrochromic stack 506 is deposited in operation 607. In some embodiments, the stack 506 is deposited to include at least a cathodically coloring electrochromic layer, an ion conductor layer, and an anodically coloring (or optically passive) counter electrode layer. In some other embodiments, the stack 506 is deposited to include at least a cathodically coloring electrochromic layer and an anodically coloring (or optically passive) counter electrode layer, which may be in direct physical contact with one another. In these implementations, an ion conducting region may form between the electrochromic and counter electrode layers, for example through multistep thermal conditioning (MTC) as described in U.S. Pat. No. 8,764,950, which is incorporated by reference above. Deposition of the various layers in the electrochromic stack 506 is further discussed in U.S. patent application Ser. No. 12/645,111, which is incorporated by reference above. After the electrochromic stack 506 is deposited, the second conductive layer 514 is formed in operation 609. The multistep thermal conditioning may occur (if at all) after the second conductive layer 514 is deposited.
In another method, operation 603 involves selectively depositing the patterned layer 505 in regions where it is desired. In order to avoid depositing the patterned layer 505 in regions where it is not desired, such regions may be masked in operation 603. Operation 605 may then be eliminated. A series of masks may be used in some cases. In one embodiment, a mask may be rotated and/or otherwise re-positioned between subsequent depositions performed on the same substrate.
One reason that one of skill might choose the design of
The method 600 of
Patterning through Composition/Material Variations
In a number of embodiments, recesses in an etched patterned layer may be filled with one or more materials. For instance, a buffer layer may be provided to fill these recesses. The material that fills the recesses may also deposit over non-recessed portions of the patterned layer. The pattern formed in the patterned layer may be visible by birds either through optical contrasts arising from thickness differences within the patterned layer and/or within the buffer layer, and/or it may be visible through optical contrasts arising from different optical properties of the material used for the patterned layer vs. the material used for the buffer layer. In some cases, a buffer layer as described in relation to
The material chosen to fill the recesses in the patterned layer may be chosen to have certain properties. In some cases, this material has a relatively high resistivity, for example between about 1 and 5×1010 Ohm-cm. The material may also have a different index of refraction compared to the material of the patterned layer (at least in UV). In some cases, the material used to fill recesses in the patterned layer is one that has a relatively low index of refraction (n), for example below about 1.5 in some cases. In a particular example, the material used to fill recesses in the patterned layer is silicon oxide. In another example, the material used to fill recesses in the patterned layer may be the same material at a different relative composition compared to the material used for the patterned layer. For instance, both the patterned layer and the material used to fill recesses in the patterned layer may be titanium oxide provided at different stoichiometry.
In
Because the buffer layer 520 is deposited over an uneven surface, it may be beneficial in certain embodiments to planarize the buffer layer before further processing, to thereby form a flat, uniform layer upon which the electrochromic stack 506 can be deposited. In some other embodiments this planarizing step may be omitted. Such planarizing may occur through chemical mechanical polishing (CMP), etching (e.g., with plasma) and the like.
The buffer layer 520 may be made of a variety of materials. In some embodiments, the buffer layer 520 is suitable as a defect-mitigating-insulating layer. For instance, the buffer layer may be a material having an electronic resistivity between about 1 and 5×1010 Ohm-cm. By using such a material in combination with a patterned layer 505c, the risk of forming defective devices can be minimized.
In some implementations, at least one of the patterned layer 505c and the buffer layer 520 is made of titanium oxide. In some cases, the other of the patterned layer 505c and the buffer layer 520 is made of silicon oxide. The silicon oxide may be SiO2 in some cases, though other relative compositions and materials may also be used. In a particular embodiment, the patterned layer 505c is titanium oxide and the buffer layer 520 is silicon oxide.
In various embodiments, the buffer layer 520 may be deposited up to a height that is at least about as high as the patterned layer 505c. In some cases, as shown in
As discussed with relation to the method 600 of
In
As discussed further below, the window may also be made hazy in the UV, which may render it easier for birds to see. The discussion below focuses on embodiments where the entire window is made hazy. However, such haziness can also be formed in a pattern, for example as described in relation to
Another method of reducing the risk that a bird will try to fly through a window is to make the window appear hazy. Where such haziness is relatively strong at wavelengths visible by birds (but not by humans) and relatively weak at wavelengths visible by humans, the result is high quality bird friendly glass. Haze may be provided as a pattern having a strong contrast in the bird-visible ultraviolet region. Transmission haze and/or reflection haze may be utilized in various embodiments. Transmission haze is the forward scattering of light from the surface of a nearly clear substrate viewed in transmission. Light scattered back through the sample is typically not included in transmission haze. Only light that is scattered more than 2.5° from the incident light is considered to contribute to the haze. When measuring transmission haze, the percentage of light diffusely scattered compared to the total light transmitted is reported. Reflection haze is the spread of the specular component of the reflected light from a glossy surface. The light that is reflected from an object at an angle equal to but opposite the incident light is the specular component.
The appearance of haziness is a result of light scattering, which is strongly dependent on wavelength. In particular, light scattering intensity (I) is inversely proportional to the fourth power of the wavelength (λ) of light (I∝ 1/λ4). This means that lower wavelengths tend to scatter substantially more than higher wavelengths.
The structure of a material can affect whether or not light will be scattered when traveling through the material. The degree of crystallinity and the size of crystallites within a material are relevant, as are the grain boundaries, microscopic pores, density variations, or other defects (if present). The length scale of these structural features relative to the wavelength of light being scattered is relevant. As such, the morphology/structure of a given layer can be tuned to provide scattering in UV that renders the window visible to birds but transparent/clear to humans.
One way to tune the morphology of a layer is to control the conditions at which the layer is deposited to achieve a particular crystallinity. Factors such as substrate temperature during deposition, sputter power, and chamber pressure can affect the crystallinity of a deposited material.
Crystallinity depends on various deposition factors including deposition temperature, deposition pressure, rate of deposition, and method of deposition (e.g., evaporation, magnetron, chemical vapor deposition, etc.). Further details related to process conditions that may be used in some embodiments are provided in U.S. patent application Ser. No. 12/645,111, filed Dec. 22, 2009, and titled “FABRICATION OF LOW DEFECTIVITY WINDOWS,” which is herein incorporated by reference in its entirety. In some implementations, deposition conditions may be chosen to provide a polycrystalline material having crystallites on the order of 50-200 nm.
Another way to configure a material to scatter in the UV is to enhance the roughness of the layer. Such roughness can promote scattering in UV when done at an appropriate length scale. In various cases the scattering is not visible to humans.
As noted above, in certain embodiments a layer in an electrochromic window may be made globally or locally hazy (when considering UV wavelengths) to minimize the risk that a bird will try to fly through the window. The layer which is made hazy may be a layer that is commonly included in electrochromic windows, or it may be a new layer provided specifically for this purpose.
The haze-inducing layer may be positioned at any point within or on an electrochromic IGU or other electrochromic window. In a number of embodiments, the haze-inducing layer may be positioned between panes of an IGU. For example, it may be positioned between a substrate and a conductive layer, or between a conductive layer and an electrochromic stack, or between a conductive layer and a defect-mitigating-insulating layer, or between a defect-mitigating insulating layer and an electrochromic stack. In some other cases, a haze-inducing layer may be provided outside the panes of the IGU, for example on an exterior surface of an exterior pane (often referred to as S1) or on an interior surface of an interior pane (often referred to as S4), or on an additional substrate that may be laminated to either S1 or S4. In various embodiments, the patterned layer 405 shown in
The layer that selectively appears hazy at UV wavelengths may be made of a variety of materials. In some embodiments, a hazy layer may be a thin film that is substantially transparent to UV. The material of the hazy layer may be one having a polycrystalline structure having a grain size on the order of about 50-200 nm.
In particular implementations, a hazy layer may be made of titanium oxide, though various other materials listed herein may also be used.
Various embodiments herein relate to electrochromic windows that are designed to be visible to birds, for example by reflecting a pattern and/or haze that is apparent at UV wavelengths. For the sake of simplicity, the layer or layers that form a pattern and/or haze which renders the window visible to birds may be referred to as a bird friendly element. As noted above, one or more bird friendly elements may be positioned at a number of different locations on the window. Regardless of where the bird friendly element is positioned, it should be visible to a bird through all of the layers situated between the bird and the bird friendly element.
For example, if a glass substrate used in an electrochromic window absorbs a substantial amount of light at the wavelengths that produce the visual contrast, such contrast may not be transmitted through the substrate, and therefore may not actually be visible to the birds. Therefore, the choice of substrate can affect how bird friendly a window is.
Certain types of glass or other window substrates may be better suited for bird safe windows than other types of substrates. Substrates that absorb more UV, particularly in the UVA range, are generally less suitable.
Table 2 presents a table summarizing the results shown in
In certain embodiments, a bird friendly feature may include a UV light source, e.g., emitting with a peak wavelength of between about 320 nm and about 380 nm. The UV light source may be housed in the framing system of the electrochromic window, e.g., in a frame that houses an IGU. In some embodiments, a UV light source may be incorporated into a spacer of an IGU. There may be one or more UV light sources. The one or more UV light sources may project a uniform UV light pattern into the edge of the glass or onto the glass, or e.g., the light sources may project a non- uniform pattern into and/or onto the glass. In certain embodiments, the one or more UV light sources will project a pattern that is visible to birds but not visible to humans. One or more UV light sources may be used alone or in conjunction with UV absorbing and/or reflecting films on the glass and/or in a lamination layer between the lites if lamination is part of the IGU or other electrochromic window construct. The projected and/or reflected pattern may be as described herein, e.g., having less than 2 inches in the horizontal spacing and less than 4 inches in the vertical spacing (e.g., see
In certain embodiments, the UV light is attached to the framing system of the electrochromic window after the window is installed. It may be an add-on feature to existing EC windows. The UV light may be tuned specifically to work with the electrochromic film of the window in question, that is, retrofit of existing EC window installations can be achieved by tuning the UV light's output wavelength to be most effective with the electrochromic windows with which the light will be deployed. In certain embodiments, it is desirable to mount the UV light on the underside of the top of the frame, so that the light is projected downward and onto the electrochromic window, and e.g., the light will not collect dust or debris and be obscured. The light may also be provided on a side edge of the frame and/or on a bottom edge of a frame, as desired. In cases where multiple light sources are provided, they may be positioned proximate the same edge of an EC window, or proximate different edges.
In certain embodiments, alone or in combination with other embodiments described herein, an acoustical deterrent is included with an electrochromic window. In one embodiment, the acoustical deterrent operates in ultrasonic wavelengths. The acoustical deterrent may be included in the framing system of the electrochromic window or near it, but generally does not block the viewable area of the window. In one embodiment, the acoustical deterrent is powered by an onboard photovoltaic cell of the electrochromic window, e.g., as described below, or is powered by the window controller, or the acoustical deterrent has its own power source, such as a battery or a photovoltaic cell.
In some embodiments, an electrochromic window may be provided with a photovoltaic (PV) layer thereon. The PV layer may be organic or silicon-based. The PV layer may itself be patterned in a way that allows for birds to see the pattern while humans cannot. In some other cases, a non-patterned PV layer is provided in an electrochromic window having another patterned layer. The PV layer may be electrically connected with a component in/on/connected with the window to thereby allow the PV layer to generate electricity and power the electrochromic window/window controller. In one example, the (patterned or non-patterned) PV film is provided on a sheet that is laminated to an electrochromic IGU, for example on the exterior-facing surface of the exterior pane (often referred to as S1).
An electrochromic window may also be provided with one or more antennae patterned onto any of the surfaces of the window (e.g., surfaces S1, S2, S3, and/or S4 on an IGU). Briefly, the antennae may be formed by positioning thin conductive lines surrounded by an insulator on one or more surfaces of the window. The patterned antennae may serve the purpose of a bird safe layer where it is fabricated in a way that is visible to birds. In one example, a pattern (e.g., as described in relation to
In various embodiments, an integrated deposition system may be employed to fabricate electrochromic devices on, for example, architectural glass. The electrochromic devices are used to make IGUs which in turn are used to make electrochromic windows. The term “integrated deposition system” means an apparatus for fabricating electrochromic devices on optically transparent and translucent substrates. The apparatus may have multiple stations, each devoted to a particular unit operation such as depositing a particular component (or portion of a component) of an electrochromic device, as well as cleaning, etching, and temperature control of such device or portion thereof The multiple stations are fully integrated such that a substrate on which an electrochromic device is being fabricated can pass from one station to the next without being exposed to an external environment.
Integrated deposition systems operate with a controlled ambient environment inside the system where the process stations are located. A fully integrated system allows for better control of interfacial quality between the layers deposited. Interfacial quality refers to, among other factors, the quality of the adhesion between layers and the lack of contaminants in the interfacial region. The term “controlled ambient environment” means a sealed environment separate from an external environment such as an open atmospheric environment or a clean room. In a controlled ambient environment at least one of pressure and gas composition is controlled independently of the conditions in the external environment. Generally, though not necessarily, a controlled ambient environment has a pressure below atmospheric pressure; e.g., at least a partial vacuum. The conditions in a controlled ambient environment may remain constant during a processing operation or may vary over time. For example, a layer of an electrochromic device may be deposited under vacuum in a controlled ambient environment and at the conclusion of the deposition operation, the environment may be backfilled with purge or reagent gas and the pressure increased to, e.g., atmospheric pressure for processing at another station, and then a vacuum reestablished for the next operation and so forth.
In one embodiment, the system includes a plurality of deposition stations aligned in series and interconnected and operable to pass a substrate from one station to the next without exposing the substrate to an external environment. The plurality of deposition stations comprise (i) a first deposition station containing one or more targets for depositing a cathodically coloring electrochromic layer; (ii) a second (optional) deposition station containing one or more targets for depositing an ion conducting layer; and (iii) a third deposition station containing one or more targets for depositing a counter electrode layer. The second deposition station may be omitted in certain cases. For instance, the apparatus may not include any target for depositing a separate ion conductor layer.
Further, any of the layers of the stack may be deposited in two or more stations. For example, where an electrochromic layer and/or counter electrode layer is deposited to include two or more sublayers, each of the sublayers may be deposited in a different station. Alternatively or in addition, two or more sublayers within a layer may be deposited within the same station, in some cases using different targets in the same station. Targets of different compositions may be provided at different portions of the station to deposit the sublayers as desired. In another embodiment, a dedicated station is provided to deposit each layer or sublayer having a distinct composition.
The system may also include a controller containing program instructions for passing the substrate through the plurality of stations in a manner that sequentially deposits on the substrate (i) an electrochromic layer, (ii) an (optional) ion conducting layer, and (iii) a counter electrode layer to form a stack. In one embodiment, the plurality of deposition stations are operable to pass a substrate from one station to the next without breaking vacuum. In another embodiment, the plurality of deposition stations are configured to deposit the electrochromic layer, the optional ion conducting layer, and the counter electrode layer on an architectural glass substrate. In another embodiment, the integrated deposition system includes a substrate holder and transport mechanism operable to hold the architectural glass substrate in a vertical orientation while in the plurality of deposition stations. In yet another embodiment, the integrated deposition system includes one or more load locks for passing the substrate between an external environment and the integrated deposition system. In another embodiment, the plurality of deposition stations include at least two stations for depositing a layer selected from the group consisting of the cathodically coloring electrochromic layer, the ion conducting layer, and the anodically coloring (or optically passive) counter electrode layer.
In some embodiments, the integrated deposition system includes one or more lithium deposition stations, each including a lithium containing target. In one embodiment, the integrated deposition system contains two or more lithium deposition stations. In one embodiment, the integrated deposition system has one or more isolation valves for isolating individual process stations from each other during operation. In one embodiment, the one or more lithium deposition stations have isolation valves. In this document, the term “isolation valves” means devices to isolate depositions or other processes being carried out one station from processes at other stations in the integrated deposition system. In one example, isolation valves are physical (solid) isolation valves within the integrated deposition system that engage while the lithium is deposited. Actual physical solid valves may engage to totally or partially isolate (or shield) the lithium deposition from other processes or stations in the integrated deposition system. In another embodiment, the isolation valves may be gas knifes or shields, e.g., a partial pressure of argon or other inert gas is passed over areas between the lithium deposition station and other stations to block ion flow to the other stations. In another example, isolation valves may be an evacuated regions between the lithium deposition station and other process stations, so that lithium ions or ions from other stations entering the evacuated region are removed to, e.g., a waste stream rather than contaminating adjoining processes. This is achieved, e.g., via a flow dynamic in the controlled ambient environment via differential pressures in a lithiation station of the integrated deposition system such that the lithium deposition is sufficiently isolated from other processes in the integrated deposition system. Again, isolation valves are not limited to lithium deposition stations.
Target 830, in this case a cylindrical target, is oriented substantially parallel to and in front of the substrate surface where deposition is to take place (for convenience, other sputter means are not depicted here). Substrate 825 can translate past target 830 during deposition and/or target 830 can move in front of substrate 825. The movement path of target 830 is not limited to translation along the path of substrate 825. Target 830 may rotate along an axis through its length, translate along the path of the substrate (forward and/or backward), translate along a path perpendicular to the path of the substrate, move in a circular path in a plane parallel to substrate 825, etc. Target 830 need not be cylindrical, it can be planar or any shape necessary for deposition of the desired layer with the desired properties. Also, there may be more than one target in each deposition station and/or targets may move from station to station depending on the desired process.
Integrated deposition system 800 also has various vacuum pumps, gas inlets, pressure sensors and the like that establish and maintain a controlled ambient environment within the system. These components are not shown, but rather would be appreciated by one of ordinary skill in the art. System 800 is controlled, e.g., via a computer system or other controller, represented in
As mentioned, the various stations of an integrated deposition system may be modular, but once connected, form a continuous system where a controlled ambient environment is established and maintained in order to process substrates at the various stations within the system.
In various embodiments, the apparatus may include one or more stations for forming a bird friendly layer, for example a patterned layer and/or a haze-inducing layer. Such stations may be referred to as patterning stations. A patterning station may be configured to etch a pre-patterned layer to form a patterned layer. Etching may occur through any of the methods discussed herein including, but not limited to, laser etching, plasma etching, ion milling, etc. Appropriate hardware may be provided to accomplish these processes. In some cases, an x-y stage may be provided in the patterning station to help move the substrate as etching occurs (e.g., laser etching). In some embodiments, the patterning station may include one or more masks that are applied to a substrate to help form the pattern (either through etching or deposition). A positioning system may be included to position the mask as desired on the substrate.
In a number of embodiments, the patterning station may be provided as multiple individual (but connected) stations. Many configurations are possible. In one example, a first patterning station may be used to deposit a layer of pre-patterned material, a second patterning station may be used to apply a mask to the substrate, a third patterning station may be used to selectively etch the pre-patterned layer to form a patterned layer, and a fourth patterning station may be used to remove the mask from the substrate. In another example, a first patterning station may be used to position a mask on the substrate, a second patterning station may be used to selectively deposit material on the substrate, and a third patterning station may be used to remove the mask from the substrate. The mask application and removal may also be done in the same chamber as an etching and/or deposition process, as mentioned above.
Integrated depositions systems such as the ones shown in
Although the foregoing embodiments have been described in some detail to facilitate understanding, the described embodiments are to be considered illustrative and not limiting. It will be apparent to one of ordinary skill in the art that certain changes and modifications can be practiced within the scope of the appended claims.
| Number | Date | Country | |
|---|---|---|---|
| 62269721 | Dec 2015 | US | |
| 62238609 | Oct 2015 | US | |
| 62191182 | Jul 2015 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 15738110 | Dec 2017 | US |
| Child | 16781564 | US |
