Number | Name | Date | Kind |
---|---|---|---|
4863563 | Scardera et al. | Sep 1989 | |
5089432 | Yoo | Feb 1992 | |
5284800 | Lien et al. | Feb 1994 | |
5344797 | Pai et al. | Sep 1994 | |
5354715 | Wang et al. | Oct 1994 |
Entry |
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"Si/W Ratio Changes and Film Peeling During Polycide Anneal" by C. S. Yoo, Japanese Journal of Applied Physics, vol. 29, Nov. 1990, pp. 2535-2540. |