Claims
- 1. A case for a plate for use in a photolithographic process, comprising a case main unit having an upper opening for accommodating the plate, a lid for the opening of the case main unit, a lower cushion on an inner bottom of the case main unit, and an upper cushion removably disposed on an inner ceiling of the lid, whereby the plate is accommodated as elastically squeezed at opposite peripheral ends of the plate between the upper and lower cushions, wherein the upper cushion has a smooth surface on the side touching the inner surface of the lid and has a coarse surface on the side touching the accommodated plate, and the upper cushion is not adhered to the inner surface of the lid, wherein the upper and lower cushions are made of a rubber from the group consisting of a silicone rubber or a fluoro-rubber.
- 2. A case according to claim 1, for a photomask.
- 3. A case according to claim 1, for a photomask substrate.
- 4. A case for a plate for use in a photolithographic process, comprising a case main unit having an upper opening for accommodating the plate, a lid for the opening of the case main unit, a lower cushion on an inner bottom of the case main unit, and an upper cushion removably disposed on an inner ceiling of the lid, whereby the plate is accommodated as elastically squeezed at opposite peripheral ends of the plate between the upper and lower cushions, wherein the upper cushion has a smooth surface on the side touching the inner surface of the lid and a single-sided adhesive tape made of a material not adherent to glass is attached on the side of the upper cushion touching the accommodated plate, and the upper cushion is not adhered to the inner surface of the lid, and wherein the upper and lower cushions are made of a rubber from the group consisting of a silicone rubber or a fluoro-rubber.
- 5. A case according tot claim 4, for a photomask.
- 6. A case according to claim 4, for a photomask substrate.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3-4455 |
Feb 1991 |
JPX |
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Parent Case Info
This is a continuation-in-part of copending patent application Ser. No. 07/831,903 filed on Feb. 6, 1992, now abandoned.
US Referenced Citations (10)
Foreign Referenced Citations (2)
Number |
Date |
Country |
63-179355 |
Jul 1988 |
JPX |
6613821 |
Apr 1968 |
NLX |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
831903 |
Feb 1992 |
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