Containers specially adapted for masks, mask blanks or pellicles Preparation thereof

Industry

CPC
G03F1/66

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof

Current Industry

G03F1/66Containers specially adapted for masks, mask blanks or pellicles Preparation thereof

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Inner pod holding device conducive to reducing dust contamination a...
- Patent number 12,306,550
- Issue date May 20, 2025
- GUDENG EQUIPMENT CO., LTD.
- Yin-Feng Chan
- G01 - MEASURING TESTING
Information Patent Grant
Advanced load port for photolithography mask inspection tool
- Patent number 12,298,664
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Jung Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod including motion limiting features and method of assemb...
- Patent number 12,276,924
- Issue date Apr 15, 2025
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for positioning and clamped curing
- Patent number 12,271,108
- Issue date Apr 8, 2025
- ASML Netherlands B.V.
- Martin Dieter Nico Peters
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Reticle pod having latch including ramped surface
- Patent number 12,271,110
- Issue date Apr 8, 2025
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Agglutinant for pellicle, pellicle, exposure original plate with pe...
- Patent number 12,265,324
- Issue date Apr 1, 2025
- Shin-Etsu Chemical Co., Ltd.
- Yuichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method for photo masks and apparatus therefor
- Patent number 12,259,649
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsin-Chang Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle container having rotating connector with spring force latching
- Patent number 12,253,798
- Issue date Mar 18, 2025
- Entegris, Inc.
- Russ V. Raschke
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Solution, solution storage body, actinic ray-sensitive or radiation...
- Patent number 12,253,801
- Issue date Mar 18, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method of reticle pod having inspection window
- Patent number 12,248,245
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wang Cheng Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Particle prevention method in reticle pod
- Patent number 12,189,283
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage environment monitoring system and methods of operation
- Patent number 12,174,528
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Wei Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Reticle pod with window
- Patent number 12,140,860
- Issue date Nov 12, 2024
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 12,135,499
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pei-Cheng Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for containing a reticle in a pod
- Patent number 12,094,743
- Issue date Sep 17, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Operating method for preventing photomask particulate contamination
- Patent number 12,066,765
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Chieh Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod including motion limiting features and method of assemb...
- Patent number 12,013,648
- Issue date Jun 18, 2024
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High throughput and high position accurate method for particle insp...
- Patent number 12,013,646
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Jui Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for fabricating a semiconductor device and method for fab...
- Patent number 12,009,238
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-detachable valve, substrate container provided with the same,...
- Patent number 12,009,239
- Issue date Jun 11, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening-and-closing device
- Patent number 11,987,445
- Issue date May 21, 2024
- Murata Machinery, Ltd.
- Akifumi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of lithography process and transferring a reticle
- Patent number 11,982,944
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Quick-release valve module, reticle pod provided with quick-release...
- Patent number 11,981,483
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Reticle pod provided with optically identifiable marks and method f...
- Patent number 11,982,937
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for manufacturing a membrane assembly
- Patent number 11,971,656
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Johan Hendrik Klootwijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,940,727
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask protective module, pellicle having the same, and lithography a...
- Patent number 11,940,726
- Issue date Mar 26, 2024
- Industry-University Cooperation Foundation Hanyang University
- Jinho Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced load port for photolithography mask inspection tool
- Patent number 11,921,431
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Jung Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Container for holding and transporting reticles having a transparen...
- Patent number 11,914,287
- Issue date Feb 27, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece container system
- Patent number 11,874,596
- Issue date Jan 16, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD FOR PHOTO MASKS AND APPARATUS THEREFOR
- Publication number 20250180983
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING ROTATING CONNECTOR WITH SPRING FORCE LATCHING
- Publication number 20250180982
- Publication date Jun 5, 2025
- Entegris, Inc.
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
STRUCTURE AND METHOD OF RETICLE POD HAVING INSPECTION WINDOW
- Publication number 20250180984
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD WITH AIR FLOW MANAGEMENT FEATURE
- Publication number 20250147410
- Publication date May 8, 2025
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTACTS FOR REDUCING WEAR IN A RETICLE CONTAINER
- Publication number 20250102901
- Publication date Mar 27, 2025
- Entegris, Inc.
- Huaping Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...
- Publication number 20250053100
- Publication date Feb 13, 2025
- GUDENG PRECISION INDUSTRIAL CO,. LTD.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BASEPLATE FOR SUPPORTING A RETICLE AND RELATED SYSTEMS AND METHODS
- Publication number 20250028239
- Publication date Jan 23, 2025
- Entegris, Inc.
- Huaping Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUAL POD WITH GUIDE MECHANISM
- Publication number 20250020994
- Publication date Jan 16, 2025
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE ASSEMBLY, RETICLE ASSEMBLY, RETICLE CASE, PELLICLE MEASURE...
- Publication number 20250013143
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- Yunhan LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20240385511
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20240377727
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20240369921
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET PELLICLE STORAGE AND METHOD OF PRESERVING EXTRE...
- Publication number 20240337922
- Publication date Oct 10, 2024
- LINTEC OF AMERICA, INC.
- Marcio D. LIMA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...
- Publication number 20240329544
- Publication date Oct 3, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G01 - MEASURING TESTING
Information Patent Application
RETICLE POD WITH BACKSIDE STATIC DISSIPATION
- Publication number 20240312816
- Publication date Sep 19, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD INCLUDING MOTION LIMITING FEATURES AND METHOD OF ASSEMB...
- Publication number 20240302757
- Publication date Sep 12, 2024
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
- Publication number 20240295826
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Jui HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...
- Publication number 20240297057
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIEN HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL INSPECTION DEVICE FOR SURFACE OF RETICLE POD AND OPTICAL IN...
- Publication number 20240295830
- Publication date Sep 5, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD...
- Publication number 20240264522
- Publication date Aug 8, 2024
- Samsung Electronics Co., Ltd.
- Yun Song JEONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photomask handling assembly for atmospheric pressure plasma chamber
- Publication number 20240201580
- Publication date Jun 20, 2024
- Nolan Layne ZIMMERMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240192588
- Publication date Jun 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRIPPING MECHANISM FOR INSPECTION OF RETICLE INNER POD
- Publication number 20240192587
- Publication date Jun 13, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pellicle Frame Laminate and Method for Manufacturing Pellicle Using...
- Publication number 20240192586
- Publication date Jun 13, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yu Yanase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL
- Publication number 20240168387
- Publication date May 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Jung CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER WITH DIRECTED PURGE FLOW
- Publication number 20240160098
- Publication date May 16, 2024
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING PLATING WITH REDUCED EDGE BUILD
- Publication number 20240061326
- Publication date Feb 22, 2024
- Entegris, Inc.
- Russ V. Raschke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MASK POD BOX AND MASK TRANSFER DEVICE
- Publication number 20240036481
- Publication date Feb 1, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chuang SHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
- Publication number 20240006210
- Publication date Jan 4, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSERTS FOR SPACING IN RETICLE CONTAINERS
- Publication number 20230418152
- Publication date Dec 28, 2023
- Entegris, Inc.
- Russ V. Raschke
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Containers specially adapted for masks, mask blanks or pellicles Preparation thereof

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Inner pod holding device conducive to reducing dust contamination a...

Advanced load port for photolithography mask inspection tool

Reticle pod including motion limiting features and method of assemb...

Apparatus for positioning and clamped curing

Reticle pod having latch including ramped surface

Agglutinant for pellicle, pellicle, exposure original plate with pe...

Cleaning method for photo masks and apparatus therefor

Reticle container having rotating connector with spring force latching

Solution, solution storage body, actinic ray-sensitive or radiation...

Structure and method of reticle pod having inspection window

Particle prevention method in reticle pod

Storage environment monitoring system and methods of operation

Reticle pod with window

Reticle enclosure for lithography systems

Method for containing a reticle in a pod

Operating method for preventing photomask particulate contamination

Reticle pod including motion limiting features and method of assemb...

High throughput and high position accurate method for particle insp...

Apparatus for fabricating a semiconductor device and method for fab...

Quick-detachable valve, substrate container provided with the same,...

Lid opening-and-closing device

Method of lithography process and transferring a reticle

Quick-release valve module, reticle pod provided with quick-release...

Reticle pod provided with optically identifiable marks and method f...

Method for manufacturing a membrane assembly

Reticle enclosure for lithography systems

Mask protective module, pellicle having the same, and lithography a...

Advanced load port for photolithography mask inspection tool

Container for holding and transporting reticles having a transparen...

Workpiece container system

Patents Applicationslast 30 patents

CLEANING METHOD FOR PHOTO MASKS AND APPARATUS THEREFOR

RETICLE CONTAINER HAVING ROTATING CONNECTOR WITH SPRING FORCE LATCHING

STRUCTURE AND METHOD OF RETICLE POD HAVING INSPECTION WINDOW

RETICLE POD WITH AIR FLOW MANAGEMENT FEATURE

CONTACTS FOR REDUCING WEAR IN A RETICLE CONTAINER

RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...

BASEPLATE FOR SUPPORTING A RETICLE AND RELATED SYSTEMS AND METHODS

DUAL POD WITH GUIDE MECHANISM

PELLICLE ASSEMBLY, RETICLE ASSEMBLY, RETICLE CASE, PELLICLE MEASURE...

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

EXTREME ULTRAVIOLET PELLICLE STORAGE AND METHOD OF PRESERVING EXTRE...

INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...

RETICLE POD WITH BACKSIDE STATIC DISSIPATION

RETICLE POD INCLUDING MOTION LIMITING FEATURES AND METHOD OF ASSEMB...

HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...

APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...

OPTICAL INSPECTION DEVICE FOR SURFACE OF RETICLE POD AND OPTICAL IN...

MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD...

Photomask handling assembly for atmospheric pressure plasma chamber

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

GRIPPING MECHANISM FOR INSPECTION OF RETICLE INNER POD

Pellicle Frame Laminate and Method for Manufacturing Pellicle Using...

ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL

RETICLE CONTAINER WITH DIRECTED PURGE FLOW

RETICLE CONTAINER HAVING PLATING WITH REDUCED EDGE BUILD

MASK POD BOX AND MASK TRANSFER DEVICE

METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...

INSERTS FOR SPACING IN RETICLE CONTAINERS