Handling masks outside exposure position

Industry

CPC
G03F7/70741

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70741Handling masks outside exposure position

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Substrate storage apparatus provided with storage environment detec...
- Patent number 12,198,958
- Issue date Jan 14, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Reticle carrier and associated methods
- Patent number 12,189,311
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle gripper damper and isolation system for lithographic appara...
- Patent number 12,189,312
- Issue date Jan 7, 2025
- ASML Holding N.V.
- Roberto B. Wiener
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage environment monitoring system and methods of operation
- Patent number 12,174,528
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Wei Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Storage for extreme ultraviolet light lithography
- Patent number 12,169,369
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Guancyun Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Enhancing lithography operation for manufacturing semiconductor dev...
- Patent number 12,153,351
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chen Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle detection apparatus, reticle detection method, exposure mac...
- Patent number 12,117,738
- Issue date Oct 15, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,111,583
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kai-Chieh Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for containing a reticle in a pod
- Patent number 12,094,743
- Issue date Sep 17, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod with antistatic capability
- Patent number 12,087,605
- Issue date Sep 10, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
High throughput and high position accurate method for particle insp...
- Patent number 12,013,646
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Jui Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod provided with optically identifiable marks and method f...
- Patent number 11,982,937
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transport system having a magnetically levitated transportation stage
- Patent number 11,953,836
- Issue date Apr 9, 2024
- Massachusetts Institute of Technology
- Lei Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle processing system
- Patent number 11,940,724
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Sanjay Bhat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,940,727
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intermediate layer for mechanical interface
- Patent number 11,927,889
- Issue date Mar 12, 2024
- ASML Holding N.V.
- Kushal Sandeep Doshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Advanced load port for photolithography mask inspection tool
- Patent number 11,921,431
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Jung Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,854,846
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Semiconductor manufacturing system
- Patent number 11,852,982
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Yuan Yao
- B08 - CLEANING
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhancing lithography operation for manufacturing semiconductor dev...
- Patent number 11,829,076
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chen Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle storage pod and method for securing reticle
- Patent number 11,822,257
- Issue date Nov 21, 2023
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 11,822,256
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kai-Chieh Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod and wear parts thereof
- Patent number 11,787,621
- Issue date Oct 17, 2023
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of discharging an EUV mask
- Patent number 11,698,591
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Zhen Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod for preventing haze contamination and reticle stocker h...
- Patent number 11,693,307
- Issue date Jul 4, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Jiyong Yoo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduce mask defect impact by contamination decompose
- Patent number 11,687,012
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle carrier and associated methods
- Patent number 11,687,011
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conversion plate for reticle pod storage and a reticle pod storage...
- Patent number 11,658,053
- Issue date May 23, 2023
- GLOBALFOUNDRIES U.S. INC.
- Michael Raga-Barone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,614,683
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS TO CALIBRATE RETICLE THERMAL EFFECTS
- Publication number 20250021017
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Raaja Ganapathy SUBRAMANIAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME
- Publication number 20250021008
- Publication date Jan 16, 2025
- Samsung Electronics Co., Ltd.
- Yebin Nam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...
- Publication number 20240393701
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chen SU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240385537
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20240377727
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...
- Publication number 20240329544
- Publication date Oct 3, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G01 - MEASURING TESTING
Information Patent Application
RETICLE POD WITH BACKSIDE STATIC DISSIPATION
- Publication number 20240312816
- Publication date Sep 19, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
- Publication number 20240295826
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Jui HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL INSPECTION DEVICE FOR SURFACE OF RETICLE POD AND OPTICAL IN...
- Publication number 20240295830
- Publication date Sep 5, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
JIG FOR AUTOMATICALLY MEASURING FLOW RATE OF RETICLE CARRIER
- Publication number 20240219217
- Publication date Jul 4, 2024
- GUDENG EQUIPMENT CO., LTD.
- CHIN-HUNG WEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240192588
- Publication date Jun 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL
- Publication number 20240168387
- Publication date May 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Jung CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE STORAGE CABINET SYSTEM AND METHOD USING THE SAME
- Publication number 20240160116
- Publication date May 16, 2024
- Ming-Chien CHIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET INNER POD DISTRIBUTED SUPPORT
- Publication number 20240111222
- Publication date Apr 4, 2024
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE INSPECTION AND PURGING METHOD AND TOOL
- Publication number 20240103359
- Publication date Mar 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Xianhui ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE REMOVAL METHOD
- Publication number 20240085808
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Yuan YAO
- B08 - CLEANING
Information Patent Application
Transport System Having a Magnetically Levitated Transportation Stage
- Publication number 20240085809
- Publication date Mar 14, 2024
- Massachusetts Institute of Technology
- Lei ZHOU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
RETICLE STORAGE POD AND METHOD FOR SECURING RETICLE
- Publication number 20240085807
- Publication date Mar 14, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGE DISSIPATIVE RETICLE TABLE CLEANING RETICLE
- Publication number 20240045346
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Pedro Julian RIZO DIAGO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK POD BOX AND MASK TRANSFER DEVICE
- Publication number 20240036481
- Publication date Feb 1, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chuang SHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240019789
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230418169
- Publication date Dec 28, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE EXCHANGE DEVICE WITH RETICLE LEVITATION
- Publication number 20230395409
- Publication date Dec 7, 2023
- Massachusetts Institute of Technology
- David L. Trumper
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...
- Publication number 20230384693
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yih-Chen SU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE
- Publication number 20230384695
- Publication date Nov 30, 2023
- Entegris, Inc.
- Lesa Lindgren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REDUCE MASK DEFECT IMPACT BY CONTAMINATION DECOMPOSE
- Publication number 20230280665
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230280664
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20230266677
- Publication date Aug 24, 2023
- Gigaphoton Inc.
- Fumio IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230236498
- Publication date Jul 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK TO BE PROJECTED ON AN OBJECT DURING A LITHOGRAHPIC PROCESS AND...
- Publication number 20230229093
- Publication date Jul 20, 2023
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Handling masks outside exposure position

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate storage apparatus provided with storage environment detec...

Reticle carrier and associated methods

Reticle gripper damper and isolation system for lithographic appara...

Storage environment monitoring system and methods of operation

Storage for extreme ultraviolet light lithography

Enhancing lithography operation for manufacturing semiconductor dev...

Reticle detection apparatus, reticle detection method, exposure mac...

Semiconductor processing tool and methods of operation

Method for containing a reticle in a pod

Reticle pod with antistatic capability

High throughput and high position accurate method for particle insp...

Reticle pod provided with optically identifiable marks and method f...

Transport system having a magnetically levitated transportation stage

Reticle processing system

Reticle enclosure for lithography systems

Intermediate layer for mechanical interface

Advanced load port for photolithography mask inspection tool

System for a semiconductor fabrication facility and method for oper...

Semiconductor manufacturing system

Reticle transportation container

Enhancing lithography operation for manufacturing semiconductor dev...

Reticle storage pod and method for securing reticle

Semiconductor processing tool and methods of operation

Reticle pod and wear parts thereof

System and method of discharging an EUV mask

Reticle pod for preventing haze contamination and reticle stocker h...

Reduce mask defect impact by contamination decompose

Reticle carrier and associated methods

Conversion plate for reticle pod storage and a reticle pod storage...

Reticle enclosure for lithography systems

Patents Applicationslast 30 patents

METHODS AND SYSTEMS TO CALIBRATE RETICLE THERMAL EFFECTS

TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME

ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION

INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...

RETICLE POD WITH BACKSIDE STATIC DISSIPATION

HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...

OPTICAL INSPECTION DEVICE FOR SURFACE OF RETICLE POD AND OPTICAL IN...

JIG FOR AUTOMATICALLY MEASURING FLOW RATE OF RETICLE CARRIER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL

RETICLE STORAGE CABINET SYSTEM AND METHOD USING THE SAME

EXTREME ULTRAVIOLET INNER POD DISTRIBUTED SUPPORT

RETICLE INSPECTION AND PURGING METHOD AND TOOL

PARTICLE REMOVAL METHOD

Transport System Having a Magnetically Levitated Transportation Stage

RETICLE STORAGE POD AND METHOD FOR SECURING RETICLE

CHARGE DISSIPATIVE RETICLE TABLE CLEANING RETICLE

MASK POD BOX AND MASK TRANSFER DEVICE

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

RETICLE EXCHANGE DEVICE WITH RETICLE LEVITATION

ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...

RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE

REDUCE MASK DEFECT IMPACT BY CONTAMINATION DECOMPOSE

RETICLE CARRIER AND ASSOCIATED METHODS

TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

MARK TO BE PROJECTED ON AN OBJECT DURING A LITHOGRAHPIC PROCESS AND...