Number | Date | Country | Kind |
---|---|---|---|
61-195384 | Aug 1986 | JPX | |
61-207856 | Sep 1986 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3117022 | Bronson et al. | Jan 1964 | |
4315153 | Vahrenkamp | Feb 1982 | |
4457803 | Takigawa | Jul 1984 | |
4476393 | Taya | Oct 1984 | |
4486664 | Wollnik | Dec 1984 | |
4609809 | Yamaguchi et al. | Sep 1986 | |
4641034 | Okamura et al. | Feb 1987 | |
4697086 | Ishitami et al.l | Sep 1987 |
Number | Date | Country |
---|---|---|
0162468 | Nov 1985 | EPX |
Entry |
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"Maskless Ion Implantation Tech.: Be and Si Implantation in GaAs", Hashimoto et. al., Japanese Journal Oyo Butsuri (Applied Physics), vol. 53, No. 8 (1984) pp. 704-708 (not translated). |