Number | Name | Date | Kind |
---|---|---|---|
5226437 | Kamikawa et al. | Jul 1993 | |
5370142 | Nishi et al. | Dec 1994 | |
5409594 | Al-Jiboory et al. | Apr 1995 | |
5421905 | Ueno et al. | Jun 1995 | |
5462604 | Shibano et al. | Oct 1995 | |
5503171 | Yokomizo et al. | Apr 1996 | |
5505785 | Ferrell | Apr 1996 | |
5534076 | Bran | Jul 1996 | |
5584401 | Yoshida | Dec 1996 | |
5625249 | Grant | Apr 1997 |
Entry |
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Handbook of Semiconductor Wafer Technology, Noyes Publications, pp. 22, 23, 141 and 142, 1993. |