The present invention will be better understood from the following detailed description of the preferred embodiment according to the present invention, taken in con junction with the accompanying drawings, in which
The following description of the preferred embodiment is provided to understand the features and the structures of the present invention.
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The first target chamber 1 has a hole part 13 at center and the hole part 13 has a first foil layer 11 and a second foil layer 12 at two opposite ends; has a flow channel 14 on a surface of the first target chamber 1 encircling the hole part 13; has a liquid inlet 15 and a gas inlet 16 on outside surface of the first target chamber 1 to connect to the flow channel 14; and has a plurality of first fixing holes 17.
The second target chamber 2 comprises a disc lump 21; and an extension part 22 on a side surface of the disc lump 21. The disc lump 21 is deposed on a surface of the first target chamber 1 which surface has the flow channel 14. The disc lump 21 has a plurality of second fixing holes 211 corresponding to the first fixing holes 17 of the first target chamber 1 to be locked by a plurality of fixing members (not shown in the figures) through the first and the second fixing holes 17, 211. The second target chamber 2 has a communicating chamber 23 at center penetrating through the disc lump 21 and the extension part 22. The communicating chamber 23 has a concave 24 deposed on the disc lump 21 at a proper position of a rim of the communicating chamber 23. The second target chamber 2 has an outlet 25 on an outside surface of the extension part 22 and the outlet 25 connects to the communicating chamber 23. And the outlet 25 is connected with a tubing 26.
The carrier element 3 is located in the communicating chamber 23; and has a store part 31 on an end surface and a concave part 32 which encircles the carrier element 3. And the concave part 32 has a gap 33 at a proper position of a side of the concave part 32. Thus, a novel circulated cooled target is obtained.
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To sum up, the present invention is a circulated cooled target, where a required cooling water and a required cooling gas is filled into a first target chamber from a liquid inlet and a gas inlet to cool down the target by circulating a carrier element coordinated with a concave part and then being flown out from an outlet of a second target chamber.
The preferred embodiment herein disclosed is not intended to unnecessarily limit the scope of the invention. Therefore, simple modifications or variations belonging to the equivalent of the scope of the claims and the instructions disclosed herein for a patent are all with in the scope of the present invention.