Claims
- 1. A method of assembling a semiconductor device comprising securing a diaphragm with an aperture therein by means of insulation to a ring-shaped electrode having a threaded skirt depending therefrom, assembling a spring member on a cylindrical electrode having a flange at one end and inserting the cylindrical electrode through the aperture in the diaphragm with the spring member being positioned between the flange and the diaphragm, positioning a semiconductor pellet on a base having a threaded flange, positioning the flange of the cylindrical electrode on the semiconductor pellet, and screwing the threaded skirt onto the threaded flange on the base to a predetermined torque to compress the spring member and exert a predetermined pressure on the pellet, and securing the diaphragm to the cylindrical electrode.
- 2. The method described in claim 1 including the steps of assembling a spring loaded electrode coaxial with the cylindrical electrode and insulated therefrom so that the spring loaded electrode contacts and engages the semiconductor pellet under compression when the other two electrodes are assembled to the base.
- 3. A method of assembling a semiconductor device as described in claim 1 including the step of assembling a wetting wafer between the base and to semiconductor pellet to provide an electrical interface between the base and the pellet.
- 4. A method of assembling a semiconductor device as described in claim 2 including the steps of hermetically sealing the diaphragm to the cathode tube and hermetically sealing the skirt of the ring shaped electrode to the base.
Parent Case Info
This is a division of application Ser. No. 621,917, filed Oct. 14, 1975 and now abandoned.
US Referenced Citations (4)
Foreign Referenced Citations (1)
Number |
Date |
Country |
1,070,092 |
May 1967 |
UK |
Divisions (1)
|
Number |
Date |
Country |
Parent |
621917 |
Oct 1975 |
|